Liquid lithium supply and regulation

Patent metadata

Field	Value
Publication number	US-11987489-B2
Application number	US-202318120229-A
Country	US
Kind code	B2
Filing date	Mar 10, 2023
Priority date	Jun 29, 2018
Publication date	May 21, 2024
Grant date	May 21, 2024

Abstract

Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, method for flowing liquid lithium to a processing chamber is provided and includes flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, where the liquid lithium delivery module is fluidly coupled to the lithium refill container, and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.

First claim

The invention claimed is:

1. A method for flowing liquid lithium to a processing chamber, comprising:
flowing liquid lithium from a lithium refill container to a liquid lithium delivery module via a liquid lithium supply line, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container by the liquid lithium supply line;
flowing the liquid lithium through a first filter assembly downstream of the lithium refill container and upstream of the liquid lithium delivery module; and
flowing the liquid lithium from the liquid lithium delivery module to the processing chamber;
wherein the liquid lithium delivery module comprises:
a lithium storage region operable to store liquid lithium and comprises a liquid lithium storage tank having an outlet port;
a fluid supply line fluidly coupled downstream of the outlet port of the liquid lithium storage tank;
a second filter assembly positioned along the fluid supply line operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line;
a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line, wherein the second filter assembly is disposed upstream of the flow meter;
a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter;
a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber; and
a third filter assembly positioned along the fluid delivery line downstream of the flow meter and upstream of the processing chamber and operable to remove impurities from the flow of the liquid lithium flowing through the fluid delivery line.

2. The method of claim 1 , wherein the flow meter is an electromagnetic flow meter.

3. The method of claim 1 , wherein the flow meter is an ultrasonic flow meter.

4. The method of claim 1 , wherein the one or more valves comprises a regulator valve.

5. The method of claim 1 , wherein the one or more valves comprises a needle valve.

6. The method of claim 1 , wherein the second filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.

7. The method of claim 1 , wherein the first filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.

8. The method of claim 1 , further comprising controlling a temperature of the liquid lithium storage tank with a temperature control module.

9. The method of claim 8 , wherein the lithium storage region comprises the temperature control module, and wherein the temperature control module comprises a heat exchanger, a resistive heater, a temperature control jacket, or a combination thereof.

10. The method of claim 1 , wherein the liquid lithium storage tank comprises a canister, wherein the canister comprises:
a sidewall;
a top surface;
a bottom surface, wherein the sidewall, the top surface, and the bottom surface define an interior volume;
an inlet port disposed through the top surface of the canister and operable to provide an inert gas to the interior volume of the canister; and
the outlet port disposed through the top surface of the canister and operable to allow the liquid lithium to flow out of the canister.

11. A method for flowing liquid lithium to a processing chamber, comprising:
flowing liquid lithium from a lithium refill container through a liquid lithium supply line and to a liquid lithium delivery module, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container;
removing impurities from the flow of the liquid lithium flowing through the liquid lithium supply line via a first filter assembly positioned along the liquid lithium supply line; and
flowing the liquid lithium from the liquid lithium delivery module to the processing chamber;
wherein the liquid lithium delivery module comprises:
a lithium storage region operable to store liquid lithium, wherein the lithium storage region comprises a liquid lithium storage tank having an outlet port, and wherein the first filter assembly is positioned upstream of the lithium storage region;
a fluid supply line fluidly coupled downstream of the outlet port of the liquid lithium storage tank;
a second filter assembly positioned along the fluid supply line operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line;
a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line, wherein the second filter assembly is disposed upstream of the flow meter;
a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter;
a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber; and
a third filter assembly positioned along the fluid delivery line downstream of the flow meter and upstream of the processing chamber and operable to remove impurities from the flow of the liquid lithium flowing through the fluid delivery line.

12. The method of claim 11 , further comprising removing contaminants from the liquid lithium with the second filter assembly comprising a metal mesh filter.

13. The method of claim 11 , further comprising removing contaminants from the liquid lithium with the third filter assembly comprising a metal mesh filter.

14. The method of claim 11 , wherein the first filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.

15. The method of claim 11 , wherein the flow meter is an electromagnetic flow meter, and wherein the one or more valves comprises a regulator valve.

16. A method for flowing liquid lithium to a processing chamber, comprising:
flowing liquid lithium from a lithium refill container to a liquid lithium delivery module via a liquid lithium supply line, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container by the liquid lithium supply line;
flowing the liquid lithium through a first filter assembly downstream of the lithium refill container and upstream of the liquid lithium delivery module; and
flowing the liquid lithium from the liquid lithium delivery module to the processing chamber;
wherein the liquid lithium delivery module comprises:
a lithium storage region operable to store liquid lithium, wherein the lithium storage region comprises a liquid lithium storage tank having an outlet port;
a fluid supply line fluidly coupling the outlet port of the liquid lithium storage tank;
a second filter assembly positioned along the fluid supply line downstream of the lithium storage region and operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line;
a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line, wherein the flow meter is an electromagnetic flow meter or an ultrasonic flow meter;
a flow control region operable to control a flow of the liquid lithium, comprising

Assignees

• Applied Materials Inc

Inventors

• Delmas Jean
• Frey Bernard

Classifications

• B67D7/02 Primary

  for transferring liquids other than fuel or lubricants · CPC title

• B65D88/748

  for tank containers · CPC title

• B67D7/16

  Arrangements of liquid meters · CPC title

• B67D7/32

  Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid · CPC title

• B67D7/3272

  using pumps · CPC title