Diagnostic device, semiconductor manufacturing equipment system, semiconductor equipment manufacturing system, and diagnostic method
US-2024321608-A1 · Sep 26, 2024 · US
US10088439B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10088439-B2 |
| Application number | US-201414912482-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2014 |
| Priority date | Aug 22, 2013 |
| Publication date | Oct 2, 2018 |
| Grant date | Oct 2, 2018 |
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Thermophysical property measurement apparatus and method that can obtain accurate absolute thermoelectric power and thermal conductivity are provided easily and conveniently. A thermophysical property measurement apparatus 50 is provided which includes a DC-AC voltage generator 100 which selectively applies AC or DC voltages of different polarities to a metal sample 4 to which temperature gradient is provided by connecting the metal sample 4 between metal blocks of temperatures T 1 and T 2 ; a thermocouple 5 which measures a temperature change at the center of the metal sample 4 when the AC voltage is applied thereto by the DC-AC voltage generator 100 and a temperature change at the center of the metal sample 4 when the DC voltages of the different polarities are applied; and an operation device 54 which calculates absolute thermoelectric power and thermal conductivity of the metal sample 4 using the two temperature changes measured by the thermocouple 5.
Opening claim text (preview).
The invention claimed is: 1. A thermophysical property measurement method, comprising: a first step of applying an AC voltage or an AC current to a metal to which a temperature gradient is provided to measure a first temperature change of the metal; a second step of applying DC voltages or DC currents of different polarities to the metal to measure a second temperature change of the metal; and a third step of calculating at least one of an absolute thermoelectric power and a thermal conductivity of the metal using the first temperature change and the second temperature change that are measured in the first step and the second step. 2. The thermophysical property measurement method as claimed in claim 1 , wherein, in the first step and the second step, the voltage or the current is applied to both ends of the metal and first and second temperatures are measured at a center of the metal. 3. The thermophysical property measurement method as claimed in claim 1 , wherein the AC voltage applied in the first step has an effective value of the same magnitude as that of the DC voltage. 4. The thermophysical property measurement method as claimed in claim 1 , wherein the second step includes a positive voltage application step of applying a positive-polarity DC voltage to the metal to measure a temperature of the metal; a negative voltage application step of applying a negative-polarity DC voltage to the metal to measure the temperature of the metal; and a temperature change calculation step of calculating a difference in the temperature of the metal that is measured in the respective steps of the positive voltage application step and the negative voltage application step to set the calculated difference to be a second temperature. 5. The thermophysical property measurement method as claimed in claim 1 , wherein the second step is executed following the first step; the thermophysical property measurement method further including a fourth step of further applying an AC voltage to the metal following the second step to measure a temperature change of the metal; and a fifth step of calculating an average value of the temperature change measured in the first step and the fourth step to set the calculated average value to be the first temperature change. 6. The thermophysical property measurement method as claimed in claim 1 , wherein the third step includes a Thomson coefficient calculation step of calculating a Thomson coefficient of the metal; and a thermophysical property calculation step of calculating at least one of the absolute thermoelectric power and the thermal conductivity of the metal using the Thomson coefficient calculated in the Thomson coefficient calculation step. 7. A thermophysical property measurement apparatus, comprising: a voltage application device which selectively applies an AC voltage or a DC voltage of a positive polarity or a negative polarity to a metal to which a temperature gradient is provided; a temperature measurement device which measures a first temperature change of the metal by the voltage application device when the AC voltage is applied by the voltage application device and a second temperature change of the metal when the DC voltage of the positive polarity or the negative polarity is applied; and a thermophysical property calculation device which calculates at least one of an absolute thermoelectric power or a thermal conductivity of the metal using the first temperature change and the second temperature change. 8. The thermophysical property measurement apparatus as claimed in claim 7 , wherein the voltage application device includes a quantized AC voltage generator which generates the AC voltage. 9. The thermophysical property measurement apparatus as claimed in claim 7 , wherein the device which calculates the thermoelectric power calculates a difference between a temperature of the metal that is measured by the temperature measurement device when the DC voltage of the positive polarity is applied and a temperature measured by the temperature measurement device when the DC voltage of the negative polarity is applied to set the calculated difference to be the second temperature change. 10. The thermophysical property measurement apparatus as claimed in claim 7 , wherein the voltage application device applies a sinusoidal wave AC voltage to the metal as the AC voltage. 11. The thermophysical property measurement apparatus as claimed in claim 7 , wherein the voltage application device applies a rectangular wave AC voltage to the metal as the AC voltage. 12. The thermophysical property measurement apparatus as claimed in claim 7 , wherein the temperature measurement device includes a thermocouple or a radiation thermometer. 13. The thermophysical property measurement apparatus as claimed in claim 7 , further comprising: two metal blocks, one of which is connected to one end of the metal and the other of which is connected to the other end of the metal; and a temperature setting device which sets the two metal blocks to respectively different temperatures. 14. The thermophysical property measurement apparatus as claimed in claim 13 , further comprising: a thermocouple which measures a temperature of the two metal block blocks at a connecting portion with the metal, wherein the temperature setting device sets the temperature of the two metal block blocks in accordance with the temperature measured by the thermocouple.
by investigating thermal conductivity (by calorimetry G01N25/20; by measuring change of resistance of an electrically-heated body G01N27/18) · CPC title
Investigating or analyzing materials by the use of thermal means (G01N3/00 - G01N23/00 take precedence) · CPC title
using thermoelectric elements, e.g. thermocouples · CPC title
Thermometers specially adapted for specific purposes · CPC title
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