Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating

Patent metadata

Field	Value
Publication number	US-11370657-B2
Application number	US-202117230237-A
Country	US
Kind code	B2
Filing date	Apr 14, 2021
Priority date	Apr 15, 2020
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.

First claim

What is claimed is:

1. An apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating, wherein the apparatus comprises a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell;
the plasma grating optical path comprises a femtosecond pulse laser, an optical splitter, a first time domain delay controller, a second time domain delay controller, a first reflected laser beam, a second reflected laser beam, a transmitted laser beam, a first displacement platform, a second displacement platform, a first plano-convex cylindrical lens, a second plano-convex cylindrical lens, a first diaphragm, a second diaphragm, a plano-convex circular lens, and a plurality of planar mirrors;
the microchannel processing platform comprises quartz glass, a three-dimensional electronically controlled displacement platform, a first convex lens, a second convex lens, a third convex lens, a fourth convex lens, a first CCD camera, and a second CCD camera;
the optical splitter is configured as a combination of a half-wavelength wave plate and a polarization beam splitter, or as a microarray mirror, a single planar beam splitter, or a plurality of planar beam splitters;
the first time domain delay controller comprises a fourth planar mirror, a fifth planar mirror, and the first displacement platform, and is configured to control an optical path difference between the reflected laser beam and the transmitted laser beam;
the second time domain delay controller comprises a ninth planar mirror, a tenth planar mirror and the second displacement platform, and is configured to control an optical path difference between the reflected laser beam and the transmitted laser beam; and
the first and second diaphragms are rectangular or circular, and configured to constrain a size of a light spot passing through the diaphragms and control a number and distribution of optical filaments in the plasma grating.

2. The apparatus according to claim 1 , wherein femtosecond pulse laser output from the femtosecond pulse laser in the plasma grating optical path is split into two or more laser beams with similar power after passing through the optical splitter; the split laser beams each pass through a converging lens after passing through the time domain delay controllers, and converge together in the quartz glass, with focal points of the laser beams coinciding in the quartz glass and a certain included angle between incident laser beams; when the laser beams are synchronized in the time domain, interference occurs in the quartz glass, and a series of equally spaced optical filaments are formed in the quartz glass; one diaphragm is placed between the converging lens and the focal point of each laser beam and configured to constrain a diameter of the laser beam; and
the femtosecond pulse laser comprises a pulse time-domain shaping module; the femtosecond pulse laser is configured to output Gaussian-distributed pulse laser, rectangularly-distributed pulse laser, semi-circularly-distributed pulse laser, triangularly-distributed pulse laser or raised cosine-distributed pulse laser by setting time-domain pulse shaping parameters, and generate plasma optical filaments distributed in different spaces by using pulse laser distributed in different time domains; a length of the plasma optical filament is adjusted by the optical power and a focal length of a focusing lens, and ranges from micrometers to centimeters; and an interval between the plasma optical filaments is adjusted by a wavelength of the femtosecond pulse laser and the included angle between the interfering laser beams, and ranges from hundred nanometers to micrometers.

3. The apparatus according to claim 1 , wherein the first CCD camera, the first convex lens, the second convex lens, the second CCD camera, the third convex lens, and the fourth convex lens form an imaging device for monitoring a process of laser processing of the microchannel; a telescope system formed by the first convex lens and the second convex lens and a telescope system formed by the third convex lens and the fourth convex lens are arranged in two orthogonal directions of a cross section of an optical axis; the first CCD camera is arranged at a focal point of the second convex lens; and the second CCD camera is arranged at a focal point of the fourth convex lens.

4. The apparatus according to claim 1 , wherein the quartz glass is arranged on the three-dimensional electronically controlled displacement platform, a length and number of the optical filaments in the plasma grating are adjusted at a focal point of a converging lens, the three-dimensional electronically controlled displacement platform is coordinately controlled, and a microchannel structure is ablated in the quartz glass; an imaging device is configured to observe a shape of the plasma grating in the quartz glass in real time; and the converging lens is a circular lens, a plano-convex cylindrical lens, a microlens array or a conical lens.

5. The apparatus according to claim 1 , wherein a hydrofluoric acid solution in the hydrofluoric acid ultrasonic cell infiltrates the quartz glass by using ultrasound and corrodes a path of laser ablation in the quartz glass to form a microchannel structure, and the microfluidic chip made of the quartz glass is obtained; and the microchannel structure has a three-dimensional distribution on a surface of the quartz glass or within the quartz glass.

Assignees

• Chongqing Institute Of East China Normal Univ
• Roi Optoelectronics Tech Co Ltd
• Univ East China Normal

Inventors

• Zeng Heping
• Nan Junyi
• Hu Mengyun
• Yan Ming

Classifications

• G01J3/26

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• B23K26/53 Primary

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title

• B81C2201/0133

  Wet etching · CPC title

• B23K26/0676

  into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations · CPC title

• B81C1/00071 Primary

  Channels · CPC title