Probes for wafer sorting
US-2019101569-A1 · Apr 4, 2019 · US
US12020829B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12020829-B2 |
| Application number | US-202117248602-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 29, 2021 |
| Priority date | Feb 4, 2020 |
| Publication date | Jun 25, 2024 |
| Grant date | Jun 25, 2024 |
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A clad wire for producing test needles or sliding contacts is provided herein, the clad wire having a wire core made of rhodium or a rhodium-based alloy, an inner cladding made of copper or silver or aluminum or a copper-based alloy or a silver-based alloy or an aluminum-based alloy, wherein the inner cladding covers or completely encloses the wire core on at least two opposite sides, an adhesion-promoting layer made of gold or a gold-based alloy, which is arranged between the wire core and the inner cladding, and an outer cladding made of a metal or a metal alloy having a greater hardness than the inner cladding, wherein the outer cladding encloses the inner cladding. A method for producing a clad wire and to a test needle having at least one clad wire or produced from a clad wire and a test needle array is also provided herein.
Opening claim text (preview).
What is claimed is: 1. A clad wire for producing a test needle or a sliding contact, the clad wire comprising: a wire core made of rhodium or a rhodium-based alloy, an inner cladding made of copper, silver, aluminum, a copper-based alloy, a silver-based alloy or an aluminum-based alloy, wherein the inner cladding covers the wire core on at least two opposite sides or completely encloses the wire core, an adhesion-promoting layer made of gold or a gold-based alloy, which is arranged between the wire core and the inner cladding, and an outer cladding made of a metal or a metal alloy having a greater hardness than the material of the inner cladding, wherein the outer cladding encloses the inner cladding, and the outer cladding is the outermost layer of the clad wire. 2. The clad wire of claim 1 , wherein the volume of the wire core is at least as large as the volume of the inner cladding, and/or the wire core and the inner cladding have a thickness or a layer thickness at least twice as large as the adhesion-promoting layer. 3. The clad wire of claim 1 , further comprising: a diffusion protection layer arranged as a diffusion barrier between the inner cladding and the outer cladding. 4. The clad wire of claim 3 , wherein the inner cladding has a layer thickness at least twice as large as the diffusion protection layer. 5. The clad wire of claim 1 , wherein the outer cladding consists of rhodium, a rhodium-based alloy, a copper-tin-zinc alloy, a palladium-nickel alloy or a gold-based alloy. 6. The clad wire of claim 1 , wherein the clad wire at room temperature has a modulus of elasticity (mE) of at least 150 GPa, and/or the clad wire at room temperature has a 0.2% offset yield strength Rp0.2 (elasticity limit) of at least 1800 MPa, and/or the clad wire at room temperature has an electrical conductivity of at least 40% IACS. 7. The clad wire of claim 1 , wherein the clad wire has a diameter or a thickness of at most 200 μm. 8. The clad wire of claim 1 , wherein the wire core has a diameter or a thickness of between 9 μm and 100 μm, and/or the inner cladding has a layer thickness of between 1 μm and 20 μm, and/or the outer cladding has a layer thickness of between 0.5 μm and 5 μm, and/or the adhesion-promoting layer has a layer thickness of between 100 nm and 1000 nm. 9. The clad wire of claim 1 , wherein the adhesion-promoting layer, the inner cladding, the outer cladding and optionally the diffusion protection layer are galvanic coatings. 10. The clad wire of claim 1 , wherein the wire core is work-hardened, and/or the wire core is a coated strip. 11. A method for producing a clad wire according to claim 1 , the method comprising the following chronological steps: A) providing the wire core made of rhodium or a rhodium-based alloy, B) coating the wire core with the adhesion-promoting layer made of gold or a gold-based alloy, C) coating the wire core, coated with the adhesion-promoting layer, with the inner cladding of copper, silver, aluminum, a copper-based alloy, a silver-based alloy or an aluminum-based alloy, and D) coating the wire core, coated with the adhesion-promoting layer and the inner cladding, with the outer cladding made of a metal or a metal alloy with a greater hardness than the material of the inner cladding, wherein the outer cladding is the outermost layer of the produced clad wire. 12. The method of claim 11 , wherein the coatings according to steps B), C) and D) are applied using a galvanic method and/or are applied using a physical method. 13. A test needle comprising at least one clad wire according to claim 1 . 14. A test needle array having a plurality of test needles according to claim 13 spaced apart from one another. 15. The test needle of claim 13 , wherein the test needle is bent perpendicular to a longitudinal axis of the at least one clad wire. 16. A sliding contact comprising a plurality of clad wires according to claim 1 . 17. The sliding contact of claim 16 , wherein the plurality of clad wires is in the form of a wire bundle. 18. A method for producing a clad wire comprising the following chronological steps: A) providing a strip-like wire core made of rhodium or a rhodium-based alloy, B) coating the wire core with an adhesion-promoting layer made of gold or a gold-based alloy to form an adhesion-promoting layer-coated wire core, C) coating the adhesion-promoting layer-coated wire core with an inner cladding to form an inner cladding/adhesion-promoting layer-coated wire core, the inner cladding made of copper, silver, aluminum, a copper-based alloy, a silver-based alloy or an aluminum-based alloy, D) cutting the inner cladding/adhesion-promoting layer-coated wire core perpendicular to a longitudinal axis thereof to form a plurality of inner cladding/adhesion-promoting layer-coated wire cores, and E) coating each of the plurality of inner cladding/adhesion-promoting layer-coated wire cores with an outer cladding to form a plurality of outer cladding/inner cladding/adhesion-promoting layer-coated wire cores, the outer cladding made of a metal or a metal alloy with a hardness greater than a hardness of the material of the inner cladding, wherein the outer cladding is the outermost layer of the produced outer cladding/inner cladding/adhesion-promoting layer-coated wire cores. 19. The method of claim 18 , wherein the outer cladding/inner cladding/adhesion-promoting layer-coated wire cores have a modulus of elasticity (mE) of at least 150 GPa at room temperature, and/or have a 0.2% offset yield strength Rp0.2 (elasticity limit) of at least 1800 MPa at room temperature, and/or have an electrical conductivity of at least 40% IACS at room temperature.
Apparatus or processes specially adapted for the manufacture {or maintenance} of measuring instruments {, e.g. of probe tips} · CPC title
Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins · CPC title
the body of the probe being at an angle other than perpendicular to test object, e.g. probe card · CPC title
the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title
Material aspects · CPC title
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