Substrate processing apparatus and the method thereof

Patent metadata

Field	Value
Publication number	US-12011934-B2
Application number	US-202217870840-A
Country	US
Kind code	B2
Filing date	Jul 22, 2022
Priority date	Aug 24, 2021
Publication date	Jun 18, 2024
Grant date	Jun 18, 2024

Abstract

A substrate processing apparatus and a substrate processing method are provided, which can improve the yield by minimizing the occurrence of stains. The substrate processing method includes forming on the substrate a plurality of ink patterns spaced apart from each other by jetting ink onto the substrate by using a plurality of nozzles, calculating the density of each of the plurality of ink patterns, and selecting at least one nozzle for jetting ink into one pixel area based on respectively calculated densities of the plurality of ink patterns.

First claim

The invention claimed is:

1. A method of processing a substrate, comprising:
forming on the substrate a plurality of ink patterns spaced apart from each other by jetting ink onto the substrate by using a plurality of nozzles;
calculating a density of each of the plurality of ink patterns; and
selecting at least one nozzle for jetting ink into one pixel area based on respectively calculated densities of the plurality of ink patterns.

2. The method of claim 1 , further comprising:
measuring respective volumes of ink jetted from the plurality of nozzles.

3. The method of claim 2 , wherein the measuring of the respective volumes of ink jetted from the plurality of nozzles comprises:
imaging an inkjet of the ink when jetted from each of the plurality of nozzles; and
calculating the respective volumes of ink jetted from the plurality of nozzles based on volumes of main droplets in imaged inkjets.

4. The method of claim 2 , further comprising:
selecting at least one nozzle for jetting ink into one pixel area based on the respectively calculated densities of the plurality of ink patterns and the respective volumes of ink jetted from the plurality of nozzles.

5. The method of claim 1 , wherein the substrate comprises:
a flexible substrate provided in a roll-to-roll method.

Assignees

• Semes Co Ltd

Inventors

• Kim Sung Ho
• Jang Yoon Ok
• Hwang Bo Yeon
• Lee Hyun Min
• Choi Kwang Jun

Classifications

• B41J2/2142

  Detection of malfunctioning nozzles (generating single droplets or particles on demand by pressure, e.g. electromechanical transducers B41J2/045, B41J2/05; jet deflection sensors B41J2/125; for cleaning purposes B41J2/16579) · CPC title

• B41J2/2132

  Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding (methods for local corrections by dot omission, image edge enhancement, or multi-pass mask selection G06K15/102; colour conversion H04N1/40) · CPC title

• G02F1/133516

  Methods for their manufacture, e.g. printing, electro-deposition or photolithography · CPC title

• B41J2/04535

  involving calculation of drop size, weight or volume · CPC title

• B41J2/0456

  detecting drop size, volume or weight · CPC title