Pulsed etch process

Patent metadata

Field	Value
Publication number	US-12009218-B2
Application number	US-202217738526-A
Country	US
Kind code	B2
Filing date	May 6, 2022
Priority date	May 6, 2022
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

Described herein is a method for etching a sample. The method includes performing a plasma etch pulse. The plasma etch pulse is performed by directing a gas flow comprising silicon tetrachloride (SiCl 4 ) and a diluent towards the sample. While directing the gas flow, a bias power is applied to achieve a bias state for a first time period. Then, a source power is applied to achieve a source state for a second time period, and then no bias power and no source power is applied to achieve a recovery state for a third time period. The plasma etch pulse is repeated until a target amount of the sample is etched.

First claim

What is claimed is:

1. A method of etching a sample comprising:
performing a plasma etch pulse, comprising:
directing a gas flow comprising silicon tetrachloride (SiCl 4 ) and a diluent comprising Ar and He towards the sample;
applying a bias power to achieve a bias state for a first time period while directing the flow of the SiCl 4 and the diluent towards the sample;
applying a source power to achieve a source state for a second time period; and
applying no bias power and no source power to achieve a recovery state for a third time period; and
repeating the plasma etch pulse until a target amount of the sample has been etched.

2. The method of claim 1 , wherein no source power is applied during the bias state and wherein no bias power is applied during the source state.

3. The method of claim 1 , wherein the bias power is from about 100 W to about 5000 W.

4. The method of claim 1 , wherein a bias frequency is from about 400 kHz to about 60 MHz.

5. The method of claim 1 , wherein the plasma etch pulse is performed at a pressure of about 0.1 mT to about 500 mT.

6. The method of claim 1 , wherein the plasma etch pulse is performed at a temperature of about −50° C. to about 300° C.

7. The method of claim 1 , wherein the source power is from about 100 W to about 5000 W.

8. The method of claim 1 , wherein the gas flow comprises SiCl 4 in an amount of about 5 mol % to about 80 mol %.

9. The method of claim 1 , wherein the gas flow comprises Ar in an amount of about 5 mol % to about 15 mol % and He in an amount of about 5 mol % to about 90 mol %.

10. The method of claim 1 , wherein the first time period is about 10 μsec to about 1 msec, wherein the second time period is about 10 μsec to about 1 msec, and wherein the third time period is about 10 μsec to about 1 msec.

11. The method of claim 1 , where a ratio of the first time period to the second time period is about 1:10 to about 10:1.

12. The method of claim 1 , wherein a ratio of the third time period to an aggregate of the first time period and the second time period is about 1:1 to about 90:1.

13. The method of claim 1 , wherein the gas flow has a rate of about 50 sccm to about 2000 sccm.

14. The method of claim 1 , wherein a portion of the sample that is etched by the plasma etch pulse comprises a plurality of alternating layers of silicon and silicon germanium.

15. The method of claim 1 , wherein the plasma etch process causes a U-shaped profile in the sample.

16. A method of etching a sample, comprising:
performing a plasma etch pulse, comprising:
applying a bias power to achieve a bias state for a first time period while directing a flow of a gas and a diluent towards the sample;
applying a source power to achieve a source state for a second time period; and
applying no bias power and no source power to achieve a recovery state for a third time period; and
repeating the plasma etch pulse until a target amount of the sample has been etched,
wherein no source power is applied during the bias state and wherein no bias power is applied during the source state and
wherein the gas comprises SiCl 4 and the diluent comprises Ar and He.

Assignees

• Applied Materials Inc

Inventors

• Zhou Yifeng
• Fu Qian

Classifications

• H10P50/242 Primary

  of Group IV materials · CPC title

• H01J37/32706

  Polarising the substrate · CPC title

• H01J37/32146

  Amplitude modulation, includes pulsing · CPC title

• H01L21/3065 Primary

  Electricity · mapped topic