Spin chuck jig and method of lifting spin chuck using the same

Patent metadata

Field	Value
Publication number	US-10835919-B2
Application number	US-201816046988-A
Country	US
Kind code	B2
Filing date	Jul 26, 2018
Priority date	Jul 26, 2018
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A spin chuck jig includes a handle having first holes, a base having second holes, wherein a number of the second holes and a number of first holes are the same, and bolts each penetrating one of the first holes and one of the second holes so that the handle and the base are attached to a spin chuck to be lifted from a spin process equipment.

First claim

What is claimed is:

1. A spin chuck jig, for use in lifting a spin chuck from a spin process equipment, the spin chuck comprising a wafer holder at a peripheral area of the spin chuck, a recessed region at a central area of the spin chuck, and a plurality of bolt receptors arranged within the recessed region, the spin chuck jig comprising:
a handle having a plurality of first holes, wherein a number of the plurality of first holes and a number of the bolt receptors are the same;
a base having a plurality of second holes, wherein the base is insertable into the recessed region and wherein a number of the plurality of second holes and a number of the plurality of first holes are the same; and
a plurality of bolts, wherein a length of each of the plurality of bolts is sufficiently long to penetrate one of the plurality of first holes, one of the plurality of second holes and one of the plurality of bolt receptors so that the handle and the base are attachable to the spin chuck.

2. The spin chuck jig of claim 1 ,
wherein the base is of cylindrical shape.

3. The spin chuck jig of claim 2 ,
wherein a number of the plurality of first holes is four.

4. The spin chuck jig of claim 1 ,
wherein a number of the plurality of bolts is two.

5. The spin chuck jig of claim 1 ,
wherein the handle is shaped of a rectangular sheet.

6. The spin chuck jig of claim 5 ,
wherein the base is shaped of a cylinder.

7. The spin chuck jig of claim 6 ,
wherein the handle and the base are formed of acrylic.

8. The spin chuck jig of claim 5 ,
wherein the handle includes a first cut adjacent to one end of the handle and a second cut adjacent to the other end.

9. The spin chuck jig of claim 1 ,
wherein the base includes a notch.

10. The spin chuck jig of claim 1 ,
wherein the handle has a length greater than 450 mm.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Ybarra Michael D
• Rhoades Elijah L

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• B65G7/12

  Load carriers, e.g. hooks, slings, harness, gloves, modified for load carrying · CPC title