Method of dielectric material fill and treatment

Patent metadata

Field	Value
Publication number	US-12046508-B2
Application number	US-202318108338-A
Country	US
Kind code	B2
Filing date	Feb 10, 2023
Priority date	Apr 14, 2020
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

Embodiments herein provide for oxygen based treatment of low-k dielectric layers deposited using a flowable chemical vapor deposition (FCVD) process. Oxygen based treatment of the FCVD deposited low-k dielectric layers desirably increases the Ebd to capacitance and reliability of the devices while removing voids. Embodiments include methods and apparatus for making a semiconductor device including: etching a metal layer disposed atop a substrate to form one or more metal lines having a top surface, a first side, and a second side; depositing a passivation layer atop the top surface, the first side, and the second side under conditions sufficient to reduce or eliminate oxygen contact with the one or more metal lines; depositing a flowable layer of low-k dielectric material atop the passivation layer in a thickness sufficient to cover the one or more metal lines; and contacting the flowable layer of low-k dielectric material with oxygen under conditions sufficient to anneal and increase a density of the low-k dielectric material.

First claim

The invention claimed is:

1. A method of making a semiconductor device comprising:
etching a metal layer disposed atop a substrate to form one or more metal lines having a top surface, a first side, and a second side;
depositing a passivation layer atop the top surface, the first side, and the second side to prevent oxygen contact with the one or more metal lines;
depositing a flowable layer of low-k dielectric material atop the passivation layer in a thickness sufficient to cover the one or more metal lines; and
contacting the flowable layer of low-k dielectric material with ozone under conditions sufficient to anneal and increase a density of the flowable layer of low-k dielectric material,
wherein the method is conducted without a vacuum break.

2. The method of claim 1 , wherein the flowable layer of low-k dielectric material comprises an oxide layer, a nitride layer, a carbide layer, an oxynitride layer, or combinations thereof.

3. The method of claim 2 , wherein the flowable layer of low-k dielectric material comprises silicon oxide (SiO 2 ), silicon oxide nitride (SiON), silicon nitride (Si 3 N 4 ), silicon oxide carbide (SiOC), or combinations thereof.

4. The method of claim 1 , wherein contacting the flowable layer of low-k dielectric material with oxygen is at a pressure of 760 Torr to 40,000 Torr.

5. The method of claim 1 , wherein contacting the flowable layer of low-k dielectric material with oxygen is at a temperature of 100 degrees Celsius to 400 degrees Celsius.

6. The method of claim 1 , wherein contacting the flowable layer of low-k dielectric material with oxygen is for a duration of up to 10 minutes.

7. The method of claim 1 , wherein the oxygen penetrates through a top portion and bottom portion of the flowable layer of low-k dielectric material.

8. The method of claim 1 , wherein the metal layer comprises one or more of ruthenium, molybdenum, copper, tungsten, or aluminum.

9. The method of claim 1 , wherein the oxygen is disposed within a reaction gas, wherein the reaction gas comprises one or more of hydrogen, nitrogen, or combinations thereof.

10. The method of claim 1 , wherein the passivation layer comprises silicon nitride (Si 3 N 4 ), silicon carbide (SiC), silicon carboxy nitride (SiCN) or combinations thereof.

11. The method of claim 1 , wherein the semiconductor device is characterized by Ebd greater than 5 MV/cm at capacitance (integrated-k value) of 3.0-3.2.

12. The method of claim 1 , further comprising curing the flowable layer of low-k dielectric material with ultraviolet light.

13. A method of making a semiconductor device comprising:
depositing a flowable layer of low-k dielectric material over one or more passivated features of a substrate; and
contacting the flowable layer of low-k dielectric material with ozone under conditions sufficient to anneal and increase a density of the flowable layer of low-k dielectric material, wherein the one or more passivated features comprises a protective layer having a thickness sufficient to prevent oxygen from contacting a metal portion of the one or more passivated features,
wherein the method is conducted without a vacuum break.

14. The method of claim 13 , wherein the protective layer comprises silicon nitride (Si 3 N 4 ), silicon carbide (SiC), silicon carboxy nitride (SiCN) or combinations thereof.

15. The method of claim 13 , wherein the semiconductor device is characterized by Ebd greater than 5 MV/cm at capacitance (integrated-k value) of 3.0-3.2.

16. The method of claim 13 , wherein the protective layer has a thickness of about 1-2 nanometers.

17. The method of claim 13 , further comprising contacting the flowable layer of low-k dielectric material with ultraviolet light.

18. The method of claim 13 , wherein the protective layer is devoid of oxygen.

19. A non-transitory computer readable medium having instructions stored thereon that, when executed, cause a method for making a semiconductor device comprising:
etching a metal layer disposed atop a substrate to form one or more metal lines having a top surface, a first side, and a second side;
depositing a passivation layer atop the top surface, the first side, and the second side under conditions sufficient to prevent oxygen contact with the one or more metal lines;
depositing a flowable layer of low-k dielectric material atop the passivation layer in a thickness sufficient to cover the one or more metal lines; and
contacting the flowable layer of low-k dielectric material with ozone under conditions sufficient to anneal and increase a density of the flowable layer of low-k dielectric material,
wherein the method is conducted without a vacuum break.

20. The non-transitory computer readable medium of claim 19 , wherein the passivation layer is devoid of oxygen.

Assignees

• Applied Materials Inc

Inventors

• You Shi
• Ren He
• Yoshida Naomi
• Bekiaris Nikolaos
• Naik Mehul
• Seamons Martin Jay
• Liang Jingmei
• Shek Mei-Yee

Classifications

• H10W20/0633

  using subtractive patterning of the conductive members · CPC title

• H10P14/6522

  introduced into a nitride material, e.g. changing SiN to SiON · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P14/6529

  by exposure to a gas or vapour · CPC title

• H10P14/6519 Primary

  the substance being oxygen · CPC title