Laser chamber and electronic device manufacturing method

Patent metadata

Field	Value
Publication number	US-11947263-B2
Application number	US-202117457514-A
Country	US
Kind code	B2
Filing date	Dec 3, 2021
Priority date	Jul 3, 2019
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

First claim

What is claimed is:

1. A laser chamber of a discharge-excitation-type gas laser apparatus, comprising:
a container which contains laser gas therein;
a pair of discharge electrodes arranged in the container;
a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and
a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades,
wherein a position of the end portion in the rotation direction changes in accordance with a position of the end portion in the axial direction, and
wherein a cycle of the position of the end portion in the rotation direction is equal to or smaller than twice a wavelength of an acoustic wave generated between the cross flow fan and the stabilizer.

2. The laser chamber according to claim 1 ,
wherein the difference is larger than one quarter of the interval of the two blades and smaller than three quarters of the interval of the two blades.

3. The laser chamber according to claim 1 ,
wherein a cycle of the position of the end portion in the rotation direction is equal to or larger than twice the difference.

4. The laser chamber according to claim 1 ,
wherein the position of the end portion in the rotation direction changes in a rectangular wave shape between a first value and a second value.

5. The laser chamber according to claim 1 ,
wherein the position of the end portion in the rotation direction changes in a stepped shape between a first value and a second value.

6. The laser chamber according to claim 1 ,
wherein the position of the end portion in the rotation direction changes in a triangular wave shape between a first value and a second value.

7. The laser chamber according to claim 1 ,
wherein the cross flow fan further includes a plurality of partition plates arranged perpendicularly to the rotation shaft at positions each corresponding in the axial direction to the minimum position of the end portion in the rotation direction.

8. The laser chamber according to claim 1 ,
wherein the stabilizer includes a guide surface which configures a part of a wall surface of a flow path of the laser gas flowing toward the discharge space and on which a plurality of grooves are formed.

9. The laser chamber according to claim 8 ,
wherein bottom surfaces of the plurality of grooves are parallel to the guide surface.

10. The laser chamber according to claim 8 ,
wherein bottom surfaces of the plurality of grooves are inclined with respect to the guide surface.

11. A laser chamber of a discharge-excitation-type gas laser apparatus, comprising:
a container which contains laser gas therein;
a pair of discharge electrodes arranged in the container;
a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and
a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades,
wherein the stabilizer includes a guide surface which configures a part of a wall surface of a flow path of the laser gas flowing toward the discharge space and on which a plurality of grooves are formed.

12. The laser chamber according to claim 11 ,
wherein bottom surfaces of the plurality of grooves are parallel to the guide surface.

13. The laser chamber according to claim 11 ,
wherein bottom surfaces of the plurality of grooves are inclined with respect to the guide surface.

14. An electronic device manufacturing method, comprising:
generating laser light using an excimer laser apparatus including a laser chamber;
emitting the laser light to an exposure apparatus; and
exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
the laser chamber including:
a container which contains laser gas therein;
a pair of discharge electrodes arranged in the container;
a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and
a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference in the rotation direction between a maximum position and a minimum position of an end portion on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades blades,
wherein a position of the end portion in the rotation direction changes in accordance with a position of the end portion in the axial direction, and
wherein a cycle of the position of the end portion in the rotation direction is equal to or smaller than twice a wavelength of an acoustic wave generated between the cross flow fan and the stabilizer.

Assignees

• Gigaphoton Inc

Inventors

• Tanaka Makoto
• Fujimaki Yosuke
• Ito Takashi
• KAWAGOE Yousuke

Classifications

• G03F7/70025 Primary

  by lasers · CPC title

• F04D23/00

  Other rotary non-positive-displacement pumps (pumping installations or systems F04D25/00) · CPC title

• F04D29/667

  by influencing the flow pattern, e.g. suppression of turbulence · CPC title

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title