Apparatus and method for cleaning semiconductor wafers

Patent metadata

Field	Value
Publication number	US-12068149-B2
Application number	US-201816972936-A
Country	US
Kind code	B2
Filing date	Jun 7, 2018
Priority date	Jun 7, 2018
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

The invention provides an apparatus for cleaning semiconductor wafers. The apparatus includes at least one first tank, containing cleaning chemical, configured to implement batch cleaning process; one or more second tanks, containing cleaning liquid, configured to implement batch cleaning process; one or more single wafer cleaning modules, configured to implement single wafer cleaning and drying processes; a plurality of robots, configured to transfer one or more wafers to the at least one first tank and the one or more second tanks successively, and then to the one or more single wafer cleaning modules; and a controller, configured to control the plurality of robots to transfer the one or more wafers to the at least one first tank and the one or more second tanks successively, and then to the one or more single wafer cleaning modules.

First claim

What is claimed is:

1. An apparatus for cleaning semiconductor wafers, comprising:
at least one first tank, containing cleaning chemical, configured to implement batch cleaning process;
one or more second tanks, containing cleaning liquid, configured to implement batch cleaning process;
one or more single wafer cleaning modules, configured to implement single wafer cleaning and drying processes;
a plurality of robots, configured to transfer one or more wafers to the at least one first tank and the one or more second tanks successively, and then to the one or more single wafer cleaning modules;
a controller, configured to control the plurality of robots to transfer the one or more wafers to the at least one first tank and the one or more second tanks successively, and then to the one or more single wafer cleaning modules;
a first turnover device, configured to rotate the one or more wafers from horizontal plane to vertical plane so that the one or more wafers can be vertically transferred to the at least one first tank; and
a second turnover device, configured to rotate the one or more wafers from vertical plane to horizontal plane so that the one or more wafers can be horizontally transferred to the one or more single wafer cleaning modules,
wherein the controller is configured to keep a certain thickness of liquid film on the one or more wafers from the moment the one or more wafers are taken out of the cleaning chemical in the at least one first tank till the one or more wafers are immersed in the cleaning liquid of the one or more second tanks, and/or from the moment the one or more wafers are taken out of the cleaning liquid in the one or more second tanks till the one or more wafers are transferred to the one or more single wafer cleaning modules;
wherein the second turnover device comprises:
a receiving chamber,
a wafer holder, being set in the receiving chamber,
a first driving mechanism, driving the wafer holder to rotate in the receiving chamber,
a support bar, an end of the support bar extending to the receiving chamber,
a support seat, fixed at the end of the support bar,
a second driving mechanism, driving the support seat to ascend and descend via the support bar,
a window, defined on the receiving chamber,
a door, being set in the receiving chamber, and
a third driving mechanism, driving the door to move up to close the window or move down to open the window.

2. The apparatus of claim 1 , wherein the plurality of robots further comprises:
a first wafer transfer robot, configured to take the one or more wafers and transfer the one or more wafers to the at least one first tank and the one or more second tanks;
a second wafer transfer robot, configured to take a certain number of wafers out of the one or more second tanks every time and transfer the certain number of wafers to the second turnover device;
a process robot, configured to take the certain number of wafers out of the second turnover device and transfer the certain number of wafers to the one or more single wafer cleaning modules.

3. The apparatus of claim 2 , wherein the second wafer transfer robot has a pair of clamp arms, an end of each clamp arm defines a plurality of clamp slots for holding a plurality of wafers.

4. The apparatus of claim 2 , further comprising one or more nozzle devices, wherein every nozzle device is long strip shape and has a slit-shaped nozzle, at least one inlet connects to the slit-shaped nozzle for supplying liquid to the slit-shaped nozzle.

5. The apparatus of claim 4 , wherein the number of the one or more nozzle devices is matched with the certain number of the wafers taken out by the second wafer transfer robot so that one nozzle device is corresponding to one wafer and sprays liquid on the one wafer.

6. The apparatus of claim 4 , wherein the one or more nozzle devices is capable of moving back and forth above the one or more wafers and spraying liquid on the one or more wafers while the one or more wafers is held by the second turnover device.

7. The apparatus of claim 2 , wherein the process robot is capable of rotating from horizontal plane to inclined plane and to horizontal plane.

8. The apparatus of claim 2 , wherein the certain number of wafers that is taken out of the one or more second tanks every time is equal to or less than the number of the one or more single wafer cleaning modules.

9. The apparatus of claim 2 , further comprising a cleaning tank for cleaning the first wafer transfer robot while the first wafer transfer robot is idle.

10. The apparatus of claim 2 , further comprising:
at least one load port,
at least one wafer cassette located at the at least one load port,
a buffer room, wherein the process robot takes the certain number of wafers out of the one or more single wafer cleaning modules and transfers the certain number of wafers to the buffer room, and
an index robot, wherein the index robot takes the one or more wafers from the at least one wafer cassette and transfers the one or more wafers to the first turnover device, and the index robot takes the certain number of wafers out of the buffer room and transfers the certain number of wafers to the at least one wafer cassette.

11. The apparatus of claim 1 , wherein the one or more wafers are transferred to the one or more single wafer cleaning modules and sprayed liquid thereon before the one or more wafers are rotated in the one or more single wafer cleaning modules.

12. The apparatus of claim 1 , wherein the cleaning chemical in the at least one first tank is SPM which is a mixture of H 2 SO 4 and H 2 O 2 , and the temperature of the SPM is 80° C. to 150° C.

13. The apparatus of claim 1 , wherein the cleaning chemical in the at least one first tank is SPM which is a mixture of H 2 SO 4 and H 2 O 2 , and the concentration ratio of H 2 SO 4 and H 2 O 2 is 3:1 to 50:1.

14. The apparatus of claim 1 , wherein the one or more wafers are rinsed via a quickly dump rinse using the cleaning liquid in the one or more second tanks.

15. The apparatus of claim 14 , wherein the cleaning liquid used for quickly dump rinse is deionized water.

16. The apparatus of claim 1 , wherein the number of the one or more second tanks is at least two, the cleaning chemical in the at least one first tank is HF solution, the cleaning liquid in at least one second tank is H 3 PO 4 solution, the cleaning liquid in other second tank is deionized water for quickly dump rinse.

17. The apparatus of claim 16 , wherein the temperature of the H 3 PO 4 solution is 150° C.-200° C.

Assignees

• Acm Research Shanghai Inc

Inventors

• Wang Hui
• Fang Zhiyou
• Wu Jun
• Lu Guanzhong
• Chen Fuping
• Wang Jian
• Wang Jun
• Wang Deyun

Classifications

• H10P72/3412

  Batch transfer of wafers · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P70/15 Primary

  by wet cleaning only (H10P70/52 takes precedence) · CPC title