Nanoencapsulation methods for forming multilayer thin film structures and multilayer thin films formed therefrom

Patent metadata

Field	Value
Publication number	US-12066595-B2
Application number	US-202117319369-A
Country	US
Kind code	B2
Filing date	May 13, 2021
Priority date	Sep 27, 2018
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

A multilayer thin film structure having a reflective core particle, a dielectric layer directly encapsulating the reflective core particle, an absorber layer directly encapsulating the dielectric layer; an outer layer encapsulating the absorber layer. The multilayer thin film structure has a hue shift of less than 30° in the Lab color space when viewed at angles from 0° to 45°.

First claim

What is claimed is:

1. A method for forming a multilayer thin film structure comprising:
depositing a dielectric layer to a reflective core particle, wherein the dielectric layer directly encapsulates the reflective core particle, and the dielectric layer is deposited by chemical vapor deposition, atomic layer deposition, physical vapor deposition, or wet chemical processes;
depositing an absorber layer to the dielectric layer, wherein the absorber layer is deposited by chemical vapor deposition, atomic layer deposition, physical vapor deposition, or wet chemical processes; and
depositing an outer layer to the absorber layer, wherein the outer layer is deposited by chemical vapor deposition, atomic layer deposition, physical vapor deposition, or wet chemical processes, wherein
the multilayer thin film structure has a hue shift of less than 30° in the Lab color space when viewed at angles from 0° to 45°; and
the reflective core particle has a thickness from 10 nm to 5000 nm and a length from 5 μm to 100 μm.

2. The method of claim 1 , wherein the absorber layer is deposited by atomic layer deposition.

3. The method of claim 2 , wherein the absorber layer has a thickness from greater than 0 nm to 50 nm.

4. The method of claim 3 , wherein the absorber layer comprises W, Cr, Ge, Ni, stainless steel, Pd, Ti, Si, V, TIN, Co, Mo, Nb, ferric oxide, amorphous silicon, and combinations thereof.

5. The method of claim 2 , wherein the outer layer is deposited by chemical vapor deposition or wet chemical processes.

6. The method of claim 1 , wherein the dielectric layer is deposited by chemical vapor deposition or wet chemical processes.

7. The method of claim 1 , wherein the reflective core particle comprises Al, Ag, Pt, Sn, Au, Cu, brass, bronze, TIN, Cr, and combination thereof.

8. The method of claim 1 , wherein the dielectric layer has a thickness from 5 nm to 500 nm.

9. The method of claim 8 , wherein the dielectric layer comprises Fe 2 O 3 , ZnS, TiO 2 , TiN, ZrO 2 , CeO 2 , HfO 2 , and combinations thereof.

10. The method of claim 1 , wherein the outer layer has a thickness from 0.1 quarter wave (QW) to less than or equal to 4.0 QW.

11. The method of claim 10 , wherein the outer layer Fe 2 O 3 , ZnS, TiO 2 , TiN, ZrO 2 , CeO 2 , HfO 2 , and combinations thereof.

12. The method of claim 1 , wherein the outer layer is deposited by atomic layer deposition.

13. The method of claim 1 , wherein the method further comprises deposing a protective layer to the absorber layer before depositing the outer layer, wherein the protective layer is deposited by chemical vapor deposition, physical vapor deposition, atomic layer deposition, or wet chemical processes.

14. The method of claim 13 , wherein the protective layer has a thickness from greater than 0 nm to 50 nm.

15. The method of claim 14 , wherein the protective layer comprises Al 2 O 3 or SiO 2 .

16. The method of claim 14 , wherein the protective layer is deposited by atomic layer deposition.

Assignees

• Toyota Eng & Mfg North America

Inventors

• Wu Songtao
• Banerjee Debasish

Classifications

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• C01P2006/60

  Optical properties, e.g. expressed in CIELAB-values · CPC title

• C01P2006/42

  Magnetic properties · CPC title

• C09C1/62

  Metallic pigments or fillers {(C09C1/0015 takes precedence)} · CPC title

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title