Wet bench structure

Patent metadata

Field	Value
Publication number	US-12074041-B2
Application number	US-201916413275-A
Country	US
Kind code	B2
Filing date	May 15, 2019
Priority date	Jun 29, 2018
Publication date	Aug 27, 2024
Grant date	Aug 27, 2024

Abstract

The present disclosure describes an apparatus for processing one or more objects. The apparatus includes a carrier configured to hold the one or more objects, a tank filled with a processing agent and configured to receive the carrier, and a spinning portion configured to contact the one or more objects and to spin the one or more objects to disturb a flow field of the processing agent.

First claim

What is claimed is:

1. An apparatus for processing a plurality of objects, comprising:
a carrier configured to hold the plurality of objects, wherein the carrier comprises one or more lifting portions;
a tank configured to hold a processing agent and to receive the carrier; and
a first sub-roller attached to a first frame and a second sub-roller attached to a second frame positioned over the plurality of objects and configured to simultaneously spin the plurality of objects to disturb a flow field of the processing agent, wherein:
the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and
the second sub-roller is configured to spin a second object of the plurality of objects at a second speed different from the first speed; and

a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed.

2. The apparatus of claim 1 , wherein the one or more lifting portions comprise a plurality of grooves that separate the plurality of objects from one another.

3. The apparatus of claim 1 , wherein the first sub-roller is configured to contact a top edge of the plurality of objects.

4. The apparatus of claim 1 , further comprising a roller attached to a sidewall of the tank.

5. The apparatus of claim 1 , wherein the first sub-roller is configured to spin the first object of the plurality of objects in a first direction, and wherein the second sub-roller is configured to spin the second object of the plurality of objects in a second direction different from the first direction.

6. The apparatus of claim 1 , further comprising an inlet configured to supply the processing agent to the tank in a first circular direction, and wherein the first sub-roller is configured to spin the first object of the plurality of objects in the first circular direction and the second sub-roller is configured to spin the second object of the plurality of objects in a second circular direction opposite to the first circular direction.

7. The apparatus of claim 6 , further comprising an other inlet configured to supply the processing agent to the tank in the second circular direction.

8. The apparatus of claim 1 , further comprising a fan or a propeller, wherein a turning of the fan or the propeller disturbs the flow field of the processing agent.

9. The apparatus of claim 4 , wherein the roller is configured to contact a side edge of the plurality of objects, and wherein the apparatus further comprises another roller attached to one of the one or more lifting portions and in contact with a bottom edge of the plurality of objects.

10. The apparatus of claim 1 , wherein the first sub-roller is configured to contact a top edge of the plurality of objects, and the second sub-roller is configured to contact a side edge of the plurality of objects.

11. An apparatus for processing a plurality of objects, comprising:
a carrier configured to hold the plurality of objects, wherein a first frame and a second frame are positioned over the carrier;
a tank configured to hold a processing agent and receive the carrier;
a first sub-roller attached to the first frame and a second sub-roller attached to the second frame, the first sub-roller and the second sub-roller, configured to contact the plurality of objects and simultaneously spin the plurality of objects to disturb a flow field of the processing agent wherein:
the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and
the second sub-roller is configured to spin a second object of the plurality of objects at a second speed different from the first speed; and

a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed.

12. The apparatus of claim 11 , wherein the first sub-roller is configured to contact a top edge of the plurality of objects.

13. The apparatus of claim 11 , wherein the first sub-roller is configured to spin the first object of the plurality of objects in a first direction, and wherein the second sub-roller is configured to spin the second object of the plurality of objects in a second direction different from the first direction.

14. A system for reducing contamination on a plurality of objects, comprising:
a carrier configured to hold the plurality of objects, wherein the carrier comprises one or more lifting portions, and wherein a first frame and a second frame are positioned over the plurality of objects;
a tank configured to hold a processing agent and to receive the carrier;
a first sub-roller attached to the first frame and a second sub-roller attached to the second frame, wherein the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and wherein the second sub-roller is configured to simultaneously spin a second object of the plurality of objects at a second speed different from the first speed;
a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed; and
a communication interface configured to transmit a control signal from the control device to the first sub-roller and the second sub-roller.

15. The system of claim 14 , wherein the one or more lifting portions comprise a plurality of grooves, wherein the plurality of objects are configured to be positioned in the plurality of grooves.

16. The system of claim 14 , wherein the first sub-roller and the second sub-roller are separated from each other and configured to extend along a direction that the plurality of objects are aligned.

17. The system of claim 14 , wherein the first sub-roller is configured to spin the first object of the plurality of objects in a first direction, and wherein the second sub-roller is configured to spin the second object of the plurality of objects in a second direction different from the first direction.

18. The apparatus of claim 11 , wherein
one or more of a first spin speed, a first spin duration, and a first direction of rotation of the first sub-roller is configured to be controlled by the control device, and
one or more of a second spin speed, a second spin duration, and a second direction of rotation of the second sub-roller is configured to be controlled by the control device.

19. The apparatus of claim 18 , wherein one or more of the first spin speed, the second spin speed, the first spin duration, the second spin duration, the first direction of rotation of the first sub-roller and the second direction of rotation of the second sub-roller is configured to be changed based on a number of wafers.

20. The apparatus of claim 11 , wherein the first speed and the second speed are determined based on at least one of a size of the plurality of objects, a position of the plurality of objects, or the flow field of the processing agent.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lin Chung-Yu
• Kuo Shih-Chi
• Mo Chun-Chieh

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0426 Primary

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• H10P72/155

  characterised by a material, a roughness, a coating or the like · CPC title

• H10P70/15

  by wet cleaning only (H10P70/52 takes precedence) · CPC title