Vacuum pump and magnetic-bearing-integrated motor

Patent metadata

Field	Value
Publication number	US-12009726-B2
Application number	US-201917612087-A
Country	US
Kind code	B2
Filing date	May 24, 2019
Priority date	May 24, 2019
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.

First claim

The invention claimed is:

1. A vacuum pump comprising:
a rotor including a rotary shaft having an axial direction;
a rotor blade provided on the rotary shaft; and
a magnetic-bearing-integrated stator including at least a first coil and configured to apply a rotational force to rotationally drive the rotor and a bearing force to magnetically support the rotor; wherein
the rotor includes:
a pair of spacer members;
a support member provided on an outer circumference of the rotary shaft to receive a pressure applied in the axial direction during assembly via contact with each of the pair of spacer members;
a permanent magnet provided so as to contact and surround an outer circumference of the support member; and
a non-conductive protective ring having an annular shape, the protective ring being provided on an outer circumference of the permanent magnet in non-contact with the pair of spacer members in the axial direction; and

in the axial direction of the rotary shaft, the support member has a mechanical strength higher than that of the protective ring, wherein:
the pair of spacer members are arranged so as to sandwich the support member in the axial direction, and
the support member, the permanent magnet, and the non-conductive protective ring are arranged in this stated order from inside in a radial direction of the rotor.

2. The vacuum pump according to claim 1 , wherein in the axial direction, the support member has a first length larger than a second length of the protective ring.

3. The vacuum pump according to claim 2 , wherein the protective ring is arranged at a position at which a first-side end of the protective ring in the axial direction is located between a first-side end of the permanent magnet and a first-side end of the support member, and a second-side end of the protective ring in the axial direction is located between a second-side end of the permanent magnet and a second-side end of the support member.

4. The vacuum pump according to claim 1 , wherein
in the axial direction, the support member has both end faces that contact the pair of spacer members, respectively; and
in the axial direction, the protective ring has at least one end face in non-contact with at least one of the pair of spacer members.

5. The vacuum pump according to claim 4 , wherein in a radial direction of the rotary shaft, the protective ring has an outer surface located at substantially a same position as outer surfaces of the pair of spacer members or located inside the outer surfaces of the pair of spacer members.

6. The vacuum pump according to claim 1 , wherein the support member has an annular shape.

7. The vacuum pump according to claim 1 , wherein the protective ring is made of a non-conductive resin.

8. The vacuum pump according to claim 7 , wherein the protective ring is made of fiber-reinforced plastic.

9. A magnetic-bearing-integrated motor comprising:
a rotor including a rotary shaft having an axial direction; and
a magnetic-bearing-integrated stator including at least a first coil and configured to apply a rotational force to rotationally drive the rotor and a bearing force to magnetically support the rotor; wherein
the rotor includes:
a pair of spacer members;
a support member provided on an outer circumference of the rotary shaft to receive a pressure applied in the axial direction during assembly via contact with each of the pair of spacer members;
a permanent magnet provided so as to contact and surround an outer circumference of the support member; and
a non-conductive protective ring having an annular shape, the protective ring being provided on an outer circumference of the permanent magnet in non-contact with the pair of spacer members in the axial direction; and

in the axial direction of the rotary shaft, the support member has a mechanical strength higher than that of the protective ring, wherein:
the pair of spacer members are arranged so as to sandwich the support member in the axial direction, and
the support member, the permanent magnet, and the non-conductive protective ring are arranged in this stated order from inside in a radial direction of the rotor.

10. The magnetic-bearing-integrated motor according to claim 9 , wherein in the axial direction, the support member has a first length larger than a second length of the protective ring.

11. A vacuum pump comprising:
an intake port positioned to receive a gas;
a rotor including a rotary shaft extending in an axial direction;
a rotor blade provided on the rotary shaft and configured to suck in the gas through the intake port;
an exhaust port configured to output the gas; and
a magnetic-bearing-integrated stator configured to apply a rotational force to rotationally drive the rotor and a bearing force to magnetically support the rotor; wherein:
the rotor includes:
a first spacer member and a second spacer member, the first spacer member having a first axial end surface and the second spacer member having a second axial end surface spaced apart from and facing the first axial end surface in the axial direction;
a support member provided on an outer circumference of the rotary shaft and contacting the first spacer member and second spacer member, the support member being sandwiched in the axial direction between the first spacer member and the second spacer member;
a permanent magnet provided so as to surround an outer circumference of the support member and to also be sandwiched in the axial direction between the first spacer member and the second spacer member; and
a non-conductive protective ring having an annular shape, the protective ring being provided on an outer circumference of the permanent magnet to have a first axial end surface facing the first axial end surface of the first spacer member and a second axial end surface facing the second axial end surface of the second spacer member, at least one of the first axial end surface and the second axial end surface of the non-conductive protective ring being in non-contact with a corresponding first or second axial end surface of the first or second spacer member.

12. The vacuum pump of claim 11 , wherein:
the first axial end surface of the first spacer member contacts a first axial end surface of the support member; and
the second axial end surface of the second spacer member contacts a second axial end surface of the support member.

13. The vacuum pump according to claim 11 , wherein in the axial direction, a length of the support member is greater than a length of the protective ring.

14. The vacuum pump according to claim 13 , wherein in the axial direction, the length of the protective ring is greater than a length of the permanent magnet.

15. The vacuum pump according to claim 11 , wherein the support member is configured to receive a pressure applied in the axial direction via the first and second spacer members during assembly.

16. The vacuum pump according to claim 11 , wherein in the axial direction of the rotary shaft, the support member has a mechanical strength higher than that of the protective ring.

Assignees

• Shimadzu Corp

Inventors

• Mori Takahiro
• Inoue Tsunehiro
• Ota Tomoo
• Takemoto Masatsugu
• Fu Yu

Classifications

• H02K21/20

  having windings each turn of which co-operates only with poles of one polarity, e.g. homopolar machine · CPC title

• F16C32/0474

  for rotary movement · CPC title

• F04D25/06

  the pump being electrically driven (F04D25/08 takes precedence) · CPC title

• F04D19/04 Primary

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F16C2360/00

  Engines or pumps · CPC title