Systems and methods for reducing power reflected towards a higher frequency rf generator during a period of a lower rf generator and for using a relationship to reduce reflected power
US-2016308560-A1 · Oct 20, 2016 · US
US11166352B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11166352-B2 |
| Application number | US-201816225749-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2018 |
| Priority date | Dec 19, 2018 |
| Publication date | Nov 2, 2021 |
| Grant date | Nov 2, 2021 |
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A system is configured to perform an operation that results in increasing a thermal energy of a load. The system includes a radio frequency signal source configured to supply a radio frequency signal, an electrode coupled to the radio frequency signal source, and a variable impedance network that includes at least one variable passive component. The variable impedance network is coupled between the radio frequency signal source and the electrode. The system includes a controller configured to determine an operation duration based upon a configuration of the variable impedance network, and to cause the radio frequency signal source to supply the radio frequency signal for the operation duration.
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What is claimed is: 1. A system configured to perform an operation that results in increasing a thermal energy of a load, the system comprising: a radio frequency signal source configured to supply a radio frequency signal; an electrode coupled to the radio frequency signal source; a variable impedance network that includes at least one variable passive component, wherein the variable impedance network is coupled between the radio frequency signal source and the electrode; a user interface; and a controller configured to cause the radio frequency signal source to supply the radio frequency signal, initiate a timer when the controller causes the radio frequency signal source to supply the radio frequency signal, determine an operation duration based upon a configuration of the variable impedance network by determining an initial stage duration and a final stage duration, determine, using the operation duration and a current value of the timer, a percentage complete using a ratio of the current value of the timer to a sum of the initial stage duration and the final stage duration, generate an output at the user interface indicative of the percentage complete, and continue to cause the radio frequency signal source to supply the radio frequency signal for the operation duration. 2. The system of claim 1 , wherein the final stage duration is at least five percent of the initial stage duration. 3. The system of claim 1 , further comprising: a transmission path between the radio frequency signal source and the electrode, wherein the transmission path is configured to convey the radio frequency signal from the radio frequency signal source to the electrode to cause the electrode to radiate radio frequency electromagnetic energy; and power detection circuitry coupled to the transmission path and configured to repeatedly measure radio frequency power values including at least one of forward radio frequency power values and reflected frequency power values along the transmission path, and wherein the controller is configured to, while causing the radio frequency signal source to supply the radio frequency signal: determine a rate of change of the radio frequency power values, determine the rate of change of the radio frequency power values is less than a predetermined threshold rate of change, and control the radio frequency signal source to stop supplying the radio frequency signal. 4. The system of claim 3 , wherein the controller is configured to, after determining the rate of change of the radio frequency power values is less than a predetermined threshold rate of change, cause the radio frequency signal source to supply the radio frequency signal for a period of time equal to the final stage duration. 5. A system configured to perform an operation that results in increasing a thermal energy of a load, the system comprising: a radio frequency signal source configured to supply a radio frequency signal; an electrode coupled to the radio frequency signal source; a variable impedance network that includes at least one variable passive component, wherein the variable impedance network is coupled between the radio frequency signal source and the electrode; a controller configured to determine an operation duration based upon a configuration of the variable impedance network, and to cause the radio frequency signal source to supply the radio frequency signal for the operation duration; and a memory configured to store a table that includes multiple entries, wherein each entry of the multiple entries includes a configuration value corresponding to the configuration of the variable impedance network and the table further includes time durations, each corresponding to a configuration value in the multiple entries. 6. A system configured to perform an operation that results in increasing a thermal energy of a load, the system comprising: a radio frequency signal source configured to supply a radio frequency signal; a transmission path between the radio frequency signal source and an electrode, wherein the transmission path is configured to convey the radio frequency signal from the radio frequency signal source to an electrode to cause the electrode to radiate radio frequency electromagnetic energy; power detection circuitry coupled to the transmission path and configured to repeatedly measure radio frequency power values including at least one of forward radio frequency power values and reflected frequency power values along the transmission path; a variable impedance network that includes at least one variable passive component, wherein the variable impedance network is coupled between the radio frequency signal source and the electrode; a user interface; and a controller configured to: determine, using the power detection circuitry, a configuration of the variable impedance network that provides an impedance match between the radio frequency signal source and the electrode, determine an operation duration by determining an initial stage duration and a final stage duration using the configuration of the variable impedance network, cause the radio frequency signal source to supply the radio frequency signal, initiate a timer when the controller causes the radio frequency signal source to supply the radio frequency signal, determine, using the operation duration and a current value of the timer, a percentage complete using a ratio of the current value of the timer to a sum of the initial stage duration and the final stage duration, generate an output at the user interface indicative of the percentage complete, and continue to cause the radio frequency signal source to supply the radio frequency signal for the operation duration. 7. The system of claim 6 , further comprising a memory configured to store a table that includes multiple entries, wherein each entry of the multiple entries includes an initial stage duration value and a final stage duration value corresponding to at least one configuration of the variable impedance network. 8. The system of claim 6 , wherein the final stage duration is at least five percent of the initial stage duration. 9. The system of claim 6 , wherein the controller is further configured to, while causing the radio frequency signal source to supply the radio frequency signal: determine a rate of change of the radio frequency power values, determine the rate of change of the radio frequency power values is less than a predetermined threshold rate of change, and cause the radio frequency signal source to stop supplying the radio frequency signal. 10. The system of claim 9 , wherein the controller is configured to, after determining the rate of change of the radio frequency power values is less than a predetermined threshold rate of change, cause the radio frequency signal source to supply the radio frequency signal for a period of time equal to the final stage duration. 11. The system of claim 6 , further comprising a memory configured to store a table that includes multiple entries, wherein each entry of the multiple entries includes a configuration value corresponding to the configuration of the variable impedance network and the table further includes operation durations, each corresponding to a configuration value in the multiple entries. 12. A method, comprising; supplying, by a radio frequency signal source, one or more radio frequency signals to a transmission path that is electrically coupled between the radio frequency signal source and an electrode that is positioned proximate to a cavity to cause the electrode to radiate radio frequency electromagnetic energy; initiating a timer when the radio freque
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