Low-loss and wide-band acoustic delay lines using x-cut and y-cut lithium niobate piezoelectric thin films

Patent metadata

Field	Value
Publication number	US-11942920-B2
Application number	US-202017073059-A
Country	US
Kind code	B2
Filing date	Oct 16, 2020
Priority date	Oct 18, 2019
Publication date	Mar 26, 2024
Grant date	Mar 26, 2024

Abstract

A piezoelectric thin film (PTF) is located above a carrier substrate. The PTF may be X-cut LiNbO 3 thin film adapted to propagate an acoustic wave in at least one of a first mode excited by an electric field oriented in a longitudinal direction along a length of the PTF or a second mode excited by the electric field oriented at least partially in a thickness direction of the PTF. A first interdigitated transducer (IDT) is disposed on a first end of the PTF. The first IDT is to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave. A second IDT is disposed on a second end of the PTF with a gap between the second IDT and the first IDT. The second IDT is to convert the acoustic wave into a second electromagnetic signal.

First claim

What is claimed is:

1. An apparatus comprising:
a piezoelectric thin film located above a carrier substrate, wherein the piezoelectric thin film is one of an X-cut or a Y-cut lithium niobate (LiNbO 3 ) thin film adapted to propagate an acoustic wave in at least one of:
a first mode excited by an electric field oriented in a longitudinal direction along a length of the piezoelectric thin film; or
a second mode excited by the electric field oriented at least partially in a thickness direction of the piezoelectric thin film;

a first interdigitated transducer (IDT) disposed on a first end of the piezoelectric thin film, the first IDT to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave; and
a second IDT disposed on a second end of the piezoelectric thin film with a gap between the second IDT and the first IDT, the second IDT to convert the acoustic wave into a second electromagnetic signal, and the gap to determine a time delay of the acoustic wave before output of the second electromagnetic signal.

2. The apparatus of claim 1 , wherein the first mode is one of a fundamental symmetrical (S0) mode, a first-order symmetrical (S1) mode, a fundamental shear-horizontal (SH0) mode, or a first-order antisymmetric (A1) mode.

3. The apparatus of claim 1 , wherein the second mode is one of a first-order antisymmetric (A1) mode or a first-order shear-horizontal (SH1) mode.

4. The apparatus of claim 1 , wherein the Y-cut LiNbO 3 thin film comprises one of a 128Y-cut, 54Y-cut, or 36Y-cut LiNbO 3 thin film and the second mode comprises a first-order symmetric (S1) mode.

5. The apparatus of claim 1 , wherein the piezoelectric thin film is suspended above the carrier substrate.

6. The apparatus of claim 1 , wherein the piezoelectric thin film is disposed on a high acoustic impedance layer interposed between the piezoelectric thin film and the carrier substrate, the high acoustic impedance layer comprising one of silicon (Si), sapphire, fused silica, quartz, silicon carbide (SiC), diamond, aluminum nitride (AlN), aluminum oxide (Al 2 O 3 ), tungsten, molybdenum, platinum, or combinations thereof.

7. The apparatus of claim 1 , wherein the piezoelectric thin film is disposed on a combination of a plurality of high acoustic impedance layers and a plurality of low acoustic impedance layers interposed between the piezoelectric thin film and the carrier substrate.

8. The apparatus of claim 7 , wherein respective ones of the plurality of the low acoustic impedance layers are alternately disposed on respective ones of the plurality of high acoustic impedance layers.

9. The apparatus of claim 1 , further comprising:
a waveguide inside of which is disposed the piezoelectric thin film, the first IDT, and the second IDT;
a first port coupled to the first IDT, the first port to receive the first electromagnetic signal; and
a second port coupled to the second IDT, the second port to output the second electromagnetic signal.

