Conformal thin film of precious metal on a support
US-9979028-B2 · May 22, 2018 · US
US11973233B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11973233-B2 |
| Application number | US-202017784614-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2020 |
| Priority date | Jun 13, 2017 |
| Publication date | Apr 30, 2024 |
| Grant date | Apr 30, 2024 |
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A catalyst structure includes: (1) a substrate; (2) a catalyst layer on the substrate; and (3) an adhesion layer disposed between the substrate and the catalyst layer. In some implementations, an average thickness of the adhesion layer is about 1 nm or less. In some implementations, a material of the catalyst layer at least partially extends into a region of the adhesion layer. In some implementations, the catalyst layer is characterized by a lattice strain imparted by the adhesion layer.
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What is claimed is: 1. A catalyst structure comprising: a substrate; a template layer on the substrate; and a catalyst layer on the template layer, wherein the catalyst layer includes discrete regions that are spaced apart from one another, and at least one of the discrete regions includes a first portion that is bonded to the substrate or bonded to a region of the template layer between the first portion and the substrate and a second portion that extends over the substrate and is spaced apart from the substrate by a void. 2. The catalyst structure of claim 1 , wherein the catalyst layer includes a platinum group metal. 3. The catalyst structure of claim 1 , further comprising an over-layer on the catalyst layer. 4. The catalyst structure of claim 3 , wherein an average thickness of the over-layer is 1 nm or less. 5. The catalyst structure of claim 3 , wherein the over-layer provides partial surface coverage of the catalyst layer. 6. The catalyst structure of claim 3 , wherein the catalyst layer includes a platinum group metal, and the over-layer includes an alloy of the platinum group metal and a material of the over-layer. 7. A method of forming a catalyst structure, the method comprising: depositing a template layer on a substrate to yield a template layer-coated substrate; depositing a catalyst layer on the template layer-coated substrate by atomic layer deposition to yield a catalyst-coated substrate; partially removing the template layer after depositing the catalyst layer, wherein the catalyst layer includes discrete regions that are spaced apart from one another, and at least one of the discrete regions includes: a first portion that is bonded to a region of the substrate or bonded to a region of the template layer between the first portion of the catalyst layer and the substrate; and a second portion that extends over the substrate and is spaced apart from the substrate by a void. 8. The method of claim 7 , wherein partially removing the template layer imparts strain to the catalyst layer. 9. The method of claim 7 , further comprising functionalizing the substrate before depositing the template layer. 10. The method of claim 7 , wherein depositing the template layer on the substrate is performed by atomic layer deposition. 11. The method of claim 7 , wherein the template layer comprises a metal oxide or metalloid oxide. 12. The method of claim 11 , wherein the template layer comprises cobalt oxide, nickel oxide, or cerium oxide. 13. The method of claim 7 , wherein the template layer comprises discrete regions spaced apart from one another to expose the substrate. 14. The method of claim 7 , wherein the template layer provides a surface coverage of the substrate of up to about 80%. 15. The method of claim 7 , wherein the template layer has an average thickness of about 3 nm or less. 16. The method of claim 7 , further comprising, after depositing the template layer and before depositing the catalyst layer, functionalizing the template layer. 17. The method of claim 7 , wherein the catalyst layer provides a surface coverage of the template layer-coated substrate of up to about 90%. 18. The method of claim 7 , wherein the catalyst layer has an average thickness of 8 nm or less. 19. The method of claim 7 , wherein partially removing the template layer is performed by exposing the catalyst-coated template layer to a solution in which the template layer has a greater solubility than the catalyst layer. 20. The method of claim 7 , wherein the catalyst layer comprises a platinum group metal.
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