Sensing an ICMFB output to detect functional state of a MEMS sensor

Patent metadata

Field	Value
Publication number	US-11143670-B2
Application number	US-201715599234-A
Country	US
Kind code	B2
Filing date	May 18, 2017
Priority date	May 18, 2017
Publication date	Oct 12, 2021
Grant date	Oct 12, 2021

Abstract

In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.

First claim

What is claimed is:

1. A method comprising:
monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit, the ICMFB coupled to a microelectromechanical system (MEMS) sensor through a plurality of nodes, the monitoring comprising:
measuring, by a sample and hold (S/H) circuit, a first ICMFB voltage generated by the ICMFB circuit operating in a first operating mode, and
measuring, by the S/H circuit, a second ICMFB voltage generated by the ICMFB circuit in a second operating mode;
computing a first differential voltage corresponding to a difference between the first ICMFB voltage and the second ICMFB voltage;
computing a second differential voltage corresponding to a difference between the first differential voltage and a predetermined voltage measured; and
determining whether all of the plurality of nodes is electrically connected to the ICMFB circuit in accordance with the second differential voltage.

2. The method of claim 1 , further comprising reading the predetermined voltage stored in a memory before computing the second differential voltage.

3. The method of claim 1 , wherein the determining whether all of the plurality of nodes is electrically connected comprises computing a third differential voltage corresponding to a difference between the second differential voltage and a threshold voltage.

4. The method of claim 1 , further comprising measuring a minimum voltage corresponding to a minimum value of the first differential voltage.

5. The method of claim 4 , further comprising determining whether all of the plurality of nodes is electrically connected based on a comparison between the minimum voltage and a threshold value stored in a memory.

6. The method of claim 1 , wherein the second operating mode is a reverse input polarity mode of the first operating mode.

7. The method of claim 1 , further comprising storing the differential voltage in a memory.

8. The method of claim 1 , wherein the ICMFB circuit comprises a first terminal and a second terminal, wherein the MEMS sensor comprises a first terminal and a second terminal, the method further comprising:
providing the first operating mode corresponding to the first terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit; and
providing the second operating mode corresponding to the first terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit, the second operating mode being a reverse input polarity mode of the first operating mode.

9. The method of claim 1 , wherein the MEMS sensor is coupled to a differential sense interface.

Assignees

• St Microelectronics Inc

Inventors

• Choi Davy
• Hu Yamu
• Fang Deyou

Classifications

• G01R31/2829

  Testing of circuits in sensor or actuator systems (testing of apparatus for measuring electric or magnetic variables G01R35/00; testing of indicating or recording apparatus G01D; in airbag systems B60R21/0173; checking gas analysers G01N33/007; monitoring or fail-safe circuits for electromagnets H01F7/1844) · CPC title

• G01P21/00 Primary

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title

• G01P15/125

  by capacitive pick-up · CPC title

• G01R19/10

  Measuring sum, difference or ratio · CPC title