Spin chuck jig and method of lifting spin chuck using the same

Patent metadata

Field	Value
Publication number	US-11958071-B2
Application number	US-202017015052-A
Country	US
Kind code	B2
Filing date	Sep 8, 2020
Priority date	Jul 26, 2018
Publication date	Apr 16, 2024
Grant date	Apr 16, 2024

Abstract

A spin chuck jig includes a handle having first holes, a base having second holes, wherein a number of the second holes and a number of first holes are the same, and bolts each penetrating one of the first holes and one of the second holes so that the handle and the base are attached to a spin chuck to be lifted from a spin process equipment.

First claim

What is claimed is:

1. A method of lifting a spin chuck from a spin process equipment, the method comprising:
inserting a base having a plurality of first holes into a recessed region of the spin chuck;
placing a handle having a plurality of second holes on a top surface of the base;
inserting one of a plurality of bolts into a corresponding one of the plurality of first holes, into one of a plurality of bolt receptors of the spin chuck, and a corresponding one of the plurality of second holes to attach the base and the handle to the spin chuck; and
lifting the spin chuck using the handle.

2. The method of claim 1 ,
wherein the inserting of the base includes:
aligning one of the plurality of first holes to a corresponding one of a plurality of bolt receptors of the spin chuck, and
wherein the plurality of bolt receptors are on an inner sidewall of the recessed region of the spin chuck.

3. The method of claim 1 ,
wherein the placing of the handle includes:
aligning one of the plurality of second holes to one of the plurality of first holes.

4. The method of claim 1 ,
wherein the spin process equipment performs a wet cleaning process or a wet etch process on a wafer.

5. The method of claim 1 ,
wherein a number of the plurality of first holes and a number of a plurality of bolt receptors of the spin chuck are the same; and
wherein a number of the plurality of second holes and a number of the plurality of first holes are the same.

6. The method of claim 1 ,
wherein a length of one of the plurality of bolts is such that inserting the one of the plurality of bolts into the corresponding one of the plurality of first holes and the corresponding one of the plurality of second holes to attach the base and the handle to the spin chuck contacts the one of the plurality of bolts simultaneously with the corresponding one of the plurality of first holes, the corresponding one of the plurality of second holes, and a corresponding one of a plurality of bolt receptors of the spin chuck.

7. The method of claim 1 ,
wherein before inserting the base, releasing the spin chuck from a rotating shaft able to rotate the spin chuck.

8. The method of claim 1 ,
wherein the inserting of the base includes:
aligning one of the plurality of first holes to a corresponding one of a plurality of bolt receptors of the spin chuck; and
wherein the placing of the handle includes:
aligning one of the plurality of second holes to the corresponding one of the plurality of first holes.

9. The method of claim 1 ,
wherein a length of one of the plurality of bolts is such that during inserting the one of the plurality of bolts, the one of the plurality of bolts simultaneously contacts the corresponding one of the plurality of first holes, the corresponding one of the plurality of second holes, and the corresponding one of the plurality of bolt receptors of the spin chuck.

10. A method of lifting a spin chuck from a spin process equipment, the method comprising:
inserting a base having a plurality of first holes into a recessed region of the spin chuck, the recessed region including a plurality of bolt receptors arranged within;
placing a handle having a plurality of second holes on a top surface of the base, wherein a number of the plurality of second holes and a number of the bolt receptors are the same;
inserting one of a plurality of bolts into a corresponding one of the plurality of first holes and a corresponding one of the plurality of second holes to attach the base and the handle to the spin chuck,
wherein a length of one of the plurality of bolts is sufficiently long to penetrate the corresponding one of the plurality of first holes, the corresponding one of the plurality of second holes, and a corresponding one of the plurality of bolt receptors; and
lifting the spin chuck using the handle.

11. The method of claim 10 ,
wherein the inserting of the base includes:
aligning one of the plurality of first holes to the corresponding one of the plurality of bolt receptors of the spin chuck, and
wherein the plurality of bolt receptors are on an inner sidewall of the recessed region of the spin chuck.

12. The method of claim 10 ,
wherein the placing of the handle includes:
aligning one of the plurality of second holes to the corresponding one of the plurality of first holes.

13. The method of claim 10 ,
wherein before inserting the base, releasing the spin chuck from a rotating shaft able to rotate the spin chuck.

14. The method of claim 10 ,
wherein the inserting of the base includes:
aligning one of the plurality of first holes to the corresponding one of a plurality of bolt receptors of the spin chuck;
wherein the placing of the handle includes:
aligning one of the plurality of second holes to the corresponding one the plurality of first holes; and
wherein the inserting of one of the plurality of bolts includes:
inserting one of the plurality of bolts into the corresponding one of the plurality of bolt receptors of the spin chuck.

15. The method of claim 14 ,
wherein aligning the plurality of first holes includes:
rotating the base until one of the plurality of first holes align with the corresponding one of the plurality of bolt receptors of the spin chuck.

16. The method of claim 10 ,
wherein the inserting one of the plurality of bolts includes:
screwing one of the plurality of bolts into the corresponding one of the plurality of first holes, the corresponding one of the plurality of second holes, and the corresponding one of the plurality of bolt receptors of the spin chuck until the handle and base securely attach to the spin chuck.

17. The method of claim 10 ,
wherein the inserting of the base includes:
aligning the plurality of first holes to the plurality of bolt receptors of the spin chuck, and
wherein the placing of the handle includes:
aligning the plurality of second holes to the plurality of first holes.

18. A method of lifting a spin chuck from a spin process equipment, the method comprising:
releasing the spin chuck from a supporting rotating shaft;
inserting a base having at least one first hole into a recessed region of the spin chuck;
placing a handle having at least one second hole on a top surface of the base;
aligning one of the at least one first hole and a corresponding one of the at least one second hole;
inserting at least one bolt into the one of the at least one first hole and the corresponding one of the at least one second hole to attach the base and the handle to the spin chuck,
wherein the at least one bolt penetrates the one of the at least one first hole, the corresponding one of the at least one second hole, and a corresponding one of at least one bolt receptor simultaneously; and
lifting the spin chuck using the handle.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Ybarra Michael D
• Rhoades Elijah L

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• B05C13/02 Primary

  for particular articles · CPC title