High contrast grating optoelectronics

Patent metadata

Field	Value
Publication number	US-10305248-B2
Application number	US-201315028549-A
Country	US
Kind code	B2
Filing date	Oct 29, 2013
Priority date	Oct 29, 2013
Publication date	May 28, 2019
Grant date	May 28, 2019

Abstract

A high contrast grating optoelectronic apparatus includes an optoelectronic device at a front surface of a substrate. The optoelectronic device is to one or both of emit light and detect light through a back surface of the substrate opposite the front surface. A high contrast grating (HCG) lens is adjacent to and spaced apart from the back surface of the substrate by a spacer. The spacer includes one or both of a wafer-bonded substrate and a cavity. The HCG lens is to focus the light.

First claim

What is claimed is:

1. A high contrast grating optoelectronic apparatus comprising:
an optoelectronic device at a front surface of a substrate, the optoelectronic device to one or both of emit light and detect light through a back surface of the substrate opposite the front surface;
a high contrast grating (HCG) lens adjacent to and spaced apart from the back surface of the substrate by a spacer that is disposed on the back surface of the substrate, the HCG lens to focus the light; and
wherein the spacer comprises a first material and a cavity between the HCG lens and the substrate back surface,
the HCG lens encapsulated in an encapsulating material partially filling the cavity between the HCG lens and the back surface of the substrate, the encapsulating material comprising a second material different from the first material of the spacer.

2. The high contrast grating optoelectronic apparatus of claim 1 , wherein the optoelectronic device comprises a back emitting vertical cavity surface emitting laser (BE-VCSEL), the light to be focused by the HCG lens being a laser emission of the BEVCSEL.

3. The high contrast grating optoelectronic apparatus of claim 1 , wherein the optoelectronic device comprises a photodiode, the HCG lens to focus the light onto an active region of the photodiode.

4. The high contrast grating optoelectronic apparatus of claim 1 , further comprising an antireflective coating on the substrate between the spacer and the back surface of the substrate.

5. The high contrast grating optoelectronic apparatus of claim 1 , wherein the encapsulating material forms a cover layer on the HCG lens.

6. The high contrast grating optoelectronic apparatus of claim 1 , wherein the HCG lens comprises a plurality of spaced apart grating elements and wherein the encapsulating material at least partially fills spaces between the grating elements.

7. An optoelectronic apparatus employing a high contrast grating comprising:
a transparent substrate having a first surface and a second surface opposite the first surface, the transparent substrate to transmit light at an operational wavelength of the optoelectronic apparatus;
an optoelectronic layer at the first surface of the transparent substrate, the optoelectronic layer to one or both of emit the light and detect the light;
a high contrast grating (HCG) layer adjacent to and spaced apart from the second surface of the transparent substrate by a spacer layer that is disposed on the second surface of the transparent substrate, the HCG layer to provide an HCG lens to focus the light; and
wherein the spacer layer comprises a first material and a cavity to suspend the HCG lens above the transparent substrate second surface,
the HCG lens encapsulated in an encapsulating material partially filling the cavity between the HCG lens and the second surface of the transparent substrate, the encapsulating material comprising a second material different from the first material of the spacer layer.

8. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the optoelectronic layer comprises one or both of a vertical cavity surface emitting laser (VCSEL) and a photodiode, the VCSEL to emit light in a direction towards the second surface, the emitted light to be focused by the HCG lens, the photodiode to be illuminated by and to detect light from the second surface, the light to be focused by the HCG lens onto the photodiode.

9. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the HCG lens is to one or both of focus the light into an optical fiber and focus the light from an optical fiber onto the optoelectronic layer to illuminate the optoelectronic layer.

10. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the spacer layer comprises the cavity between the HCG layer and the transparent substrate second surface, the optoelectronic apparatus further comprising a wafer-bonded substrate to support the HCG layer on a surface of the wafer-bonded substrate, the HCG layer being between the wafer-bonded substrate and the transparent substrate second surface.

11. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the spacer layer further comprises a wafer-bonded support substrate to suspend the HCG lens above the transparent substrate second surface, the HCG layer is on a surface of the wafer-bonded substrate opposite a surface of the wafer-bonded support substrate that is adjacent to the transparent substrate second surface.

12. The optoelectronic apparatus employing a high contrast grating of claim 7 , further comprising an antireflective coating on the transparent substrate between the spacer layer and the second surface of the transparent substrate.

13. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the encapsulating material forms a cover layer on the HCG lens.

14. The optoelectronic apparatus employing a high contrast grating of claim 7 , wherein the HCG lens comprises a plurality of spaced apart grating elements and wherein the encapsulating material at least partially fills spaces between the grating elements.

15. A method of fabricating high contrast grating based optoelectronics, the method comprising:
providing an optoelectronic substrate, the optoelectronic substrate to support an optoelectronic device on a front surface and to transmit light between the front surface and a back surface of the optoelectronic substrate;
forming a high contrast grating (HCG) lens, the formed HCG lens being adjacent to and spaced apart from the optoelectronic substrate back surface by a spacer layer disposed on the back surface of the optoelectronic substrate and the spacer layer comprising a first material and a cavity between the HCG lens and the back surface of the optoelectronic substrate, the HCG lens to focus the transmitted light;
encapsulating the HCG lens with an encapsulating material; and
partially filling the cavity between the HCG lens and the back surface of the optoelectronic substrate with the encapsulating material, the encapsulating material comprising a second material different from the first material of the spacer layer.

16. The method of fabricating high contrast grating based optoelectronics of claim 15 , wherein forming the HCG lens comprises:
depositing an HCG layer onto the spacer layer;
patterning the HCG layer;
etching the patterned HCG layer to define the HCG lens; and
releasing the HCG lens to form the cavity in the spacer layer between the optoelectronic substrate back surface and the HCG lens.

17. The method of fabricating high contrast grating based optoelectronics of claim 15 , wherein providing the optoelectronic substrate comprises forming the optoelectronic device in the front surface of the optoelectronic substrate and wherein the optoelectronic device comprises a back emitting vertical cavity surface emitting laser (BE-VCSEL).

18. The method of fabricating high contrast grating based optoelectronics of claim 15 , wherein the HCG lens is partially encapsulated with the encapsulating material.

19. The method of fabricating high contrast grating based optoelectronics of claim 15 , wherein an anisotropic deposition technique is employed to deposit the encapsulating material to partially fill the cavity between the HCG lens and the back surface of the optoelectronic substrate with the encapsulating material.

20. The method of fabricating high contrast grating based optoelectronics of claim 15 , wh

Assignees

• Hewlett Packard Entpr Dev Lp

Inventors

• Mathai Sagi V
• Tan Michael Renne Ty
• Fattal David A
• Sorin Wayne V

Classifications

• G02B5/1857

  using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams · CPC title

• H01S5/18305

  with emission through the substrate, i.e. bottom emission · CPC title

• G02B5/1866

  Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence) · CPC title

• G02B27/0905

  Dividing and/or superposing multiple light beams · CPC title

• G02B5/1809 Primary

  with pitch less than or comparable to the wavelength · CPC title