Wet bench structure

Patent metadata

Field	Value
Publication number	US-11961745-B2
Application number	US-202217866908-A
Country	US
Kind code	B2
Filing date	Jul 18, 2022
Priority date	Jun 29, 2018
Publication date	Apr 16, 2024
Grant date	Apr 16, 2024

Abstract

The present disclosure describes an apparatus for processing one or more objects. The apparatus includes a carrier configured to hold the one or more objects, a tank filled with a processing agent and configured to receive the carrier, and a spinning portion configured to contact the one or more objects and to spin the one or more objects to disturb a flow field of the processing agent.

First claim

What is claimed is:

1. An apparatus, comprising:
a carrier configured to hold a plurality of objects, wherein the carrier comprises a handle and one or more lifting portions;
a tank configured to receive the carrier, wherein the tank holds a processing agent;
a first roller configured to rotate a first sub-roller in contact with a first object of the plurality of objects and configured to spin the first object at a first speed;
a second roller configured to rotate a second sub-roller in contact with a second object of the plurality of objects and configured to simultaneously spin the second object at a second speed different from the first speed, wherein:
the first roller is attached to a first sidewall of the tank and the second roller is attached to a second sidewall of the tank, and

the first sub-roller and the second sub-roller are detached from each other; and
a control device programmed to simultaneously rotate the first object at the first speed and the second object at the second speed.

2. The apparatus of claim 1 , further comprising a third roller and a fourth roller attached to the one or more lifting portions, wherein the third roller and fourth roller are configured to contact an edge of the plurality of objects.

3. The apparatus of claim 1 , wherein the first sub-roller and the second sub-roller are configured to spin in different directions.

4. The apparatus of claim 2 , wherein the third roller comprises a third sub-roller and the fourth roller comprises a fourth sub-roller, wherein the third sub-roller and the fourth sub-roller are detached from each other.

5. The apparatus of claim 1 , further comprising a fan or a propeller configured to disturb a flow field of the processing agent.

6. The apparatus of claim 1 , wherein the one or more lifting portions comprise a plurality of grooves, wherein the plurality of objects are configured to be positioned in the plurality of grooves.

7. The apparatus of claim 1 , further comprising an inlet configured to supply the processing agent to the tank in a first circular direction, and wherein the first sub-roller is configured to spin the first object of the plurality of objects in the first circular direction and the second sub-roller is configured to spin the second object of the plurality of objects in a second circular direction opposite to the first circular direction.

8. An apparatus, comprising:
a carrier configured to hold a plurality of objects, wherein the carrier comprises a handle and one or more lifting portions;
a tank configured to hold a processing agent and to receive the carrier, wherein a top portion of the handle is configured to be above a top level of the processing agent;
a first roller attached to a first sidewall of the tank and configured to spin the plurality of objects based on a control signal, wherein the first roller is configured to rotate a first sub-roller in contact with a first object of the plurality of objects
a second roller attached to a second sidewall of the tank and configured to spin a second object of the plurality of objects based on the control signal, wherein the second roller is configured to rotate a second sub-roller in contact with the second object of the plurality of objects; and
a computing device programmed to generate the control signal for simultaneously rotating the first roller and the second roller, wherein the control signal comprises a first spin speed and a first spin direction for the first object of the plurality of objects and a second spin speed and a second spin direction for the second object of the plurality of objects, and wherein the first spin speed is different from the second spin speed.

9. The apparatus of claim 8 , wherein the first sub-roller and the second sub-roller are configured to contact a side edge of the plurality of objects.

10. The apparatus of claim 8 further comprising another roller attached to one of the one or more lifting portions.

11. The apparatus of claim 8 , wherein the first sub-roller and the second sub-roller are attached to the first roller and the second roller respectively, and configured to extend along a direction that the plurality of objects are aligned.

12. The apparatus of claim 8 , wherein the first sub roller is in contact with an edge of a first object of the plurality of objects and the second sub roller is in contact with an edge of a second object of the plurality of objects, and wherein the first sub-roller is laterally aligned to and disconnected from the second sub-roller.

13. The apparatus of claim 12 , wherein the first sub-roller is configured to spin the first object at the first spin speed and in the first spin direction, and wherein the second sub-roller is configured to spin the second object at the second spin speed and in the second spin direction different from the first spin direction.

14. A system, comprising:
a carrier configured to hold a plurality of objects;
a wet bench tank comprising a processing agent, wherein the processing agent covers a surface of the plurality of objects;
a first roller attached to a first sidewall of the wet bench tank and configured to rotate a first sub-roller, wherein the first sub-roller is configured to rotate a first object of the plurality of objects at a first speed;
a second roller attached to a second sidewall of the wet bench tank and configured to rotate a second sub-roller, wherein the second sub-roller is configured to rotate a second object of the plurality of objects at a second speed; and
a control device programmed to simultaneously rotate the first object of the plurality of objects at the first speed and the second object of the plurality of objects at the second speed, wherein the first speed is different from the second speed.

15. The system of claim 14 , wherein the first sub-roller is configured to spin the first object of the plurality of objects and the second sub-roller is configured to spin the second object of the plurality of objects in the carrier in opposite directions.

16. The system of claim 14 , wherein the first sub-roller and the second sub-roller are configured to contact the plurality of objects along a direction that the plurality of objects are aligned.

17. The system of claim 16 , wherein the first sub-roller is configured to not spin the first object of the plurality of objects and the second sub-roller is configured to spin the second object of the plurality of objects at a non-zero speed.

18. The system of claim 14 , wherein the first sub-roller and the second sub-roller are configured to contact and to spin the plurality of objects in a plurality of directions.

19. The system of claim 14 , wherein the first sub-roller and the second sub-roller are configured to spin the plurality of objects at a speed based on an afflux speed of the processing agent.

20. The system of claim 14 , wherein the first sub-roller and the second sub-roller are configured to spin the plurality of objects at a speed based on a size of the plurality of objects, a position of the plurality of objects in the carrier, and a flow field of the processing agent.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lin Chung-Yu
• Kuo Shih-Chi
• Mo Chun-Chieh

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0426 Primary

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• H10P72/155

  characterised by a material, a roughness, a coating or the like · CPC title

• H10P70/15

  by wet cleaning only (H10P70/52 takes precedence) · CPC title