Electro-optic device

Patent metadata

Field	Value
Publication number	US-11086149-B2
Application number	US-202016832784-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Mar 29, 2019
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

An electro-optic device is provided with a substrate, an optical waveguide formed of a lithium niobate film with a ridge shape on the substrate, and an electrode that applies an electric field to the optical waveguide. The optical waveguide includes a first waveguide section provided at least in an electric field application region applied with the electric field and having a thickness of 1 μm or larger and a second waveguide section provided in a region other than the electric field application region and having a thickness of 0.3 μm or larger and less than 1 μm.

First claim

What is claimed is:

1. An electro-optic device comprising:
a substrate;
an optical waveguide formed of a lithium niobate film with a ridge shape on the substrate; and
an electrode that applies an electric field to the optical waveguide,
wherein the optical waveguide includes an optical waveguide core comprising:
a first waveguide section provided at least in an electric field application region applied with the electric field and, the first waveguide section having a first ridge part with a thickness of 1 μm or larger and a slab part with a tapered thickness, and
a second waveguide section provided in a region other than the electric field application region and having a second ridge part with a thickness of 0.3 μm or larger and less than 1 μm,

wherein the first and second ridge parts and the slab part are made of the lithium niobate film, and
wherein the second waveguide section does not have a slab part.

2. The electro-optic device as claimed in claim 1 , wherein a width of the second waveguide section is smaller than a width of the first waveguide section.

3. The electro-optic device as claimed in claim 1 , wherein the optical waveguide includes a Mach-Zehnder optical waveguide.

4. The electro-optic device as claimed in claim 3 , wherein
the Mach-Zehnder optical waveguide includes an input waveguide, a demultiplexor, first and second modulation waveguides, a multiplexor, and an output waveguide in this order from an optical input port toward an optical output port, and
at least one of the input waveguide and the output waveguide includes the second waveguide section.

5. The electro-optic device as claimed in claim 3 , wherein
the Mach-Zehnder optical waveguide includes an input waveguide, a demultiplexor, first and second modulation waveguides, a multiplexor, and an output waveguide in this order from an optical input port toward an optical output port, and
a part of the first and second modulation waveguides provided outside the electric field application region includes the second waveguide section.

Assignees

• Tdk Corp
• Fujitsu Optical Components Ltd

Inventors

• Iwatsuka Shinji
• Sasaki Kenji
• Hara Hiroki
• Ohmori Yasuhiro
• Doi Masaharu
• Takeuchi Shintaro
• Yoshida Yoshihiko
• Kubota Yoshinobu

Classifications

• G02F1/2255

  controlled by a high-frequency electromagnetic component in an electric waveguide structure · CPC title

• G02F1/035 Primary

  in an optical waveguide structure · CPC title

• G02F1/212

  Mach-Zehnder type · CPC title

• G02F2202/20

  LiNbO3, LiTaO3 · CPC title

• G02F1/011 Primary

  in optical waveguides, not otherwise provided for in this subclass · CPC title