Computer-implemented method for defect analysis, computer-implemented method of evaluating likelihood of defect occurrence, apparatus for defect analysis, computer-program product, and intelligent defect analysis system

Patent metadata

Field	Value
Publication number	US-12061935-B2
Application number	US-202117490310-A
Country	US
Kind code	B2
Filing date	Sep 30, 2021
Priority date	Dec 3, 2020
Publication date	Aug 13, 2024
Grant date	Aug 13, 2024

Abstract

A computer-implemented method for defect analysis is provided. The computer-implemented method includes calculating a plurality of weight-of-evidence (WOE) scores respectively for a plurality of device operations with respect to defects occurred during a fabrication period, a higher WOE score indicating a higher correlation between a defect and a device operation; and ranking the plurality of WOE scores to obtain a list of selected device operations highly correlated with the defects occurred during the fabrication period, device operations in the list of selected device operations having a WOE score greater than a first threshold score. A respective one of the plurality of device operations is a respective device defined by a respective operation site at which the respective device perform a respective operation.

First claim

What is claimed is:

1. An intelligent defect analysis system, comprising:
a distributed computing system comprising one or more networked computers configured to execute in parallel to perform at least one common task;
one or more computer readable storage mediums storing instructions that, when executed by the distributed computing system, cause the distributed computing system to execute software modules;
wherein the software modules comprise:
a data management platform configured to intelligently extract, transform, or load raw data from a plurality of data sources into a managed data, wherein the raw data and the managed data comprise defect information, and the managed data is stored in a distributed manner;
an analyzer configured to perform defect analysis upon receiving a task request, the analyzer comprising a plurality of business servers and a plurality of algorithm servers configured to obtain the managed data from the data management platform and perform algorithm analysis on the managed data to derive a result data on underlying reasons for defects;
a data visualization and interaction interface configured to generate the task requests and display the result data;
a query engine connected to the data management platform and configured to obtain the managed data from the data management platform; and
a load balancer connected to the analyzer, the load balancer configured to receive task requests and configured to assign the task requests to one or more of the plurality of business servers to achieve load balance among the plurality of business servers, and configured to assign tasks from the plurality of business servers to one or more of the plurality of algorithm servers to achieve load balance among the plurality of algorithm servers;
wherein the analyzer further comprises a cache server connected to the plurality of business servers and the query engine; and
the cache server is configured to store a portion of results of previously performed defect analysis tasks in a cache;
wherein the data visualization and interaction interface comprises a defect visualization sub-interface;
the defect visualization sub-interface is configured to receive a user-defined selection of a defect to be analyzed and generate a call request;
the load balancer is configured to receive the call request and configured to assign the call request to one or more of the plurality of business servers to achieve load balance among the plurality of business servers;
the one or more of the plurality of business servers are configured to transmit the call request to the cache server; and
the cache server is configured to determine whether information on the defect to be analyzed is stored in the cache;
wherein one or more of the plurality of algorithm servers is configured to perform a computer-implemented method for defect analysis, comprising:
calculating a plurality of weight-of-evidence (WOE) scores respectively for a plurality of device operations with respect to defects occurred during a fabrication period, a WOE score indicating a correlation between a defect and a device operation; and
ranking the plurality of WOE scores to obtain a list of selected device operations correlated with the defects occurred during the fabrication period, device operations in the list of selected device operations having a WOE score greater than a first threshold score;
wherein a respective one of the plurality of device operations is a respective device defined by a respective operation site at which the respective device perform a respective operation.

2. The intelligent defect analysis system of claim 1 , wherein the data management platform comprises an ETL module configured to extract, transform, or load data from the plurality of data sources onto a data mart that is a database of NoSQL type; and
upon receiving an assigned task, a respective one of the plurality of algorithm servers is configured to obtain a first data from the data mart.

3. The intelligent defect analysis system of claim 2 , wherein the ETL module is further configured to extract, transform, or load data from the plurality of data sources onto a general data layer that is a distributed data storage storing information;
upon performing defect analysis, the respective one of the plurality of algorithm servers is configured to transmit a second data to the general data layer;
the ETL module is configured to generate a dynamically updated table that is automatically updated periodically; and
the general data layer is configured to store the dynamically updated table.

4. The intelligent defect analysis system of claim 3 , wherein the software modules further comprise a query engine connected to the data management platform and configured to obtain the managed data from the data management platform.

5. The intelligent defect analysis system of claim 4 , wherein the data visualization and interaction interface is configured to generate a task request;
upon receiving the task request, the one or more of the plurality of business servers are configured to transmit a query task request to the query engine;
the query engine, upon receiving the query task request from the one or more of the plurality of business servers, is configured to query the dynamically updated table to obtain information on defects of interest, and transmit the information on defects of interest to one or more of the plurality of business servers;
upon receiving defect analysis tasks, the one or more of the plurality of algorithm servers are configured to obtain the first data from the data mart to perform defect analysis; and
upon completion of the defect analysis, the one or more of the plurality of algorithm servers are configured to transmit results of the defect analysis to the general data layer.

6. The intelligent defect analysis system of claim 5 , wherein the task request is an automatically recurring task request, the automatically recurring task request defining a recurring period for which the defect analysis is to be performed;
the query engine is configured to query the dynamically updated table to obtain the information on defects of interest limited to the recurring period; and
upon receiving the information on defects of interest during the recurring period, the one or more of the plurality of business servers are configured to generate the defect analysis tasks based on the information on defects of interest during the recurring period.

7. The intelligent defect analysis system of claim 5 , wherein the task request is an interactive task request;
the data visualization and interaction interface is configured to receive a user-defined analysis criteria, and configured to generate the interactive task request based on the user-defined analysis criteria;
upon receiving the information on defects of interest, the one or more of the plurality of business servers are configured to transmit the information to the data visualization and interaction interface;
the data visualization and interaction interface is configured to display the information on defects of interest and a plurality of environmental factors associated with the defects of interest, and configured to receive a user-defined selection of one or more environmental factors from the plurality of environmental factors, and transmit the user-defined selection to the one or more of the plurality of business servers; and
the one or more of the plurality of business servers are configured to generate the defect analysis tasks based on the information and the user-defined selection.

8. The intelligent defect analysis system of claim 1 , wherein the task requests are assigned to each of the one or more of the plurality of business servers based on a

Assignees

• Boe Technology Group Co Ltd

Inventors

• Chai Dong
• Lan Tian
• Wu Haohan
• Tang Yue
• Shen Guoliang
• Yuan Fei

Classifications

• G06F16/254 Primary

  Extract, transform and load [ETL] procedures, e.g. ETL data flows in data warehouses · CPC title

• G06F16/2465

  Query processing support for facilitating data mining operations in structured databases · CPC title

• G06F16/26

  Visual data mining; Browsing structured data · CPC title

• G06F16/24552

  Database cache management · CPC title

• G06F9/52 Primary

  Program synchronisation; Mutual exclusion, e.g. by means of semaphores · CPC title