Apparatus for fiber optic temperature probe in processing chambers

Patent metadata

Field	Value
Publication number	US-12057298-B2
Application number	US-202217684903-A
Country	US
Kind code	B2
Filing date	Mar 2, 2022
Priority date	Mar 2, 2021
Publication date	Aug 6, 2024
Grant date	Aug 6, 2024

Abstract

Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.

First claim

What is claimed is:

1. A substrate support comprising:
a support top having a support surface and a bottom surface defining a thickness of the support body, and a thermal element within the thickness of the support body;
a support bottom having a top surface and a bottom surface defining a thickness of the support bottom, the top surface positioned adjacent the bottom surface of the support top, and at least one opening extending through the thickness of the support bottom, the at least one opening configured to accept a temperature probe; and
an active heat transfer component comprising at least one conduit extending around an outer surface of the support bottom, the at least one conduit having an inlet end and an outlet end and configured to provide a flow of heat transfer fluid.

2. The substrate support of claim 1 , further comprising at least one temperature probe positioned within the opening in the support bottom, the temperature probe having a phosphor tip contacting the bottom surface of the support top, a light pipe connected to the phosphor tip and extending at least partially through the support bottom to a probe contact.

3. The substrate support of claim 2 , wherein the light pipe of the temperature probe transmits light generated by the phosphor tip to a temperature converter at an opposite end of the light pipe from the phosphor tip.

4. The substrate support of claim 3 , wherein the light pipe comprises a hollow tube enclosing at least one fiber optic cable.

5. A substrate support comprising:
a support top having a support surface and a bottom surface defining a thickness of the support body, and a thermal element within the thickness of the support body;
a support bottom having a top surface and a bottom surface defining a thickness of the support bottom, the top surface positioned adjacent the bottom surface of the support top, and at least one opening extending through the thickness of the support bottom, the at least one opening configured to accept a temperature probe; and
a passive heat transfer component comprising at least one heat transfer fin extending along the at least one opening in the support bottom, the passive heat transfer component having a channel to allow the temperature probe to pass through the support bottom.

6. The substrate support of claim 5 wherein the passive heat transfer component is a fin stack for passively cooling the temperature probe by effectuating heat transfer between the plurality of fin stacks and ambient air within a non-vacuum environment.

7. The substrate support of claim 5 wherein each fin stacks comprises a solid core through which the opening extends through and a plurality of thin blades creating an increased surface area for passively cooling the fin stacks as air flows past the thin blades.

8. A substrate support comprising:
a support top having a support surface and a bottom surface defining a thickness of the support body, and a thermal element within the thickness of the support body;
a support bottom having a top surface and a bottom surface defining a thickness of the support bottom, the top surface positioned adjacent the bottom surface of the support top, and at least one opening extending through the thickness of the support bottom, the at least one opening configured to accept a temperature probe; and
a sliding assembly comprising a base which slides rails in an upward or downward direction and a plurality of temperature probe protruding from the base.

9. The substrate support of claim 8 further comprising:
a first link and a second link connected to the base;
a first armature and a second armature connected to the top base; and,
a top base in contact with the bottom surface of the substrate support.

10. The substrate support of claim 9 further comprising control arms connected to the first and second links about a pivot point along a length of the first link and second link such that advancement of the control arms in an upward direction advances the base toward the substrate support.

Assignees

• Applied Materials Inc

Inventors

• Freitas Marcus Blake
• Ishikawa David Masayuki
• Parkhe Vijay D
• Sivaramakrishnan Visweswaren

Classifications

• G01K11/32

  using changes in transmittance, scattering or luminescence in optical fibres · CPC title

• G01K1/14

  Supports; Fastening devices; Arrangements for mounting thermometers in particular locations · CPC title

• G01K11/3213

  using changes in luminescence, e.g. at the distal end of the fibres · CPC title

• H01J37/32724 Primary

  Temperature · CPC title