Liquid lithium supply and regulation

Patent metadata

Field	Value
Publication number	US-2020002153-A1
Application number	US-201916445327-A
Country	US
Kind code	A1
Filing date	Jun 19, 2019
Priority date	Jun 29, 2018
Publication date	Jan 2, 2020
Grant date	—

Abstract

Methods and systems for the production and delivery of lithium metal of high purity are provided. More particularly, methods and systems for lithium metal purification, delivery and deposition are provided. In at least one aspect, a liquid lithium delivery system is provided. The liquid lithium delivery system comprises a liquid lithium delivery module. The liquid lithium delivery system comprises a lithium storage region operable to store the liquid lithium, a pumping region operable to move liquid lithium through the lithium delivery, and a flow control region. The pumping region comprises an electromagnetic pump operable to move the liquid lithium using electromagnetism. The flow control region operable to control the flow of liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the pumping region is positioned downstream from the lithium storage region and upstream from the flow control region.

First claim

1 . A liquid lithium delivery system, comprising:
a liquid lithium delivery module, comprising:
a lithium storage region operable to store liquid lithium;
a pumping region operable to move liquid lithium through the liquid lithium delivery module, comprising:
an electromagnetic pump operable to move the liquid lithium using electromagnetism; and

a flow control region operable to control a flow of liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the pumping region is positioned downstream from the lithium storage region and upstream from the flow control region.

2 . The liquid lithium delivery system of claim 1 , wherein the lithium storage region comprises:
a liquid lithium storage tank operable to store the liquid lithium; and a temperature control module, which is adapted to control a temperature of the liquid lithium storage tank.

3 . The liquid lithium delivery system of claim 2 , wherein the temperature control module comprises a heat exchanger, a resistive heater, a temperature control jacket, or a combination thereof.

4 . The liquid lithium delivery system of claim 2 , wherein the liquid lithium storage tank comprises:
a canister having:
a sidewall;
a top surface; and
a bottom surface, wherein the sidewall, the top surface and the bottom surface define an interior volume;
an inlet port disposed through the top surface of the canister and operable to provide an inert gas to the interior volume of the canister; and
an outlet port disposed through the top surface of the canister and operable to allow liquid lithium to flow out of the canister.

5 . The liquid lithium delivery system of claim 1 , wherein the pumping region comprises a flow meter operable to monitor the flow of the liquid lithium through the pumping region.

6 . The liquid lithium delivery system of claim 5 , wherein the flow meter is positioned downstream from the electromagnetic pump.

7 . The liquid lithium delivery system of claim 1 , further comprising:
a liquid lithium supply line that fluidly couples the liquid lithium storage tank with the electromagnetic pump; and a filter assembly positioned along the liquid lithium supply line operable to remove impurities from the flow of the liquid lithium flowing through the liquid lithium supply line.

8 . The liquid lithium delivery system of claim 7 , wherein the filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.

9 . The liquid lithium delivery system of claim 1 , wherein the one or more valves comprise a needle valve.

10 . The liquid lithium delivery system of claim 9 , wherein the one or more valves further comprise a regulator valve.

11 . The liquid lithium delivery system of claim 1 , further comprising:
a fluid delivery line that fluidly couples the flow control region with a processing chamber; and a filter assembly positioned along the fluid delivery line operable to remove impurities from the liquid lithium flowing through the fluid delivery line.

12 . A liquid lithium delivery system, comprising:
a liquid lithium delivery module, comprising:
a lithium storage region operable to store liquid lithium;
a pumping region operable to move the liquid lithium through the liquid lithium delivery module, comprising:
an electromagnetic pump operable to move the liquid lithium using electromagnetism; and

a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the pumping region is positioned downstream from the lithium storage region and upstream from the flow control region; and
a liquid lithium resupply module detachably and fluidly coupled with the liquid lithium delivery module, comprising:
a liquid lithium resupply tank operable to supply liquid lithium to the liquid lithium delivery module; and
a first temperature control module, which is adapted to control a temperature of the liquid lithium resupply tank.

13 . The liquid lithium delivery system of claim 12 , wherein the first temperature control module comprises a heat exchanger, a resistive heater, a temperature control jacket, or a combination thereof.

14 . The liquid lithium delivery system of claim 12 , wherein the liquid lithium resupply tank comprises:
a canister having:
a sidewall;
a top surface; and
a bottom surface, wherein the sidewall, the top surface and the bottom surface define an interior volume;
an inlet port disposed through the top surface of the canister and operable to provide an inert gas to the interior volume of the canister; and
an outlet port disposed through the top surface of the canister and operable to allow the liquid lithium to flow out of the canister and into the liquid lithium delivery module.

15 . The liquid lithium delivery system of claim 14 , wherein the inlet port is fluidly coupled with an inert gas source.

16 . A liquid lithium delivery system, comprising:
a liquid lithium delivery module, comprising:
a lithium storage region operable to store liquid lithium;
a pumping region operable to move the liquid lithium through the liquid lithium delivery module, comprising:
an electromagnetic pump operable to move the liquid lithium using electromagnetism; and

a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the pumping region is positioned downstream from the lithium storage region and upstream from the flow control region; and
a liquid lithium resupply module detachably and fluidly coupled with the liquid lithium delivery module, comprising:
a liquid lithium resupply tank operable to supply liquid lithium to the liquid lithium delivery module; and
a first temperature control module, which is adapted to control a temperature of the liquid lithium resupply tank;
a liquid lithium supply line that fluidly couples the liquid lithium resupply tank with the liquid lithium delivery module; and a filter assembly positioned along the liquid lithium supply line operable to remove impurities from the lithium liquid flowing through the liquid lithium supply line.

17 . The liquid lithium delivery system of claim 16 , wherein the filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.

18 . The liquid lithium delivery system of claim 16 , wherein the lithium storage region comprises:
a liquid lithium storage tank operable to store the liquid lithium; and a second temperature control module, which is operable to control the temperature of the liquid lithium storage tank.

19 . The liquid lithium delivery system of claim 18 , wherein the second temperature control module comprises a heat exchanger, a resistive heater, a temperature control jacket, or a combination thereof.

20 . The liquid lithium delivery system of claim 18 , wherein the liquid lithium storage tank comprises:
a canister having:
a sidewall;
a top surface; and
a bottom surface, wherein the sidewall, the top surface and the bottom surface define an interior volume;
an inlet port disposed through the top surface of the canister and operable to provide an inert gas to the interior volume of the canister; and
an outlet port disposed through the top surface of the canister and operable to allow liquid lithium to flow out of the canister.

Assignees

• Applied Materials Inc

Inventors

• Delmas Jean
• Frey Bernard

Classifications

• F27D27/00

  Stirring devices for molten material (charging or discharging liquid or molten material F27D3/14) · CPC title

• F27D3/14

  Charging or discharging liquid or molten material · CPC title

• H05B1/0247

  For chemical processes · CPC title

• B67D7/32

  Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid · CPC title

• B67D7/76

  Arrangements of devices for purifying liquids to be transferred, e.g. of filters, of air or water separators · CPC title