Vapor jet printing

Patent metadata

Field	Value
Publication number	US-12029102-B2
Application number	US-202117142490-A
Country	US
Kind code	B2
Filing date	Jan 6, 2021
Priority date	Apr 3, 2018
Publication date	Jul 2, 2024
Grant date	Jul 2, 2024

Abstract

Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

First claim

We claim:

1. A method of depositing a film on a selective area of a substrate, the method comprising:
ejecting a first jet of a first material from a first nozzle assembly of a jet head comprising a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate; and
ejecting a second jet of a second material from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material,
wherein the second material reacts with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors, and
wherein the composite film deposition includes at least one from the group consisting of: an inorganic film, and an organic film.

2. The method of claim 1 , wherein the inorganic or organic films are semiconducting films.

3. The method of claim 2 , wherein the composite film deposition comprises at least one of Group III-V materials.

4. The method of claim 3 , wherein the Group III-V materials are deposited using a showerhead having separate gas pathways for the Group III materials and the Group V materials.

5. The method of claim 2 , wherein the composite film deposition is formed from at least one of the materials selected from the group consisting of: GaAs, AlAs, InGaAs, InP, InGaAlP, GaN, AlGaN, GaInN, and AlN.

6. A method of depositing films on a selective area of a substrate that rely on different source gases that react at or close to a deposition site, the method comprising:
ejecting a first jet of a first material from a first nozzle assembly of a jet head that is separate from a second nozzle assembly of the jet head;
forming, on a surface of the substrate, a first layer deposition using the first material;
moving the substrate or the jet head a distance corresponding to a spacing between the first nozzle assembly and the second nozzle assembly; and
ejecting a second jet of a second material from the second nozzle assembly of the jet head, wherein the second nozzle assembly is aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate,
wherein the second material reacts with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors, and
wherein the composite film deposition includes at least one from the group consisting of: an inorganic film, and an organic film.

7. The method of claim 6 , wherein the first nozzle assembly and the second nozzle assembly are confined from one another, and wherein each nozzle of a plurality of nozzle assemblies of the jet head is comprised of jetting apertures, exhaust apertures, and confinement apertures, and a jetting flow ejected from the jetting apertures is perpendicular to the substrate, and a confinement flow ejected from the confinement apertures is parallel to the substrate.

8. The method of claim 6 , wherein a shape and a thickness profile of the composite film deposition, and the selective area of the substrate upon which the composite film deposition is formed, is based on a size and shape of the first nozzle assembly and the second nozzle assembly, and a distance between the jet head and the substrate.

9. The method of claim 6 , further comprising:
moving the substrate or the jet head the distance corresponding to the spacing between the first nozzle assembly and the second nozzle assembly; and
adding to the composite film deposition using the first material that is emitted from the first nozzle assembly.

10. The method of claim 6 , wherein the first nozzle assembly and the second nozzle assembly form a nozzle assembly pair, wherein a number of nozzle assembly pairs of the plurality of nozzle assemblies is equal to a film thickness divided by a bi-layer atom thickness.

11. The method of claim 6 , wherein the selective area of the substrate upon which the composite film deposition is formed is selected from the group consisting of: less than 50% of the surface area of the substrate, and less than 10% of the surface area of the substrate.

12. The method of claim 6 , wherein the composite film deposition includes at least one from the group consisting of: an inorganic film, a metal film, and an organic film.

13. The method of claim 6 , wherein the composite film deposition is formed using at least one selected from the group consisting of: an atomic layer deposition (ALD), an atomic layer epitaxy (ALE), a chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and remote plasma enhanced chemical vapor deposition (RPECVD).

14. The method of claim 6 , wherein the composite film deposition forms a multi-layer barrier film over at least a portion of an organic light emitting device (OLED).

15. The method of claim 6 , further comprising:
detecting, with a sensor, one or more surface features of a device,
wherein the composite film deposition is formed on the one or more detected surface features of the device.

16. The method of claim 15 , wherein one of the detected surface features is a surface defect.

17. The method of claim 6 , wherein a size of the jet head is less than 10% of a surface area of the substrate.

18. The method of claim 6 , wherein at least one of a length and width dimension of the jet head is less than 25% of at least one of a length and width dimension of the substrate.

19. The method of claim 6 , wherein the distance between the substrate and the jet head is selected from the group consisting of: 10-100 μm, and 100 μm−1 mm.

20. The method of claim 6 , wherein the composite film deposition is selected from a group consisting of: a spatially-localized thin film transistor, a light emitting device, and an organic light emitting device.

Assignees

• Universal Display Corp

Inventors

• Hack Michael
• Quinn William E
• Mcgraw Gregory
• Mayweather Iii William T
• Brown Julia J

Classifications

• H10K59/8731

  multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title

• H10K71/18 Primary

  using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet · CPC title

• C23C16/301 Primary

  AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi · CPC title

• H10K2101/40

  Interrelation of parameters between multiple constituent active layers or sublayers, e.g. HOMO values in adjacent layers · CPC title

• H10K2101/10

  Triplet emission · CPC title