RF power amplifier with combined baseband, fundamental and harmonic tuning network
US-11336253-B2 · May 17, 2022 · US
US11956880B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11956880-B2 |
| Application number | US-202017110690-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 3, 2020 |
| Priority date | Sep 17, 2020 |
| Publication date | Apr 9, 2024 |
| Grant date | Apr 9, 2024 |
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A system includes an RF signal source configured to output an RF signal at a first frequency, and a first controller configured to generate a first data signal encoding instructions at a second frequency. A first filter is coupled to the RF signal source. The first filter is a low pass filter having a cutoff frequency between the first frequency and the second frequency. The first filter is configured to couple to a first end of a cable. A second filter is coupled to the first controller. The second filter is a high pass filter having a cutoff frequency between the first frequency and the second frequency. The second filter is configured to couple to the first end of the cable. The system includes an impedance matching network configured to couple to a second end of the cable. A first electrode is coupled to the impedance matching network.
Opening claim text (preview).
What is claimed is: 1. A system, comprising: a radio frequency (RF) signal source configured to output an RF signal having a first frequency; a first controller configured to generate a first data signal encoding instructions, wherein the first data signal is modulated with a carrier signal having a second frequency and the second frequency does not overlap the first frequency; a first filter coupled to the RF signal source and configured to inhibit transmissions of the first data signal through the first filter and allow transmissions of the RF signal through the first filter, the first filter being configured to couple to a first end of a cable; a second filter coupled to the first controller and configured to inhibit transmissions of the RF signal through the second filter and allow transmissions of the first data signal through the second filter, the second filter being configured to couple to the first end of the cable; an impedance matching network configured to couple to a second end of the cable; a third filter coupled between the second end of the cable and the impedance matching network, wherein the third filter is configured to inhibit transmissions of the first data signal through the third filter and allow transmissions of the RF signal through the third filter; and a first electrode in a cavity configured to receive a load, wherein the first electrode is coupled to an output of the impedance matching network and configured to radiate electromagnetic energy into the cavity as a result of receiving the RF signal. 2. The system of claim 1 , further comprising a second controller coupled to the second end of the cable and configured to modify an impedance transformation performed by the impedance matching network based on the instructions. 3. The system of claim 2 , further comprising a fourth filter coupled between the second end of the cable and the second controller, wherein the fourth filter is configured to inhibit transmissions of the RF signal through the fourth filter and allow transmissions of the first data signal through the fourth filter. 4. The system of claim 3 , further comprising a detector configured to measure a magnitude of reflected power along a transmission path between the impedance matching network and the first electrode. 5. The system of claim 4 , wherein the second controller is configured to encode the magnitude of the reflected power into a second data signal, wherein the second data signal is modulated with the carrier signal having the second frequency and the fourth filter is configured to allow transmissions of the second data signal to pass through the fourth filter. 6. The system of claim 1 , wherein the second frequency of the carrier signal is between 2 gigahertz (GHz) and 3 GHz, and the second filter is a high pass filter having a cutoff frequency in a range between 500 MHz and 1.5 GHz. 7. The system of claim 1 , wherein the first filter includes a low pass filter having a cutoff frequency of 700 hertz (Hz) or less. 8. The system of claim 1 , wherein the cable is a shielded 50 ohm cable. 9. A system, comprising: a radio frequency (RF) signal source configured to output an RF signal having a first frequency; a first controller configured to generate a first data signal encoding instructions, wherein the first data signal is modulated with a carrier signal having a second frequency and the second frequency does not overlap the first frequency; a first filter coupled to the RF signal source and configured to inhibit transmissions of the first data signal through the first filter and allow transmissions of the RF signal through the first filter, the first filter being configured to couple to a first end of a cable; a second filter coupled to the first controller and configured to inhibit transmissions of the RF signal through the second filter and allow transmissions of the first data signal through the second filter, the second filter being configured to couple to the first end of the cable; an impedance matching network configured to couple to a second end of the cable; and a first electrode in a cavity configured to receive a load, wherein the first electrode is coupled to an output of the impedance matching network and configured to radiate electromagnetic energy into the cavity as a result of receiving the RF signal; a direct current (DC) power source configured to output a DC signal; and a fifth filter, wherein the fifth filter is coupled between the DC power source and the first end of the cable, and the fifth filter is configured to inhibit transmissions of the first data signal and the RF signal through the fifth filter and to allow transmissions of the DC signal to pass through the fifth filter. 10. The system of claim 9 , wherein the impedance matching network includes a DC power output terminal configured to receive the DC signal, and the system further includes a sixth filter connected between the DC power output terminal and the second end of the cable, wherein the sixth filter is configured to inhibit transmissions of the first data signal and the RF signal through the sixth filter and allow transmissions of the DC signal to pass through the sixth filter. 11. A system, comprising: a radio frequency (RF) signal source configured to output an RF signal having a first frequency; a first controller configured to generate a first data signal encoding instructions, wherein the first data signal has a second frequency; a first filter coupled to the RF signal source, wherein the first filter is a low pass filter having a cutoff frequency between the first frequency and the second frequency, the first filter being configured to couple to a first end of a cable; a second filter coupled to the first controller, wherein the second filter is a high pass filter having a cutoff frequency between the first frequency and the second frequency, the second filter being configured to couple to the first end of the cable; an impedance matching network including an input, the input of the impedance matching network being configured to couple to a second end of the cable; and a first electrode in a cavity configured to receive a load, wherein the first electrode is coupled to an output of the impedance matching network; a second controller coupled to the second end of the cable and configured to modify an impedance transformation performed by the impedance matching network based on the instructions; and a fourth filter coupled between the second end of the cable and the second controller, wherein the fourth filter is a high pass filter having a cutoff frequency between the first frequency and the second frequency. 12. The system of claim 11 , further comprising a third filter coupled between the second end of the cable and the impedance matching network, wherein the third filter is a low pass filter having a cutoff frequency between the first frequency and the second frequency. 13. The system of claim 11 , further comprising a direct current (DC) power source configured to output a DC signal and a fifth filter, wherein the fifth filter is coupled between the DC power source and the first end of the cable and the fifth filter is a low pass filter having a cutoff frequency less than the first frequency. 14. The system of claim 13 , wherein the impedance matching network includes a DC power output terminal configured to receive the DC signal, and wherein the system further includes a sixth filter connected between the DC power output terminal and the second end of the cable, wherein the sixth filter is a low pass filter having a cutoff frequency less than the first frequency.
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