Apparatus utilizing high-pressure air

Patent metadata

Field	Value
Publication number	US-11946601-B2
Application number	US-202117445892-A
Country	US
Kind code	B2
Filing date	Aug 25, 2021
Priority date	Sep 8, 2020
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

An apparatus that utilizes high-pressure air therein includes a main body, an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body, a filter configured to remove oil contained in the high-pressure air flowing through the air pipe, a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter, and a reporting unit configured to report, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil.

First claim

What is claimed is:

1. An apparatus that utilizes high-pressure air therein, comprising:
a main body;
an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body;
a filter configured to remove oil contained in the high-pressure air flowing through the air pipe;
a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter; and
a reporting unit configured to report to an operator of the apparatus, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil.

2. The apparatus according to claim 1 , wherein the high-pressure air supply source that supplies the air pipe with the high-pressure air is an air compressor.

3. The apparatus according to claim 1 , further comprising:
a shut-off valve configured to stop the flow of the high-pressure air in the air pipe if the reporting unit reports that the high-pressure air is mixed with the oil.

4. An apparatus that utilizes high-pressure air therein, comprising:
a main body;
an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body;
a filter configured to remove oil contained in the high-pressure air flowing through the air pipe;
a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter;
a reporting unit configured to report to an operator of the apparatus, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil; and
an auxiliary gas detector disposed in the air pipe and configured to detect an organic gas contained in the high-pressure air prior to passing through the filter.

5. The apparatus according to claim 1 , wherein the main body includes a cassette table configured and arranged to receive a cassette including a plurality of wafers therein.

6. The apparatus according to claim 1 , further comprising:
a second air pipe configured to be supplied with high-pressure air from a second high-pressure air supply source and to supply the high-pressure air into the main body;
a second filter configured to remove oil contained in the high-pressure air flowing through the second air pipe;
a second gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the second filter; and
a three-way valve connected to both:
the air pipe at a location downstream of the filter; and
the second air pipe at a location downstream of the second air filter,

wherein the three-way valve is configured and arranged to switch the high pressure air flow between the air pipe and the second air pipe based on whether the gas detector or the second gas detector has detected the organic gas within the high pressure air.

7. The apparatus according to claim 1 , wherein the reporting unit reports to the operator by displaying warning information on a display monitor.

8. The apparatus according to claim 1 , wherein the reporting unit reports to the operator by turning on a warning light.

9. The apparatus according to claim 4 , wherein the reporting unit reports to the operator by displaying warning information on a display monitor.

10. The apparatus according to claim 4 , wherein the reporting unit reports to the operator by turning on a warning light.

11. The apparatus according to claim 1 , wherein the gas detector comprises a gas sensor.

Assignees

• Disco Corp

Inventors

• Kasai Tsuyoshi
• Uehara Ken
• Takahashi Satoshi

Classifications

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/0408

  for drying · CPC title