Testing apparatus for optical devices

Patent metadata

Field	Value
Publication number	US-12025650-B2
Application number	US-202217581092-A
Country	US
Kind code	B2
Filing date	Jan 21, 2022
Priority date	Feb 4, 2020
Publication date	Jul 2, 2024
Grant date	Jul 2, 2024

Abstract

An apparatus may include an upper transparent plate to hold a wafer of bottom-emitting or bottom-detecting optical devices, wherein the upper transparent plate comprises a set of holes in an area of the upper transparent plate for holding the wafer. The apparatus may include a lower transparent plate and a structure supporting the upper transparent plate and the lower transparent plate to form a cavity bounded by the upper transparent plate, the lower transparent plate, and the structure, wherein the structure comprises an opening in fluid communication with the cavity, wherein applying suction through the opening, via the cavity and the set of holes, holds the wafer flat on the upper transparent plate, and wherein an optical path, between a bottom-emitting or bottom-detecting optical device of the bottom-emitting or bottom-detecting optical devices of the wafer and a testing device, passes through the upper transparent plate, the cavity, and the lower transparent plate.

First claim

What is claimed is:

1. An apparatus, comprising:
an upper transparent plate to support a wafer of an optical device,
wherein the upper transparent plate comprises at least one hole;

a lower transparent plate; and
a structure supporting the upper transparent plate and the lower transparent plate to form a cavity bounded by the upper transparent plate, the lower transparent plate, and the structure,
wherein the cavity is in fluid communication with the at least one hole,
wherein the structure comprises an opening in fluid communication with the cavity, and
wherein, when a suction force is applied through the opening, the wafer is held onto the upper transparent plate.

2. The apparatus of claim 1 , wherein the upper transparent plate and the lower transparent plate are transparent at an optical wavelength for testing the wafer.

3. The apparatus of claim 1 , wherein the upper transparent plate comprises a conducting element on an upper surface of the upper transparent plate to provide an electrical path from a bottom surface of the wafer to a top surface of the wafer.

4. The apparatus of claim 1 , wherein at least one of the upper transparent plate or the lower transparent plate comprises an anti-reflective coating.

5. The apparatus of claim 1 , wherein the upper transparent plate is parallel to the lower transparent plate.

6. The apparatus of claim 1 , further comprising:
a testing device positioned below the lower transparent plate,
wherein the testing device is to receive light traveling on an optical path through the upper transparent plate and the lower transparent plate or to provide light on the optical path through the lower transparent plate and the upper transparent plate.

7. The apparatus of claim 6 , wherein the testing device comprises at least one of a photodetector, a light source, or a beam splitter.

8. An apparatus, comprising:
an upper plate to support a wafer of a bottom-emitting or bottom-detecting optical device;
a lower plate,
wherein the lower plate and the upper plate are transparent at a wavelength for testing the bottom-emitting or bottom-detecting optical device; and

a structure supporting the upper plate and the lower plate,
wherein the upper plate, the lower plate, and the structure are configured to allow a suction force to act on a bottom surface of the wafer to hold the wafer flat against an upper surface of the upper plate.

9. The apparatus of claim 8 , wherein the suction force is to act on to the bottom surface of the wafer via an opening in the structure, a cavity between the upper plate and the lower plate, and at least one hole in the upper plate.

10. The apparatus of claim 8 , further comprising:
a sealing element positioned between the upper plate and the structure to form a seal between the upper plate and the structure when the suction force is applied.

11. The apparatus of claim 10 , wherein the sealing element comprises at least one of a gasket or an epoxy joint.

12. The apparatus of claim 8 , wherein the upper plate and the lower plate are made of at least one of sapphire or quartz.

13. The apparatus of claim 8 , wherein the structure comprises:
an upper tab for supporting the upper plate; and
a lower tab for supporting the lower plate.

14. The apparatus of claim 8 , wherein the structure comprises:
a vertical lip configured to prevent lateral movement of the upper plate relative to the structure.

15. A method, comprising:
positioning an upper transparent plate on a structure to form a cavity bounded by the upper transparent plate, a lower transparent plate, and the structure,
wherein the upper transparent plate comprises at least one hole in fluid communication with the cavity;

positioning an optical wafer on the upper transparent plate over the at least one hole; and
applying a suction force through an opening of the structure to act on the optical wafer via the cavity and the at least one hole, thereby holding the optical wafer flat on the upper transparent plate.

16. The method of claim 15 , further comprising:
detecting light traveling from the optical wafer through the upper transparent plate and the lower transparent plate.

17. The method of claim 15 , further comprising:
emitting light through the lower transparent plate and the upper transparent plate to the optical wafer.

18. The method of claim 15 , wherein positioning the optical wafer on the upper transparent plate over the at least one hole comprises positioning the optical wafer in a non-flat position on the upper transparent plate.

19. The method of claim 15 , wherein positioning the optical wafer on the upper transparent plate over the at least one hole comprises positioning the optical wafer relative to the at least one hole such that optical devices on the optical wafer do not align with the at least one hole.

20. The method of claim 15 , wherein the at least one hole comprises concentric holes.

Assignees

• Lumentum Operations Llc

Inventors

• Yuen Albert

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/235

  comprising optical enhancement of defects or not-directly-visible states · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• G01R31/2601

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title