10. The apparatus of claim 9 , wherein the first IDT comprises at least a transducer unit cell comprising:
a ground line coupled to the first port;
a back part of a first acoustic reflector coupled to the ground line, wherein a center of the first acoustic reflector comprises a first reflection center;
a front part of a second acoustic reflector coupled to the ground line, wherein a center of the second acoustic reflector comprises a second reflection center;
a first transduction electrode coupled to the first acoustic reflector, the second acoustic reflector, and to the ground line of the first port;
a signal line coupled to the first port; and
a second transduction electrode coupled to the signal line and disposed between the first acoustic reflector and the first transduction electrode, wherein a center of the second transduction electrode comprises a transduction center.

11. The apparatus of claim 10 , wherein the first reflection center is located at a first end of the transducer unit cell at a first distance away from the transduction center, the second reflection center is located at a second end of the transducer unit cell at a second distance away from the transduction center, the second distance is different from the first distance, and wherein the first transduction electrode is located between the transduction center and the second reflection center.

12. The apparatus of claim 11 , wherein the second distance is between 40% and 95% greater than the first distance.

13. The apparatus of claim 10 , wherein the first transduction electrode and the second transduction electrode have a first width, and a combination of the back part and the front part of the first and second acoustic reflectors have a second width that is less than four times greater than the first width.

14. The apparatus of claim 10 , wherein the first reflection center is located at a first distance from the transduction center on a first side of the transduction center and the second reflection center is located at a second distance different than the first distance from the transduction center on a second side of the transduction center, the second side being opposite from the first side such that a first plurality of components of the acoustic wave propagating toward the second reflection center interfere constructively and a second plurality of components of the acoustic wave propagating toward the first reflection center interfere destructively.

15. The apparatus of claim 1 , wherein the longitudinal direction is oriented between 10 degrees clockwise and 30 degrees counterclockwise to a Y-direction of the one of the X-cut or Y-cut LiNbO 3 thin film.

16. A full-duplex radio comprising:
an antenna to transmit a first radio frequency (RF) signal in a first frequency range and receive a second RF signal at the first frequency range;
transmit (TX) chain circuitry coupled to the antenna;
receive (RX) chain circuitry coupled to the antenna, wherein the RX chain circuitry receives the second RF signal and a reflected portion of the first RF signal;
a directional coupler in the TX chain circuitry, the directional coupler to direct a portion of the first RF signal to the RX chain circuitry; and
a plurality of acoustic delay lines (ADLs) coupled between the TX chain circuitry and the RX chain circuitry to provide a signal delay, wherein the portion of the first RF signal experiences the signal delay and destructively interferes with the reflected portion of the first RF signal, and wherein each ADL of the plurality of ADLs comprises:
a piezoelectric thin film located above a carrier substrate, wherein the piezoelectric thin film is one of an X-cut or Y-cut lithium niobate (LiNbO 3 ) thin film adapted to propagate an acoustic wave;
a first interdigitated transducer (IDT) disposed on a first end of the piezoelectric thin film, the first IDT to convert a first electromagnetic signal, traveling in a longitudinal direction along a length of the piezoelectric thin film, into the acoustic wave; and
a second IDT disposed on a second end of the piezoelectric thin film with a gap between the second IDT and the first IDT, the second IDT to convert the acoustic wave into a second electromagnetic signal, and the gap to determine a time delay of the acoustic wave before output of the second electromagnetic signal.

17. The full-duplex radio of claim 16 , wherein the acoustic wave is propagated in at least one of:
a first mode excited by an electric field oriented in a longitudinal direction along a length of the piezoelectric thin film; or
a second mode exci

Assignees

• Board Of Trustees Of The Univ Of Illinois
• Univ Illinois

Inventors

• Lu Ruochen
• Garcia Tomas Manzaneque
• Yang Yansong
• Gong Songbin

Classifications

• H03H9/02228 Primary

  Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer · CPC title

• H03H9/02543

  Characteristics of substrate, e.g. cutting angles · CPC title

• H03H9/02559

  of lithium niobate or lithium-tantalate substrates · CPC title

• H03H9/02574

  of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate · CPC title

• H03H9/02637

  Details concerning reflective or coupling arrays · CPC title