Slurry for suspension plasma spraying, method for forming rare earth acid fluoride sprayed film, and spraying member

Patent metadata

Field	Value
Publication number	US-12024439-B2
Application number	US-201716316158-A
Country	US
Kind code	B2
Filing date	Jul 10, 2017
Priority date	Jul 14, 2016
Publication date	Jul 2, 2024
Grant date	Jul 2, 2024

Abstract

Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.

First claim

The invention claimed is:

1. A suspension plasma spraying slurry for use as a spray material for suspension plasma spraying in an atmosphere containing an oxygen-containing gas, the slurry comprising:
5 to 40% by weight of rare earth fluoride particles having a maximum particle size (D100) of up to 12 μm,
0.1 to 5% by weight of at least one microparticulate additive selected from the group consisting of rare earth oxides, rare earth hydroxides, and rare earth carbonates, and
at least one solvent selected from water and organic solvents,
wherein a ratio in terms of weight of the content of the at least one microparticulate additive to the content of the rare earth fluoride particles is 5:5 to 0.1:40.

2. The slurry of claim 1 , further comprising up to 3% by weight of an anti-agglomerating agent of an organic compound.

3. The slurry of claim 2 , further comprising at least 0.03% by weight of an anti-agglomerating agent of an organic compound.

4. The slurry of claim 1 wherein the rare earth element is at least one element selected from the group consisting of yttrium (Y), gadolinium (Gd), holmium (Ho), erbium (Er), ytterbium (Yb), and lutetium (Lu).

5. The slurry of claim 1 wherein the suspension plasma spraying is atmospheric suspension plasma spraying.

6. A method for forming a sprayed coating of rare earth oxyfluoride, comprising the step of suspension plasma spraying the slurry of claim 1 as a spray material to a substrate in an atmosphere containing an oxygen-containing gas.

7. The method of claim 6 wherein the suspension plasma spraying is atmospheric suspension plasma spraying.

8. The method of claim 6 wherein the sprayed coating contains a rare earth oxyfluoride as main phase.

9. The method of claim 6 wherein the rare earth oxyfluoride is at least one rare earth oxyfluoride selected from the group consisting of ReOF, Re 5 O 4 F 7 , Re 6 O 5 F 8 , and Re 7 O 6 F 9 wherein Re is a rare earth element.

10. The method of claim 6 wherein the sprayed coating is a mixture of a rare earth oxyfluoride, a rare earth oxide, and a rare earth fluoride.

Assignees

• Shinetsu Chemical Co

Inventors

• Takai Yasushi
• Hamaya Noriaki

Classifications

• C23C4/10

  Oxides, borides, carbides, nitrides or silicides; Mixtures thereof · CPC title

• C01P2004/61

  Micrometer sized, i.e. from 1-100 micrometer · CPC title

• C01F17/265

  Fluorides · CPC title

• C23C4/134

  Plasma spraying · CPC title

• C01F17/218

  Yttrium oxides or hydroxides · CPC title