Optical waveguide element, and optical modulation device and optical transmission apparatus using optical waveguide element
US-11656487-B2 · May 23, 2023 · US
US12044910B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12044910-B2 |
| Application number | US-202217725944-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 21, 2022 |
| Priority date | Jul 5, 2021 |
| Publication date | Jul 23, 2024 |
| Grant date | Jul 23, 2024 |
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An optical device includes a thin film Lithium Niobate (LN) layer, a first optical waveguide, and a second optical waveguide. The thin film LN layer is an X-cut or a Y-cut LN layer. The first optical waveguide is an optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer. The second optical waveguide is an optical waveguide that is routed and connected to the first optical waveguide. At least a part of a core of the first optical waveguide is made thicker than a core of the second optical waveguide.
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What is claimed is: 1. An optical device comprising: an X-cut or a Y-cut thin film Lithium Niobate (LN) layer; a first optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer; a second optical waveguide that is routed and connected to the first optical waveguide; an input unit that inputs light; a first branching unit that branches the light received from the input unit; a second branching unit that branches the light branched off at the first branching unit; two front stage outbound side first optical waveguides that are branched off at the second branching unit, and that are the first optical waveguide; a first electrode that applies a first electrical signal to the two front stage outbound side first optical waveguides; a front stage second optical waveguide that is connected to each of the two front stage outbound side first optical waveguides, through which the light modulated in the two front stage outbound side first optical waveguides in accordance with the first electrical signal passes, and that is the second optical waveguide; two front stage inbound side first optical waveguides that are connected to the front stage second optical waveguide, and that are the first optical waveguide; a second electrode that applies a second electrical signal to the two front stage inbound side first optical waveguides; a first multiplexing unit that is connected to the two front stage inbound side first optical waveguides, and that multiplexes the passing modulated light that has been modulated in the two front stage inbound side first optical waveguides in accordance with the second electrical signal; a middle stage second optical waveguide that is connected to the first multiplexing unit, through which the light received from the first multiplexing unit passes, and that is the second optical waveguide; two rear stage outbound side first optical waveguides that are connected to the middle stage second optical waveguide, and that are the first optical waveguide; a third electrode that applies a third electrical signal to the two rear stage outbound side first optical waveguides; a second multiplexing unit that is connected to the two rear stage outbound side first optical waveguides, and that multiplexes the passing modulated light that has been modulated in the two rear stage outbound side first optical waveguides in accordance with the third electrical signal; a rear stage second optical waveguide that is connected to the second multiplexing unit, through which the light received from the second multiplexing unit passes, and that is the second optical waveguide; a rear stage inbound side first optical waveguide that is connected to the rear stage second optical waveguide, and that is the first optical waveguide; and an output unit that is connected to the rear stage inbound side first optical waveguide, and that outputs the light received from the rear stage inbound side first optical waveguide, wherein a first thickness of at least a part of a first core of the first optical waveguide is made thicker than a second thickness of a second core of the second optical waveguide, the first thickness being in a vertical direction with respect to a surface of the first core and the second thickness being in a vertical direction with respect to a surface of the second core; and a core of each of the two front stage outbound side first optical waveguides, the two front stage inbound side first optical waveguides, the two rear stage outbound side first optical waveguides, and the rear stage inbound side first optical waveguide is made thicker than a core of each of the front stage second optical waveguide, the middle stage second optical waveguide, and the rear stage second optical waveguide. 2. The optical device according to claim 1 , wherein the second optical waveguide is a routed optical waveguide that includes at least one of a straight line waveguide and a bent waveguide that are formed on the thin film LN layer along a direction other than the direction that is substantially perpendicular to the Z direction. 3. The optical device according to claim 1 , wherein at least a part of the first optical waveguide is a ridge-type waveguide, and at least a part of the second optical waveguide is a channel waveguide. 4. The optical device according to claim 1 , wherein a core of a joining unit that joins the first optical waveguide and the second optical waveguide has a tapered shape that is gradually thinner from the first core of the first optical waveguide toward the second core of the second optical waveguide. 5. An optical device comprising: an X-cut or a Y-cut thin film Lithium Niobate (LN) layer; a first optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer; a second optical waveguide that is routed and connected to the first optical waveguide; an input unit that inputs light; a branching unit that branches the light received from the input unit; two outbound side first optical waveguides that are branched off at the branching unit and that are the first optical waveguide; the second optical waveguide that is connected to each of the two outbound side first optical waveguides; two inbound side first optical waveguides that are connected to the second optical waveguide and that are the first optical waveguide; an electrode that applies an electrical signal to the two outbound side first optical waveguides and the two inbound side first optical waveguides; a multiplexing unit that multiplexes the modulated light passing through the two inbound side first optical waveguides; and an output unit that outputs the modulated light that has been multiplexed at the multiplexing unit, wherein a first thickness of at least a part of a first core of the first optical waveguide is made thicker than a second thickness of a second core of the second optical waveguide, the first thickness being in a vertical direction with respect to a surface of the first core and the second thickness being in a vertical direction with respect to a surface of the second core; and a thickness of a core of each of the two outbound side first optical waveguides and the two inbound side first optical waveguide is made thicker than the second thickness of the second core of the second optical waveguide. 6. An optical device comprising: an X-cut or a Y-cut thin film Lithium Niobate (LN) layer; a first optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer; a second optical waveguide that is routed and connected to the first optical waveguide; an input unit that inputs light; a branching unit that branches the light received from the input unit; two outbound side first optical waveguides that are branched off at the branching unit and that are the first optical waveguide; a first electrode that applies a first electrical signal to the two outbound side first optical waveguides; the second optical waveguide that is connected to each of the two outbound side first optical waveguides, and through which the light that has been modulated in the two outbound side first optical waveguides in accordance with the first electrical signal passes; two inbound side first optical waveguides that are connected to the second optical waveguide and that are the first optical waveguide; a second electrode that applies a second electrical signal to the two inbound side first optical waveguides; a multi
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