Method and apparatus for filling a gap

Patent metadata

Field	Value
Publication number	US-11990333-B2
Application number	US-202318208398-A
Country	US
Kind code	B2
Filing date	Jun 12, 2023
Priority date	Jul 28, 2016
Publication date	May 21, 2024
Grant date	May 21, 2024

Abstract

There is provided a method of filling one or more gaps by providing the substrate in a reaction chamber and introducing a first reactant to the substrate with a first dose, thereby forming no more than about one monolayer by the first reactant on a first area; introducing a second reactant to the substrate with a second dose, thereby forming no more than about one monolayer by the second reactant on a second area of the surface, wherein the first and the second areas overlap in an overlap area where the first and second reactants react and leave an initially unreacted area where the first and the second areas do not overlap; and, introducing a third reactant to the substrate with a third dose, the third reactant reacting with the first or second reactant remaining on the initially unreacted area.

First claim

The invention claimed is:

1. A method of filling one or more gaps on a surface of a substrate, the method comprising:
introducing a first reactant to the substrate with a first dose on a first area of the surface of the one or more gaps;
introducing a second reactant to the substrate with a second dose on a second area of the surface of the one or more gaps; and
introducing a third reactant to the substrate with a third dose, the third reactant reacting with the first reactant in the first area or the second reactant in the second area,
wherein one of the first reactant and the second reactant comprise a potential growth reactant,
wherein the other of the first and second reactant is a low growth reactant, and
wherein a cyclical process including the third reactant reacting with the potential growth reactant is used to fill the one or more gaps.

2. The method according to claim 1 , wherein the method comprises removing any excess reactant and any byproduct after each step of introducing the first, the second, and the third reactant.

3. The method according to claim 1 , wherein the deposition method comprises atomic layer deposition.

4. The method according to claim 1 , wherein one of the first and the second reactants is introduced with a saturating dose and the other one of the first and second reactants is introduced with a subsaturating dose.

5. The method according to claim 1 , wherein the third reactant is formed using an oxygen plasma.

6. The method according to claim 1 , wherein the third reactant comprises a high growth reactant providing a relatively high growth in combination with the potential growth reactant.

7. The method according to claim 1 , wherein the third reactant is introduced with a saturating dose.

8. The method according to claim 1 , wherein the potential growth reactant comprises silicon.

9. The method according to claim 1 , wherein the potential growth reactant comprises silanediamine.

10. The method according to claim 9 , wherein the silanediamine comprises N,N,N′,N′-tetraethyl silanediamine.

11. The method according to claim 1 , wherein the low growth reactant comprises nitrogen.

12. The method according to claim 1 , wherein the low growth reactant is activated by a plasma.

13. The method according to claim 1 , wherein the third reactant comprises oxygen.

14. The method according to claim 1 , wherein the third reactant comprises one or more of ozone and hydrogen peroxide.

15. The method according to claim 1 , wherein the potential growth reactant comprises an organometal.

16. The method according to claim 15 , wherein the organometal comprises an organoaluminium.

17. The method according to claim 16 , wherein the organoaluminium comprises a trimethylaluminium.

18. A method of filling one or more gaps on a surface of a substrate, the method comprising:
introducing a first reactant to the substrate with a first dose on a first area of the surface of the one or more gaps;
introducing a second reactant to the substrate with a second dose on a second area of the surface of the one or more gaps, and
introducing a third reactant to the substrate with a third dose, the third reactant reacting with the first or second reactant remaining on an area on the first and the second areas,
wherein said one of the first and the second reactants is a potential growth reactant comprising an organometal, providing potential growth dependent on the other reactants, and wherein the other of said one of the first and the second reactants is a low growth reactant.

19. The method according to claim 18 , wherein the organometal comprises an organoaluminium.

20. The method according to claim 19 , wherein the organoaluminium comprises a trimethylaluminium.

Assignees

• Asm Ip Holding Bv

Inventors

• Pore Viljami
• Knaepen Werner
• Jongbloed Bert
• Pierreux Dieter
• Van Der Star Gido
• Suzuki Toshiya

Classifications

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6687

  the compound comprising silicon and nitrogen · CPC title

• H10P14/6682

  the compound being a silane, e.g. disilane, methylsilane or chlorosilane · CPC title