Modular microwave plasma source

Patent metadata

Field	Value
Publication number	US-10748745-B2
Application number	US-201615238695-A
Country	US
Kind code	B2
Filing date	Aug 16, 2016
Priority date	Aug 16, 2016
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage controlled oscillator. In an embodiment, the solid state microwave amplification module amplifies an output from the voltage controlled oscillator. The modular microwave source may also include an applicator coupled to the solid state microwave amplification module, where the applicator is a dielectric resonator.

First claim

What is claimed is:

1. A modular microwave source, comprising: a voltage control circuit;
a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator;
a solid state microwave amplification module coupled to the voltage controlled oscillator, wherein the solid state microwave amplification module amplifies an output from the voltage controlled oscillator, wherein the solid state microwave amplification module further comprises a pre-amplifier, a main power amplifier, a power supply electrically coupled to the pre-amplifier and the main power amplifier, and a circulator along a transmission path between the main power amplifier and the applicator, wherein the circulator transmits reflected power from the applicator to a dummy load, and wherein a feedback line between the dummy load of the circulator and the voltage control circuit provides a measure of the reflected power to the voltage control circuit, with the level of reflected power being read prior to the dummy load; and
an applicator coupled to the solid state microwave amplification module, wherein the applicator is a dielectric resonator, wherein the dielectric resonator comprises:
a dielectric resonant cavity, wherein the dielectric resonant cavity comprises a top surface, an outer sidewall surface and, a bottom surface opposite from the top surface;
an applicator housing formed around the outer sidewall surface of the dielectric resonant cavity, wherein the bottom surface of the dielectric resonant cavity does not face a portion of the applicator housing; and
a monopole extending down an axial center of the dielectric resonator and into a channel formed from the top surface of the dielectric resonant cavity into a center of the dielectric resonant cavity, wherein an end of the monopole is spaced away from a bottom surface of the channel.

2. The modular microwave source of claim 1 , wherein the microwave amplification module further comprises a phase-shifter.

3. The modular microwave source of claim 1 , wherein the microwave amplification module operates in a pulsed mode.

4. The modular microwave source of claim 1 , wherein a cross-section of the dielectric resonant cavity at planes perpendicular to the monopole are circular, rectangular, or a symmetrical polygon.

5. The modular microwave source of claim 1 , wherein a cross-section of the dielectric resonant cavity is not the same at all planes perpendicular to the monopole.

6. The modular microwave source of claim 5 , wherein a first cross-section of the dielectric resonant cavity at a first plane perpendicular to the monopole is a symmetric polygon, and wherein a second cross-section of the dielectric resonant cavity at a second plane perpendicular to the monopole is circular.

7. The modular microwave source of claim 1 , further comprising an impedance tuning backshort.

8. A plasma processing tool, comprising:
a processing chamber;
a voltage control circuit;
a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator; and
a plurality of modular microwave sources coupled to the processing chamber, wherein the plurality of modular microwave sources comprise:
an array of applicators, wherein the array of applicators are positioned opposing a chuck in the processing chamber on which one or more substrates are processed, wherein the applicators are dielectric resonators, wherein the dielectric resonator comprises:
a dielectric resonant cavity, wherein the dielectric resonant cavity comprises a top surface, an outer sidewall surface, and a bottom surface opposite from the top surface;
an applicator housing formed around the outer sidewall surface of the dielectric resonant cavity, wherein the bottom surface of the dielectric resonant cavity does not face a portion of the applicator housing; and
a monopole extending down an axial center of the dielectric resonator and into a channel formed from the top surface of the dielectric resonant cavity into a center of the dielectric resonant cavity, wherein an end of the monopole is spaced away from a bottom surface of the channel; and
an array of microwave amplification modules each coupled to the voltage controlled oscillator, wherein each microwave amplification module is
coupled to a different one of the applicators in the array of applicators, wherein a dielectric plate forms a portion of an outer wall of the processing chamber, and wherein the array of applicators are coupled to the dielectric plate, and wherein the array of applicators do not pass through the dielectric plate into the processing chamber, wherein each microwave amplification module further comprises a preamplifier, a main power amplifier, a power supply electrically coupled to the preamplifier and the main power amplifier, and a circulator along a transmission path between the main power amplifier and the applicator, wherein the circulator transmits reflected power from the applicator to a dummy load, and wherein a feedback line between the dummy load of the circulator and the voltage control circuit provides a measure of the reflected power to the voltage control circuit, with the level of reflected power being read prior to the dummy load.

9. The plasma processing tool of claim 8 , wherein each of the microwave amplification modules are independently controllable.

10. The plasma processing tool of claim 9 , further comprising a plurality of plasma sensors positioned among the applicators.

11. The plasma processing tool of claim 10 , wherein feedback control data for each microwave amplification module is provided by one or more of the plurality of plasma sensors.

12. The plasma processing tool of claim 11 , wherein the feedback control of the microwave amplification module comprises multi-input multi-output (MIMO) control.

13. The plasma processing tool of claim 8 , wherein each of the applicators in the array of applicators have symmetric polygon shaped cross-sections, and wherein the applicators in the array of applicators are close-packed.

14. A plasma processing tool, comprising:
a processing chamber;
a voltage control circuit;
a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator; and
a plurality of modular microwave sources coupled to the processing chamber, wherein the plurality of modular microwave sources comprise:
an array of applicators, wherein the array of applicators are arranged above a chuck in the processing chamber on which one or more substrates are processed, and wherein each applicator comprises:
a dielectric resonant cavity, wherein the dielectric resonant cavity comprises a top surface, an outer sidewall surface, and a bottom surface opposite from the top surface;
an applicator housing formed around the outer sidewall surface of the dielectric resonant cavity, wherein the bottom surface of the dielectric resonant cavity does not face a portion of the applicator housing;
a monopole extending down an axial center of the dielectric resonator and into a channel formed from the top surface of the dielectric resonant cavity into a center of the dielectric resonant cavity, wherein an end of the monopole is spaced away from a bottom surface of the channel; and
an impedance tuning backshort; and an array of microwave amplification modules, wherein each microwave amplification module is coupled to a different one of the applicators in the array of applicators, and wherein each microwave amplification module comprises:
a

Assignees

• Applied Materials Inc

Inventors

• Kraus Philip Allan
• Chua Thai Cheng

Classifications

• H01J37/32311

  Circuits specially adapted for controlling the microwave discharge · CPC title

• H01J37/32201 Primary

  Generating means · CPC title

• H01J37/32211

  Means for coupling power to the plasma · CPC title

• H01J37/32247 Primary

  Resonators · CPC title

• H05H1/46

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title