Ion gun

Patent metadata

Field	Value
Publication number	US-12040153-B2
Application number	US-202017636162-A
Country	US
Kind code	B2
Filing date	Jul 21, 2020
Priority date	Sep 9, 2019
Publication date	Jul 16, 2024
Grant date	Jul 16, 2024

Abstract

An ion gun of the invention includes: an anode; a magnetic pole that has an inner surface facing the anode, a slit provided at a position corresponding to the anode, and an inner inclined surface that extends from an end of the inner surface to the slit and that forms a part of the slit; and a cover that covers at least the inner surface and the inner inclined surface, is formed of an electroconductive and non-magnetic material, and is detachable from the magnetic pole.

First claim

What is claimed is:

1. An ion gun comprising:
an anode;
a magnetic pole that has an inner surface facing the anode, a slit provided at a position corresponding to the anode, and an inner inclined surface that extends from an end of the inner surface to the slit and that forms a part of the slit; and
a cover that covers at least the inner surface and the inner inclined surface, is formed of an electroconductive and non-magnetic material, and is detachable from the magnetic pole.

2. The ion gun according to claim 1 , wherein
the magnetic pole has an outer surface on an opposite side of the inner surface, and an outer inclined surface that extends from an end of the outer surface to the slit and that forms a part of the slit, and
the cover covers the inner surface, the inner inclined surface, the outer surface, and the outer inclined surface.

3. The ion gun according to claim 1 , wherein
the material forming the cover is selected from the group consisting of carbon, titanium, and copper.

4. The ion gun according to claim 3 , wherein
the material forming the cover is carbon.

5. The ion gun according to claim 1 , wherein the cover includes:
a first cover portion that covers the inner surface of the magnetic pole; and
a second cover portion that is connected to the first cover portion and that covers the inner inclined surface.

6. The ion gun according to claim 5 , wherein
the inner inclined surface of the magnetic pole has an inner end that is located at an opposite side of the end of the inner surface, and
when viewed in a plan view of the ion gun, the cover has a protruding portion that protrudes from the inner end to the slit.

7. The ion gun according to claim 5 , wherein
the second cover portion of the cover has a vertical surface extending in a vertical direction with respect to the anode, and
vertical surfaces facing each other in the slit are parallel to each other.

8. The ion gun according to claim 7 , wherein
the inner inclined surface of the magnetic pole has an inner end that is located at an opposite side of the end of the inner surface, and
when viewed in a plan view of the ion gun, the inner end coincides with the vertical surface of the cover.

Assignees

• Ulvac Inc

Inventors

• Yuze Takumi

Classifications

• H01J27/022

  Details · CPC title

• H01J2237/08

  Ion sources · CPC title

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J27/143 Primary

  Hall-effect ion sources with closed electron drift · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title