Polishing platens and polishing platen manufacturing methods

Patent metadata

Field	Value
Publication number	US-12076877-B2
Application number	US-202016884888-A
Country	US
Kind code	B2
Filing date	May 27, 2020
Priority date	May 31, 2019
Publication date	Sep 3, 2024
Grant date	Sep 3, 2024

Abstract

Embodiments of the present disclosure generally relate to methods of manufacturing polishing platens for use on a chemical mechanical polishing (CMP) system and polishing platens formed therefrom. A method of manufacturing a polishing includes positioning a polishing platen on a support of a manufacturing system. The manufacturing system includes the support and a cutting tool facing there towards. Here, the polishing platen includes a cylindrical metal body having a polymer layer disposed on a surface thereof and the polymer layer has a thickness of about 100 μm or more. The method further includes removing at least a portion of the polymer layer using the cutting tool to form a polishing pad-mounting surface. Beneficially, the method may be used to form a pad-mounting surface having a desired flatness or shape, such as a concave or convex shape.

First claim

The invention claimed is:

1. A polishing platen, comprising:
a cylindrical metal body with an upper platen surface and a center around which the cylindrical metal body is configured to rotate, the upper platen surface having a radially symmetric convex shape about the center; and
a polymer coating layer disposed upon the upper platen surface of the cylindrical metal body and having had a portion of the polymer coating layer removed to form a polymer pad-mounting surface having a first surface height at a first radius and a second surface height at a second radius, wherein:
the first surface height is greater than the second surface height,
the polymer coating layer comprises a fluoropolymer,
both the first radius and the second radius are disposed outward of the center and the second radius is disposed radially outward of the first radius,
the first and second surface heights are measured as distances from a reference plane that is parallel to the pad-mounting surface at the first radius, and
a difference between the first and second surface heights is about 25 μm or more.

2. The polishing platen of claim 1 , wherein the first radius is disposed at the center.

3. The polishing platen of claim 1 , wherein
the polymer pad-mounting surface has a third surface height at a third radius,
the third radius is disposed radially between the first and the second radius,
the second surface height is coplanar with the reference plane, and
the first and third surface heights are both disposed below the reference plane.

4. The polishing platen of claim 3 , where the first surface height is disposed above the reference plane and the third surface height is disposed below the reference plane.

5. The polishing platen of claim 4 , where the first surface height is disposed coplanar with the reference plane.

6. The polishing platen of claim 3 , where the third radius is in a range of from about ⅓ to ⅔ of the second radius.

7. The polishing platen of claim 1 , wherein
the polymer coating layer has a first thickness at the first radius and a second thickness at the second radius, and
a difference between the first thickness and the second thickness about 25 μm or more.

8. The polishing platen of claim 1 , wherein a profile of the polymer pad-mounting surface is different from a profile of a surface of the cylindrical metal body on which the polymer coating layer is disposed.

9. The polishing platen of claim 1 , where the polymer pad-mounting surface has a third surface height at a third radius, the third radius is disposed radially between the first and the second radius, the third surface height is coplanar with the reference plane, and the first and second surface heights are both disposed below the reference plane or are both disposed above the reference plane.

10. The polishing platen of claim 9 , where the first surface height is disposed above the second surface height.

11. The polishing platen of claim 9 , where the third radius is in a range of from about ⅓ to ⅔ of the second radius.

12. The polishing platen of claim 1 , where the polymer pad-mounting surface has a third surface height at a third radius, the third radius is disposed radially between the first and the second radius, the pad-mounting surface is coplanar with the reference plane in between the first radius and the third radius, and the surface height declines linearly from the third radius to the second radius.

13. A polishing platen, comprising:
a cylindrical metal body having a radially symmetric convex shape about a center of the cylindrical metal body; and
a polymer coating layer disposed on the cylindrical metal body and having had a portion of the polymer coating layer removed to form a polymer pad-mounting surface and further disposed on a radially outward facing circumferential surface of the cylindrical metal body to form a continuous polymer coating layer, wherein:
the polymer coating layer comprises a fluoropolymer,
a thickness of the polymer coating layer changes from a first radius of the pad-mounting surface to a second radius disposed radially inward from the first radius, and
a difference between a thickness at the first radius and a thickness at the second radius is about 25 μm or more.

14. The polishing platen of claim 13 , wherein the thickness at the first radius is averaged from a plurality of thickness measurements taken at a corresponding plurality of equidistant locations along the first radius and the thickness at the second radius is averaged from a plurality of thickness measurements taken at a corresponding plurality of equidistant locations along the second radius.

15. The polishing platen of claim 13 , wherein
the thickness of the polymer coating layer changes from the first radius to a third radius, wherein the third radius is disposed between the first radius and the second radius, and
a thickness at the third radius is greater than both the thicknesses at the first radius and the second radius.

16. The polishing platen of claim 13 , wherein
the thickness of the polymer coating layer changes from the first radius to a third radius,
the third radius is disposed between the first radius and the second radius, and
a thickness at the third radius is greater than both the thicknesses at the first radius and the second radius.

17. The polishing platen of claim 13 , wherein
the polymer pad-mounting surface has a first surface height at the first radius and a second surface height at the second radius,
the first and second surface heights are measured as distances from a reference plane that is parallel to the pad-mounting surface at the first radius, and
a difference between the first and second surface heights is about 25 μm or more.

Assignees

• Applied Materials Inc

Inventors

• Kim Bum Jick
• Loi Danielle
• Gurusamy Jay
• Zuniga Steven M

Classifications

• B24B37/11

  Lapping tools · CPC title

• B24D3/00

  Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents · CPC title

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B23B1/00

  Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods · CPC title

• B26D1/02 Primary

  having a stationary cutting member (B26D1/547 takes precedence) · CPC title