Integrated measurement system

Patent metadata

Field	Value
Publication number	US-11994374-B2
Application number	US-201917309318-A
Country	US
Kind code	B2
Filing date	Nov 17, 2019
Priority date	Nov 19, 2018
Publication date	May 28, 2024
Grant date	May 28, 2024

Abstract

A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure. The measurement system comprises: a support assembly for holding a structure under measurements in a measurement plane, configured and operable for rotation in a plane parallel to the measurement plane and for movement along a first lateral axis in said measurement plane; an optical system defining illumination and collection light channels of normal and oblique optical schemes and comprising an optical head comprising at least three lens units located in the illumination and collection channels; a holder assembly comprising: a support unit for carrying the optical head, and a guiding unit for guiding a sliding movement of the support unit along a path extending along a second lateral axis perpendicular to said first lateral axis; and an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head at a certain distance from the measurement plane. The optical windows are aligned with the illumination and collection channels for, respectively, propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with the normal and oblique optical schemes.

First claim

We claim:

1. A measurement system configured for integration with a processing equipment for applying optical measurements to a structure, the measurement system comprising:
a support assembly for holding a structure under measurements in a measurement plane, the support assembly being configured and operable for rotation in a plane parallel to the measurement plane and for movement along a first lateral axis in said measurement plane;
an optical system defining illumination and collection light channels of normal and oblique optical schemes;
the optical system comprising an optical head comprising at least three lens units located in the illumination and collection channels;
a holder assembly comprising: a support unit for carrying the optical head, and a guiding unit configured and operable for guiding a sliding movement of the support unit along a path extending along a second lateral axis perpendicular to said first lateral axis;
and an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head at a certain distance from the measurement plane, the at least three optical windows being arranged in spaced-apart parallel relationship and extending parallel to said path, said at least three optical windows being aligned with the illumination and collection channels for, respectively, propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with said normal and oblique optical schemes.

2. The measurement system according to claim 1 , further comprising a controller configured and operable for controllably shifting the optical system operation between the normal and oblique optical schemes.

3. The measurement system according to claim 1 , wherein the optical system comprises a common illumination assembly optically coupled with the illumination channels of the normal and oblique optical schemes, and separate detection devices accommodated in the respective collection channels of the normal and oblique optical schemes.

4. The measurement system according to claim 1 , wherein the. optical head comprises at least three objective lens units located in, respectively, the normal and oblique optical schemes.

5. The measurement system according to claim 1 , wherein the at least three optical windows are configured to maintain polarization of light passing therethrough.

6. The measurement system according to claim 1 , wherein the faceplate has a planar facet in which a central one of the at least three optical windows is made, and two tilted side facets at opposite sides of the planar facet in which two other of the at least three optical windows are made, such that each of the at least three optical windows is located in a plane of 90 degrees orientation with respect to an optical axis of one of the least three lens units.

7. The measurement system according to claim 1 , wherein said support assembly is configured and operable by a driving mechanism to control a position of the measurement plane with the respect to the optical head.

8. The measurement system according to claim 7 , wherein said driving mechanism comprises a double-wedge engine.

9. The measurement system according to claim 1 , wherein the optical system comprises a polarizing assembly comprising at least one polarizer located in at least one of the illumination and collection channels.

10. The measurement system according to claim 9 , wherein the polarizer assembly is located within the optical head and comprises three polarizers located in, respectively, illumination and detection channels of the normal and oblique optical schemes.

11. The measurement system according to claim 1 , wherein each of the at least three optical windows has a length which is at least two orders of magnitude higher than (a) a maximal thickness of the optical window and (b) a minimal thickness of the window.

12. The measurement system according to claim 11 , wherein the maximal thickness of the optical window is two millimeters.

13. The measurement system according to claim 1 , wherein the light returned wherein each of the collection channels is configured for directing the light returned to spatially separated imaging and measurement channels.

14. The measurement system according to claim 13 , wherein each of the collection channels comprises a pinhole mirror device for spatially separating the collected light into imaging and measurement light portions and directing them to propagate through imaging and measurement channels.

15. The measurement system according to claim 14 , wherein said imaging and measurement channels are optically coupled to imaging and measurement detection devices.

16. The measurement system according to claim 15 , wherein the measurement channels of the normal and oblique optical schemes are optically coupled to a shared spectrometric detector.

17. The measurement system according to claim 1 , further comprising a navigation movement system configured and operable to drive rotational movement of the support assembly and the movements of the support assembly and the support unit of the holder assembly along said first and second lateral axes, respectively.

18. The measurement system according to claim 17 , wherein navigation movement system comprises a drive assembly configured and operable for driving the sliding movement of the support unit of the holder assembly along a guiding rail of the guiding unit.

19. The measurement system of claim 18 , wherein said drive assembly comprises a linear magnetic motor.

20. The measurement system according to claim 19 , wherein the linear magnetic motor comprises a movable magnet and a static coils assembly.

21. A measurement system configured for integration with a processing equipment for applying optical measurements to a structure, the measurement system comprising:
a support assembly defining a measurement plane for holding a structure under measurements in the measurement plane, the support assembly being configured and operable as an x-Theta stage;
an optical system configured with normal and oblique optical measurement schemes and comprising an optical head and light directing elements for directing incident light from a light source to the optical head and directing light collected by the optical head to a detection system;
a holder assembly configured and operable as a y-stage for guiding a sliding movement of the optical head along an y-axis; and
an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head and the measurement plane at a certain distance from the measurement plane, the at least three optical windows being arranged in spaced-apart parallel relationship and extending along the y-axis, providing propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with said normal and oblique optical measurement schemes of the optical head.

Assignees

• Nova Ltd

Inventors

• Dotan Elad
• Vanhotsker Moshe
• Yalov Shimon
• Deich Valery
• Ringel Roi
• Shulman Beni
• Bar On Yosi
• Bassan Shahar

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G01N21/88

  Investigating the presence of flaws or contamination · CPC title

• G01B11/00

  Measuring arrangements characterised by the use of optical techniques · CPC title

• G01N21/95 Primary

  characterised by the material or shape of the object to be examined (G01N21/89 - G01N21/91, G01N21/94 take precedence) · CPC title

• G03F7/706849

  Irradiation branch, e.g. optical system details, illumination mode or polarisation control · CPC title