Surface projection polishing pad

Patent metadata

Field	Value
Publication number	US-12048980-B2
Application number	US-201816640175-A
Country	US
Kind code	B2
Filing date	Aug 21, 2018
Priority date	Aug 25, 2017
Publication date	Jul 30, 2024
Grant date	Jul 30, 2024

Abstract

An article includes a surface layer and a base layer coupled to at least a portion of the surface layer. The surface layer includes a top major surface defining a plane and a bottom major surface opposite the top major surface. A plurality of projections extends from the plane of the top major surface and a plurality of microstructures extend from the plurality of projections.

First claim

The invention claimed is:

1. An article, comprising:
a surface layer having a repeating microstructure, comprising:
a top major surface defining a plane;
a bottom major surface opposite the top major surface;
a plurality of projections extending from the plane of the top major surface, wherein the plurality of projections has an areal density between about 0.1% to about 40% of a surface area of the top major surface; and
a plurality of microstructures extending from the plurality of projections; and

a base layer coupled to at least a portion of the surface layer at the bottom major surface;
wherein each projection of the plurality of projections comprises a discrete spacer disposed between the base layer and the surface layer.

2. The article of claim 1 , wherein each of the plurality of projections has a projection height of at least about 20 μm.

3. The article of claim 1 , wherein each of the plurality of projections has a projection width of at least about 1 mm.

4. The article of claim 1 , wherein at least a portion of the plurality of projections are circular projections.

5. The article of claim 4 , wherein the portion of the plurality of projections extend a length of the article.

6. The article of claim 1 , wherein at least a portion of the plurality of projections are axial striped projections.

7. The article of claim 6 , wherein the portion of the plurality of projections extend a radius of the article.

8. The article of claim 1 , wherein at least a portion of the plurality of projections are parallel striped projections.

9. The article of claim 1 , wherein the plurality of projections has a spacing between two adjacent projections of at least 1 cm.

10. The article of claim 1 , wherein the base layer includes a pressure sensitive adhesive.

11. The article of claim 1 , wherein the base layer includes a plurality of structures corresponding to the plurality of projections extending from the plane of the top major surface.

12. The article of claim 1 , wherein each of the plurality of microstructures has a microstructure height less than about 1 mm.

13. The article of claim 1 , wherein the plurality of projections has an areal density between about 1% to about 10% of a surface area of the top major surface.

14. The article of claim 1 , wherein the plurality of projections has a density of between about 3 to about 200 projections per 100 square inches.

15. A system, comprising:
a carrier assembly configured to hold a substrate;
a polishing pad comprising the article of claim 1 ;
a platen coupled to the polishing pad;
a polishing slurry comprising a fluid component and an abrasive component, and
wherein the system is configured to move the polishing pad relative to the substrate.

16. The system of claim 15 , wherein the plurality of projections of the polishing pad has a spacing that is less than a width of the substrate.

17. A method, comprising:
providing a substrate having a major surface;
providing a polishing pad comprising the article of claim 1 ;
providing a polishing slurry comprising a fluid component and an abrasive component; and
contacting the major surface of the substrate with the polishing pad and the polishing slurry while there is relative motion between the polishing pad and the major surface of the substrate.

18. The method of claim 17 , further comprising producing force modulations on the major surface of the substrate, wherein a peak of the force modulations corresponds to contact of the major surface of the substrate with a projection of the polishing pad.

19. The method of claim 18 , wherein the force modulations include an amplitude that corresponds to a height of the plurality of projections of the polishing pad, a frequency that corresponds to a spacing of the plurality of projections of the polishing pad, and periodicity that corresponds to a width of the plurality of projections of the polishing pad.

Assignees

• 3M Innovative Properties Company

Inventors

• Tan Lian S
• Coad Eric C
• Lerbakken Justin W

Classifications

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B37/105

  the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement · CPC title

• B24B37/26 Primary

  characterised by the shape of the lapping pad surface, e.g. grooved · CPC title