Process for manufacturing a silicon carbide coated body

Patent metadata

Field	Value
Publication number	US-12077441-B2
Application number	US-201816957682-A
Country	US
Kind code	B2
Filing date	Dec 22, 2018
Priority date	Dec 27, 2017
Publication date	Sep 3, 2024
Grant date	Sep 3, 2024

Abstract

The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.

First claim

The invention claimed is:

1. An activated graphite substrate having an initial open porosity comprising pores with an average pore diameter in a range of 0.4-5.0 μm and comprising pores with a surface pore diameter of <10 μm, and a subsequently modified surface porosity comprising pores with an average pore diameter of >10 μm at a surface of the activated graphite substrate, and the activated graphite substrate having an average grain size of <0.05 mm.

2. The activated graphite substrate of claim 1 , wherein the activated graphite substrate, before modification of a pore size thereof, has a chlorine content of at least about 20.00 ppb by weight, wherein said chlorine content is present in the activated graphite substrate>50 μm below an outer surface thereof.

3. The activated graphite substrate of claim 1 , further comprising a silicon carbide layer on a surface thereof.

4. The activated graphite substrate of claim 3 , wherein the silicon carbide layer is formed over the subsequently modified surface porosity, wherein the average pore diameter of the pores of the subsequently modified surface porosity is up to 30 μm, and the subsequently modified surface porosity comprises pores with an average pore diameter and pores with a pore diameter of >10 μm at the surface of the activated graphite substrate, and having an average grain size of <0.05 mm.

5. A process chamber component for high temperature processing of a component, comprising:
a graphite substrate having an initial open porosity comprising pores with an average pore diameter in a range of 0.4-5.0 μm and comprising pores with a surface pore diameter of <10 μm, and a subsequently modified surface porosity comprising pores with an average pore diameter of >10 μm, and the graphite substrate having an average grain size of <0.05 mm; and
a silicon carbide layer on a surface of the graphite substrate, the silicon carbide layer derived from dimethyldichlorosilane, the silicon carbide layer extending inwardly of the pores of the subsequently modified surface porosity.

6. The process chamber component of claim 5 , wherein the process chamber component, before modification of a pore size thereof, has a chlorine content of at least about 20.00 ppb by weight, wherein said chlorine content is present in the graphite substrate>50 μm below an outer surface thereof.

7. The process chamber component of claim 6 , wherein the silicon carbide layer comprises substantially tetrahedral crystalline silicon carbide tendrils having a length of at least 50 μm.

8. The process chamber component of claim 5 , the process chamber component having modified pores and unmodified pores, the modified pores having a diameter of two to eight times a diameter of the unmodified pores.

9. The process chamber component of claim 5 , wherein the graphite substrate has an average grain size of 0.015 mm to 0.04 mm.

10. The process chamber component of claim 5 , wherein the graphite substrate has a density of 1.50 g/cm 3 to 1.75 g/cm 3 .

11. The process chamber component of claim 5 , wherein the graphite substrate comprises one or more of the following elements in an amount of:
calcium<50.00 ppb by weight,
magnesium<50.00 ppb by weight,
aluminum<50.00 ppb by weight,
titanium<10.00 ppb by weight,
chromium<100.00 ppb by weight,
manganese<10.00 ppb by weight,
copper<50.00 ppb by weight,
iron<10.00 ppb by weight,
cobalt<10.00 ppb by weight,
nickel<10.00 ppb by weight,
zinc<50.00 ppb by weight, or
molybdenum<150.00 ppb by weight.

12. A method of manufacturing an activated graphite substrate with a modified surface porosity, comprising:
i) positioning a porous graphite substrate in a process chamber, the porous graphite substrate having an initial open porosity comprising pores with an average pore diameter in a range of 0.4-5.0 μm and comprising pores with a surface pore diameter of <10 μm, and the porous graphite substrate having an average grain size of <0.05 mm;
ii) purging the porous graphite substrate with nitrogen in the process chamber until an oxygen content in the process chamber is about 5.0%;
iii) heating the porous graphite substrate in a furnace to a temperature of at least about 1000° C.; and
iv) continuing purging with nitrogen in the process chamber and heating the porous graphite substrate to a temperature of >1000° C. until the oxygen content in the process chamber is less than or equal to 0.5%, the modified surface porosity comprising pores with an average pore diameter of >10 μm at a surface of the activated graphite substrate.

13. The method of claim 12 , further comprising annealing the porous graphite substrate at a temperature of >1000° C. after purging the porous graphite substrate with nitrogen and heating of the porous graphite substrate to a temperature of >1000° C. until the oxygen content is less than or equal to 0.5%.

14. The method of claim 12 , further comprising directly subjecting the porous graphite substrate to a chemical vapor deposition treatment after continuing purging with nitrogen in the process chamber and heating of the porous graphite substrate to a temperature of >1000° C. until the oxygen content in the process chamber is less than or equal to 0.5%, without cleaning the porous graphite substrate before the chemical vapor deposition treatment.

15. The method of claim 12 , wherein before heating the porous graphite substrate in the furnace to a temperature of at least about 1000° C. nitrogen is flowed in the process chamber until the oxygen content in the process chamber is about 3.0%.

16. The method of claim 12 , wherein after heating the porous graphite substrate in the furnace to a temperature of at least about 1000° C., heating is continued until the oxygen content is reduced to less than or equal to 0.3%.

17. The method of claim 12 , wherein the graphite substrate, prior to being placed in the process chamber, has a chlorine content of at least about 20.00 ppb by weight, wherein said chlorine content is present in the graphite substrate>50 μm below the main surface.

18. The method of claim 12 , wherein the temperature is between 1000 and 1500° C. during the heating of the porous graphite substrate to a temperature of >1000° C. until the oxygen content in the process chamber is less than or equal to 0.5% and the continuing purging with nitrogen in the process chamber.

19. The method of claim 12 , wherein after continuing purging with nitrogen in the process chamber and heating of the porous graphite substrate to a temperature of >1000° C. until the oxygen content in the process chamber is less than or equal to 0.5%, the pores of the porous graphite substrate have an average pore diameter which is enlarged compared to the pores thereof prior to being placed in the process chamber.

20. The method of claim 12 , wherein the porous graphite substrate has a total amount of impurities of less than or equal to 10.00 ppm by weight.

Assignees

• Applied Materials Inc

Inventors

• Guercio Peter J
• Westphal Paul
• Fisher Kirk Allen

Classifications

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/325

  Silicon carbide · CPC title

• C23C16/0227

  by cleaning or etching · CPC title

• C01P2006/80

  Compositional purity · CPC title

• C01P2006/16

  Pore diameter · CPC title