Carbon nanotube device

Patent metadata

Field	Value
Publication number	US-11996261-B2
Application number	US-202217679652-A
Country	US
Kind code	B2
Filing date	Feb 24, 2022
Priority date	Jun 8, 2021
Publication date	May 28, 2024
Grant date	May 28, 2024

Abstract

A method for processing scanning electron microscope specimen is provided. The method comprises: providing a specimen to be observed; providing a carbon nanotube array comprising a plurality of carbon nanotubes; and pulling a carbon nanotube film from the carbon nanotube array, and laying the carbon nanotube film on a surface of the specimen, wherein the carbon nanotube film comprising a plurality of through holes.

First claim

What is claimed is:

1. A carbon nanotube device comprising:
a conductive substrate comprising a head and a handle, the head defining a through hole and comprising a surface surrounding the through hole; and
a carbon nanotube array only on the surface of the head, and not covering the through hole, wherein the carbon nanotube array comprises a plurality of carbon nanotubes substantially perpendicular to the surface of the head.

2. The device of claim 1 , wherein the head and the handle are made of a same conductive material.

3. The device of claim 1 , wherein a material of the conductive substrate is metal, alloy or conductive polymer.

4. The device of claim 1 , wherein the surface is a flat surface or a curved surface.

5. The device of claim 1 , wherein the carbon nanotube array is fixed to the surface of the head by a conductive glue.

6. The device of claim 1 , wherein the carbon nanotube array covers an entire surface of the head.

7. The device of claim 1 , wherein the plurality of carbon nanotubes in the carbon nanotube array are configured to contact a specimen to be observed.

8. The device of claim 7 , wherein one end of the plurality of carbon nanotube is in contact with the specimen, and the other end of the plurality of carbon nanotubes is electrically connected to the conductive head.

9. The device of claim 7 , wherein the through hole is configured to direct electron beams emitted by a scanning electron microscope through the through hole to the specimen.

10. The device of claim 1 , wherein the through hole penetrates the head and the carbon nanotube array.

11. A carbon nanotube device used in scanning electron microscope, comprising:
a conductive substrate comprising a head and a handle, the head defining a through hole and comprising a surface surrounding the through hole, wherein the through hole is configured to direct electron beams emitted by the scanning electron microscope through the through hole to a specimen; and
a carbon nanotube array located only on the surface of the head, not covering the through hole, wherein the carbon nanotube array comprises a plurality of carbon nanotubes substantially perpendicular to the surface of the head, a surface of the carbon nanotube array is configured to contact with the specimen.

12. The device of claim 11 , wherein one end of the plurality of carbon nanotube is in contact with the specimen, and the other end of the plurality of carbon nanotubes is electrically connected to the conductive head.

13. The device of claim 11 , wherein the through hole penetrates the head and the carbon nanotube array.

Assignees

• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Gao Xin-Yu
• Chen Guo
• Zhang Ke
• Cong Lin
• Jiang Kai-Li
• Fan Shou-Shan

Classifications

• H01J37/09 Primary

  Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/026 Primary

  Means for avoiding or neutralising unwanted electrical charges on tube components · CPC title

• H01J37/261

  Details · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title