Substrate polishing apparatus
US-2019389027-A1 · Dec 26, 2019 · US
US12090601B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12090601-B2 |
| Application number | US-202217711239-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 1, 2022 |
| Priority date | Jan 29, 2020 |
| Publication date | Sep 17, 2024 |
| Grant date | Sep 17, 2024 |
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An apparatus for manufacturing a display device includes a moving part including a belt that circulates, a roller that circulates the belt, and at least one meandering prevention portion that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt, and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt. A part of the at least one meandering prevention portion faces a second surface of the belt, the second surface being a side surface of the belt.
Opening claim text (preview).
What is claimed is: 1. An apparatus for manufacturing a display device, the apparatus comprising: a moving part comprising: a belt that circulates; a roller that circulates the belt; and at least one meandering prevention device that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt; and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt, wherein the at least one meandering prevention device includes a first roller having a cylindrical shape with a first end, a second end, and a main surface between the first end and the second end, the at least one meandering prevention device further comprises a first motor that rotates the first roller and a first spacing adjusting device that linearly moves the first roller in the first direction, the first end of the first roller faces a second surface of the belt, the second surface being a side surface of the belt, and the first end of the first roller directly abuts the second surface of the belt in the first direction. 2. The apparatus of claim 1 , wherein the at least one meandering prevention device comprises a first meandering prevention device and a second meandering prevention device, and the belt is disposed between the first meandering prevention device and the second meandering prevention device. 3. The apparatus of claim 1 , wherein the at least one meandering prevention device is disposed in a region in which a moving direction of the belt changes. 4. The apparatus of claim 1 , wherein the moving part further comprises a cleaning device that cleans a surface of the belt. 5. The apparatus of claim 1 , wherein the moving part further comprises an adjusting device facing and pressing against a third surface of the belt, the third surface being opposite to the first surface of the belt. 6. The apparatus of claim 1 , further comprising a measuring part that observes alignment marks disposed on the first surface of the belt. 7. The apparatus of claim 6 , further comprising a spray part that removes a polish disposed on the alignment marks. 8. The apparatus of claim 1 , wherein the belt comprises an opening on which the base material is disposed. 9. The apparatus of claim 1 , wherein the roller that circulates the belt has a cylindrical shape with a first end, a second end, and a main surface between the first end and the second end, and the main surface of the roller and the main surface of the first roller directly face each other. 10. The apparatus of claim 9 , wherein the main surface of the roller and the main surface of the first roller directly contact each other. 11. The apparatus of claim 1 , wherein the at least one meandering prevention device directly contacts the roller.
Mechanical parts of transfer devices · CPC title
Apparatus for mechanical treatment or grinding or cutting · CPC title
Lapping pads for working plane surfaces · CPC title
Displays, e.g. liquid crystal displays, plasma displays · CPC title
Smoothing, polishing, making a glossy surface · CPC title
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