Physical property evaluation device

Patent metadata

Field	Value
Publication number	US-12000790-B2
Application number	US-201917265657-A
Country	US
Kind code	B2
Filing date	Aug 5, 2019
Priority date	Aug 7, 2018
Publication date	Jun 4, 2024
Grant date	Jun 4, 2024

Abstract

This invention prevents measurement error from becoming large in thermoelectric conversion coefficient evaluation and enhances evaluation efficiency. This invention is a physical property evaluation device for evaluating the physical properties of a plurality of solid materials formed on a substrate. The physical property evaluation device comprises an electromotive force measurement means that forms closed circuits including the individual solid materials and measures the electromotive forces occurring at the two ends of each of the solid materials, a means for producing heat flow within the individual solid materials, an external magnetic field generation means for generating a uniform magnetic field having a given intensity and direction in the vicinity of the individual solid materials, and an automation means for evaluating the physical properties of the individual solid materials using the electromotive force measurement means, heat flow production means, and external magnetic field generation means.

First claim

The invention claimed is:

1. A physical property evaluation device that evaluates a physical property of a solid material having a first end and a second end being formed on a substrate, the device comprising:
an electromotive force measurement unit that forms a closed circuit including the solid material, and measures an electromotive force being generated between the first end and the second end of the solid material;
a heat flow generation unit that generates a heat flow in the solid material;
an external magnetic field generation unit that generates a uniform magnetic field in a vicinity of the solid material, the magnetic field having a given intensity and direction; and
an automation unit that evaluates the physical property of the solid material by using the electromotive force measurement unit, the heat flow generation unit, and the external magnetic field generation unit.

2. The physical property evaluation device according to claim 1 , wherein the heat flow generation unit includes a heating element being firmly attached to a surface of the solid material.

3. The physical property evaluation device according to claim 2 , wherein the heat flow generation unit further includes an amount-of-heat supply unit that supplies the heating element being firmly attached to the surface of the solid material with an amount of heat for heat generation.

4. The physical property evaluation device according to claim 3 , wherein the amount-of-heat supply unit can be separated from the heating element.

5. The physical property evaluation device according to claim 3 , wherein the amount-of-heat supply unit can be directly in contact with the heating element.

6. The physical property evaluation device according to claim 2 , wherein the heating element included in the heat flow generation unit includes an insulating coating film being firmly attached onto the surface of the solid material, and a conductor film being further firmly attached onto the insulating coating film.

7. The physical property evaluation device according to claim 6 , wherein heat in the conductor film is Joule heat being generated by energizing the conductor film.

8. The physical property evaluation device according to claim 6 , wherein heat in the conductor film is a thermoelectric effect being generated by energizing the conductor film.

9. A physical property evaluation device that evaluates physical properties of a plurality of solid materials each having a first end and a second end being formed on a substrate, the device comprising:
an electromotive force measurement unit that forms a closed circuit including each of the solid materials of the plurality of solid materials, and measures an electromotive force being generated between the first end and second end of each of the plurality of solid materials;
a heat flow generation unit that generates a heat flow in each of the solid materials of the plurality of solid materials;
an external magnetic field generation unit that generates a uniform magnetic field in a vicinity of each of the solid materials of the plurality of solid materials, the magnetic field having a given intensity and direction; and
an automation unit that evaluates a physical property of each of the solid materials of the plurality of solid materials by using the electromotive force measurement unit, the heat flow generation unit, and the external magnetic field generation unit,
wherein, in the plurality of solid materials, at least one of a composition, a shape, or a deposition process condition in a material that constitutes each of the solid materials of the plurality of solid materials is different from that of other materials.

10. The physical property evaluation device according to claim 9 , wherein the heat flow generation unit includes a heating element being firmly attached to a surface of each of the solid materials of the plurality of solid materials.

11. The physical property evaluation device according to claim 10 , wherein the heat flow generation unit further includes an amount-of-heat supply unit that supplies the heating element being firmly attached to the surface each of the solid materials of the plurality of solid materials with an amount of heat for heat generation.

12. The physical property evaluation device according to claim 11 , wherein the amount-of-heat supply unit can be separated from the heating element.

13. The physical property evaluation device according to claim 11 , wherein the amount-of-heat supply unit can be directly in contact with the heating element.

14. The physical property evaluation device according to claim 10 , wherein the heating element included in the heat flow generation unit includes an insulating coating film being firmly attached onto the surface of each of the solid materials of the plurality of solid materials, and a conductor film being further firmly attached onto the insulating coating film.

15. The physical property evaluation device according to claim 14 , wherein heat in the conductor film is Joule heat being generated by energizing the conductor film.

16. The physical property evaluation device according to claim 14 , wherein heat in the conductor film is a thermoelectric effect being generated by energizing the conductor film.

Assignees

• Nec Corp

Inventors

• Ishida Masahiko
• SAWADA Ryohto
• Iwasaki Yuma
• Kirihara Akihiro
• Someya Hiroko

Classifications

• H10D48/40

  Devices controlled by magnetic fields · CPC title

• G01N25/482 Primary

  concerning the temperature responsive elements (measuring temperature or quantity of heat, thermally-sensitive elements G01K; thermoelectric devices H10N10/00, H10N15/00) · CPC title

• H10N15/20

  Thermomagnetic devices using thermal change of the magnetic permeability, e.g. working above and below the Curie point · CPC title

• G01N25/4813 Primary

  concerning the measuring means · CPC title

• G01K7/08

  the object to be measured forming one of the thermoelectric materials, e.g. pointed type · CPC title