Broadband active mirror architecture for high power optically pumped semiconductor disk lasers

Patent metadata

Field	Value
Publication number	US-11949211-B2
Application number	US-201917277669-A
Country	US
Kind code	B2
Filing date	Sep 19, 2019
Priority date	Sep 19, 2018
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A vertical-external-cavity surface-emitting laser (VECSEL) and a method of forming the VECSEL is disclosed. The VECSEL includes a heat sink; a heat spreader or heat spreader formed on a top surface of the heat sink, where the heat spreader comprises a first material having a first refractive index; and a high contrast grating formed on a top surface of the heat spreader or active region, wherein the high contrast grating comprises an active region and the high contrast grating comprising a second material having a second refractive index, the second refractive index is greater than the first refractive index.

First claim

What is claimed is:

1. A vertical-external-cavity surface-emitting laser (VECSEL) comprising:
a heat sink;
a heat spreader formed on a top surface of the heat sink, wherein the heat spreader comprises a first material having a first refractive index;
a semiconductor active region formed on a top surface of the heat spreader, wherein the semiconductor active region comprises a second material having a second refractive index; and
a high contrast grating formed on a top surface of the semiconductor active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader,
wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating.

2. The VECSEL of claim 1 , wherein the heat spreader is bonded to the heat sink using a thermal adhesive.

3. The VECSEL of claim 1 , wherein the semiconductor active region is bonded to the heat spreader using Van der Waals bonding.

4. The VECSEL of claim 1 , wherein the semiconductor active region comprises a gain chip.

5. The VECSEL of claim 1 , wherein the semiconductor active region comprises GaAs, AlGaAs, InGaAs, InP/AlInGaAs/InGaAs, GaSb/AlGaAsSb/InGaAsSb, or GaAs/AlAs/AlGaAs/GaInP/AlGaInP.

6. The VECSEL of claim 1 , wherein the heat spreader is diamond, silicon carbide, sapphire, or another high thermal conductivity, transparent heat spreader.

7. The VECSEL of claim 1 , wherein the semiconductor active region comprises a bulk semiconductor, heterostructure, one or more quantum wells, or one or more quantum dot layers.

8. The VECSEL of claim 1 , wherein the heat spreader is cooled by attachment to the heat sink.

9. The VECSEL of claim 8 , wherein the heat spreader is bonded to the heat sink using a thermal glue, solder, or mechanical attachments.

10. A method of forming a vertical-external-cavity surface-emitting laser (VECSEL), the method comprising:
bonding a heat spreader to a top surface of a heat sink, where the heat spreader comprises a first material having a first refractive index;
bonding an active region to a top surface of the heat spreader, wherein the active region comprises a second material having a second refractive index; and
forming a high contrast grating on a top surface of the active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating, and
wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader.

11. The method of claim 10 , wherein the heat spreader is bonded to the heat sink using a thermal adhesive.

12. The method of claim 10 , wherein the active region is bonded to the heat spreader using Van der Waals bonding.

13. The method of claim 10 , wherein the active region comprises a semiconductor active region.

14. The method of claim 10 , wherein the active region comprises GaAs, AlGaAs, InGaAs, InP/AlInGaAs/InGaAs, GaSb/AlGaAsSb/InGaAsSb, or GaAs/AlAs/AlGaAs/GaInP/AlGaInP.

15. The method of claim 10 , wherein the heat spreader is diamond, silicon carbide, sapphire, or another high thermal conductivity, transparent heat spreader.

16. The method of claim 10 , wherein the active region comprises a bulk semiconductor, heterostructure, one or more quantum wells, or one or more quantum dot layers.

17. The method of claim 10 , wherein the heat spreader is cooled by attachment to the heat sink.

18. The method of claim 17 , wherein the heat spreader is bonded to the heat sink using a thermal glue, solder, or mechanical attachment.

19. A vertical-external-cavity surface-emitting laser (VECSEL) comprising:
a heat spreader, wherein the heat spreader comprises a first material having a first refractive index and wherein the heat spreader is cooled via direct contact with a cooling medium;
a semiconductor active region formed on a top surface of the heat spreader, wherein the semiconductor active region comprises a second material having a second refractive index; and
a high contrast grating formed on a top surface of the semiconductor active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader,
wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating.

Assignees

• Unm Rainforest Innovations

Inventors

• Sheik-Bahae Mansoor
• Albrecht Alexander Robert
• Yang Zhou

Classifications

• H01S5/02469 Primary

  Passive cooling, e.g. where heat is removed by the housing as a whole or by a heat pipe without any active cooling element like a TEC · CPC title

• H01S5/02484

  Sapphire or diamond heat spreaders · CPC title

• H01S5/041 Primary

  Optical pumping · CPC title

• H01S5/18361

  Structure of the reflectors, e.g. hybrid mirrors · CPC title

• H01S5/18386

  Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface · CPC title