Portable fluorine generator for on-site calibration

Patent metadata

Field	Value
Publication number	US-12065359-B2
Application number	US-202117230514-A
Country	US
Kind code	B2
Filing date	Apr 14, 2021
Priority date	Apr 14, 2021
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.

First claim

The invention claimed is:

1. An apparatus for producing fluorine (F 2 ) gas, comprising:
a housing having an inlet operable to receive an inert gas;
a source disposed within the housing, the source operable to supply a feed gas comprising fluorine;
a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with the inert gas, the dilution system disposed downstream of the inlet and the source; and
a plasma reactor unit disposed within the housing and disposed downstream of the dilution system, the plasma reactor operable to generate fluorine (F 2 ) gas from the feed gas comprising fluorine, the plasma reactor unit having:
a first inlet channel operable to receive the feed gas comprising fluorine; and
an outlet channel operable to deliver the fluorine (F 2 ) gas.

2. The apparatus of claim 1 , further comprising an adaptor operable to fluidly couple the outlet channel to analytical equipment.

3. The apparatus of claim 1 , wherein the apparatus is portable.

4. The apparatus of claim 1 , wherein the apparatus further comprises a pressure control mechanism operable to inhibit recombination at the outlet channel.

5. The apparatus of claim 4 , wherein the pressure control mechanism is a vacuum pump operable to maintain a pressure at the outlet channel.

6. The apparatus of claim 1 , further comprising a first flow control device operable to meter a desired amount of the feed gas comprising fluorine, the first flow control device positioned downstream from the source operable to supply the feed gas comprising fluorine and upstream from the dilution system.

7. The apparatus of claim 6 , further comprising a second flow control device operable to meter a desired amount of the inert gas to mix with the feed gas comprising fluorine, the second flow control device disposed within the dilution system.

8. The apparatus of claim 1 , wherein the feed gas comprising fluorine is NF 3 and the inert gas is N 2 .

9. The apparatus of claim 1 , wherein the dilution system comprises a valve where the inert gas and the feed gas comprising fluorine are mixed.

10. The apparatus of claim 1 , wherein the inert gas and the feed gas comprising fluorine are mixed inline in the dilution system.

11. A system for producing fluorine (F 2 ) gas, comprising:
a portable cart, comprising:
a housing having an inlet operable to receive an inert gas;
a source disposed within the housing, the source operable to supply a feed gas comprising fluorine;
a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with the inert gas, the dilution system disposed downstream of the inlet and the source; and
a plasma reactor unit disposed within the housing and disposed downstream of the dilution system, the plasma reactor operable to generate fluorine (F 2 ) gas from the feed gas comprising fluorine, the plasma reactor unit having:
a first inlet channel operable to receive the feed gas comprising fluorine; and
an outlet channel operable to deliver the fluorine (F 2 ) gas.

12. The system of claim 11 , further comprising an inert gas source fluidly coupled with the housing operable to deliver the inert gas to the dilution system.

13. The system of claim 12 , wherein the feed gas comprising fluorine is selected from NF 3 , CF 4 , SF 6 , C 2 F 6 , C 3 F 8 , or a combination thereof.

14. The system of claim 13 , wherein the inert gas is selected from nitrogen (N 2 ) and argon.

Assignees

• Applied Materials Inc

Inventors

• Van Gompel Joseph A

Classifications

• B01J19/081

  employing particle radiation or gamma-radiation · CPC title

• B01J2219/00042

  Features relating to reactants and process fluids · CPC title

• C01B21/0405 Primary

  Purification or separation processes · CPC title

• B01J2219/0894

  Processes carried out in the presence of a plasma · CPC title

• B01J19/14

  Production of inert gas mixtures; Use of inert gases in general · CPC title