Device for fabricating quartz microfluidic chip by femtosecond pulse cluster

Patent metadata

Field	Value
Publication number	US-11964340-B2
Application number	US-202117528710-A
Country	US
Kind code	B2
Filing date	Nov 17, 2021
Priority date	Nov 17, 2020
Publication date	Apr 23, 2024
Grant date	Apr 23, 2024

Abstract

A device for fabricating a quartz microfluidic chip by a femtosecond pulse cluster. The device includes: a femtosecond pulse cluster laser source configured to output a femtosecond pulse cluster; a beam splitting and interference system, configured to split the femtosecond pulse cluster into a plurality of parts, and to converge split parts to form a femtosecond pulse cluster plasma or a femtosecond pulse cluster plasma grating; a sample system configured to move the electronic displacement platform where a quartz glass is placed to control a position where the parts of the femtosecond pulse cluster are converged on the quartz glass; and a hydrofluoric acid immersion system configured to immerse the quartz glass in a diluent hydrofluoric acid solution to remove an ablated part of the quartz glass to form the quartz microfluidic chip.

First claim

What is claimed is:

1. A device for fabricating a quartz microfluidic chip by a femtosecond pulse cluster, including:
a femtosecond pulse cluster laser source, configured to output a femtosecond pulse cluster;
a beam splitting and interference system, comprising a beam splitting device, a time domain adjustment controller and a convergent lens, and configured to split the femtosecond pulse cluster into a plurality of parts by the beam splitting device, and to converge split parts by the convergent lens to form a femtosecond pulse cluster plasma grating;
a sample system comprising an imaging device, a quartz glass, and a three-dimensional electronic displacement platform, wherein the quartz glass is placed on the electronic displacement platform, and the electronic displacement platform is movable to control a position where the parts of the femtosecond pulse cluster are converged on the quartz glass to ablate the quartz glass to form a micro-channel structure inside the quartz glass and/or on a surface of the quartz glass; and
a hydrofluoric acid immersion system, configured to immerse the quartz glass in a diluent hydrofluoric acid solution to remove an ablated part of the quartz glass to form the quartz microfluidic chip;
wherein the femtosecond pulse cluster laser source comprises:
an optical fiber seed source, configured to output a pulse train having a repetition frequency f and a time domain interval τ s =1/f;
a first electro-optic modulator, configured to perform modulations of frequency lowering and pulse number selecting to obtain a first pulse cluster having a repetition frequency f R ;
an optical fiber regeneration and amplification resonant cavity configured to regenerate and amplify the first pulse cluster;
a second electro-optic modulator, configured to shape the regenerated and amplified first pulse cluster to obtain a second pulse cluster having the repetition frequency f R and a time interval r represented by |L s −L a |(n·c), where L s represents a cavity length of the optical fiber seed source, L a represents a cavity length of the optical fiber regeneration and amplification resonant cavity, n represents an average refractive index of a fiber core, and c represents a light speed in vacuum;
an optical fiber amplifier, configured to amplify the second pulse cluster; and
a pulse width compression module, configured to perform a pulse compression to the amplified second pulse cluster.

2. The device according to claim 1 , wherein the beam splitting device is one or more beam splitters, a combination of a half-wave filter and a polarization beam splitting prism, a microarray reflector, or a diffractive beam splitting element.

3. The device according to claim 1 , wherein the time domain adjustment controller comprises a linear electronic displacement platform and a reflector and the time domain adjustment controller is configured to change an optical path of the femtosecond pulse cluster.

4. The device according to claim 1 , wherein the imaging device comprises a telescope system comprising a first convex lens, a second convex lens, and a CCD camera, wherein the first convex lens is placed in a cross section of the optical axis, and has a focal point coinciding with a focal point of the convergent lens, and the CCD camera is placed at a focal point of the second convex lens.

5. The device according to claim 1 , wherein the hydrofluoric acid immersion system comprises an ultrasonic cleaner containing the diluent hydrofluoric acid solution.

6. The device according to claim 1 , wherein the femtosecond pulse cluster laser source comprises an optical fiber laser or a solid-state laser, and the femtosecond pulse cluster from the femtosecond pulse cluster laser source is a femtosecond pulse or a picosecond pulse.

7. The device according to claim 1 , wherein the optical fiber seed source is a mode-locked fiber laser, comprising a semiconductor laser pump, an optical fiber coupler, a gain fiber, an isolator, a polarization controller and a repetition frequency locking module.

8. The device according to claim 7 , wherein the repetition frequency locking module comprises a fiber circulator, a collimator, an end reflector, a phase-locked loop, a signal generator and a linear electronic displacement platform.

9. The device according to claim 1 , wherein the fiber regeneration and amplification resonant cavity comprises a semiconductor laser pump, an optical fiber coupler, a gain fiber, an isolator, a polarization controller and a cavity length adjustment module, wherein the cavity length adjustment module comprise an optical fiber circulator, a collimator, an end reflector and a linear electronic displacement platform.

10. The device according to claim 1 , wherein the second electro-optic modulator is triggered by a falling edge of a gate voltage of the first electro-optic modulator.

11. The device according to claim 1 , wherein the optical fiber amplifier comprises a semiconductor laser pump, an optical fiber coupler, a gain fiber, an isolator, and an optical fiber collimator and a pulse compression module, wherein the pulse compression module comprises a pair of transmission gratings and an end reflector.

Assignees

• Chongqing Institute Of East China Normal Univ
• Roi Optoelectronics Tech Co Ltd
• Univ East China Normal

Inventors

• Zeng Heping
• Nan Junyi
• Hu Mengyun

Classifications

• B23K26/0624 Primary

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/0622

  by shaping pulses · CPC title

• B23K26/0648

  comprising lenses · CPC title

• B23K26/0652

  comprising prisms · CPC title

• B23K26/067

  Dividing the beam into multiple beams, e.g. multi-focusing · CPC title