Shear horizontal surface acoustic wave (SH-SAW) resonators and arrays thereof

Patent metadata

Field	Value
Publication number	US-10261078-B2
Application number	US-201615238361-A
Country	US
Kind code	B2
Filing date	Aug 16, 2016
Priority date	Aug 17, 2015
Publication date	Apr 16, 2019
Grant date	Apr 16, 2019

Abstract

The present application relates to a biosensor that employs an acoustic cavity to store mechanical energy. In particular examples, the biosensor includes an electrode region and one or more reflector regions to form the acoustic cavity, as well as a functionalized active area disposed in proximity to the cavity. Methods of making and using such biosensors are also described herein.

First claim

The invention claimed is:

1. A biosensor comprising:
a piezoelectric substrate comprising a top surface;
an electrode region disposed on the top surface of the piezoelectric substrate, wherein the electrode region is configured to launch a shear horizontal surface acoustic wave and to detect the acoustic wave transmitted through the substrate;
one or more reflector regions disposed on the top surface of the piezoelectric substrate and disposed outside of a periphery of the electrode region, wherein the one or more reflector regions are configured to provide an acoustic cavity disposed within the piezoelectric substrate, and wherein the acoustic cavity is configured to store mechanical energy from the acoustic wave;
a guide layer overlying the top surface of the piezoelectric substrate, the electrode region, and the one or more reflector regions, or portions thereof, in which a shear velocity in the guide layer is less than a shear velocity in the piezoelectric substrate; and
a functionalized active area disposed in proximity to the acoustic cavity and comprising one or more capture agents configured to bind one or more targets.

2. The biosensor of claim 1 , wherein binding of the one or more targets to the one or more capture agents configured to result in a frequency, phase, or amplitude shift of the acoustic wave as a function of the mass of bound one or more targets.

3. The biosensor of claim 2 , where the frequency shift is of from about 0.1 MHz/ng to about 2 MHz/ng.

4. The biosensor of claim 1 , wherein the biosensor is configured as a one-port device.

5. The biosensor of claim 1 , wherein the electrode region comprises a pair of a transmitting transducer and a receiving transducer, the electrode region is configured to propagate the acoustic wave in a first direction, and the electrode region has a first edge and a second edge in which the first and second edges are parallel to each other and are perpendicular to the first direction;
wherein the one or more reflectors regions comprises a first reflector disposed in proximity to the first edge and a second reflector disposed in proximity to the second edge; and
wherein the functionalized active area is disposed above the pair of transducers.

6. The biosensor of claim 1 , wherein the biosensor is configured as a two-port device.

7. The biosensor of claim 6 , wherein the electrode region comprises a first pair of transducers and a second pair of transducers, the electrode region is configured to propagate the acoustic wave in a first direction, and a spacing separates the first and second pairs of transducers, wherein the spacing is dimensioned to be parallel to the first direction;
wherein the one or more reflectors regions comprises a first reflector disposed in proximity to the first pair and a second reflector disposed in proximity to the second pair; and
wherein the functionalized active area is disposed above the spacing and between the first and second pairs of transducers.

8. The biosensor of claim 1 , wherein the piezoelectric substrate comprises lithium tantalate, lithium niobate, potassium niobate, quartz, langatate, langasite, langanite, or a combination thereof.

9. The biosensor of claim 8 , wherein the guide layer comprising a polymer, an oxide, a dielectric, or a combination thereof.

10. The biosensor of claim 1 , wherein the functionalized active area has an area of from about 0.01 mm 2 to about 10 mm 2 .

11. The biosensor of claim 10 , wherein the one or more capture agents are disposed on a surface of the functionalized active area.

12. The biosensor of claim 10 , wherein the functionalized active area is configured to contact a sample volume of from about 0.5 nL to about 100 nL.

13. The biosensor of claim 1 , further comprising:
a fluidics layer comprising a sample chamber configured to overlie the functionalized active area.

14. The biosensor of claim 13 , further comprising:
one or more electrical lines connected to the electrode region; and
one or more electrical contacts connected to the one or more electrical lines.

15. The biosensor of claim 1 , wherein the biosensor is configured to operate at a frequency of from about 80 MHz to about 2.5 GHz.

16. An array comprising a plurality of biosensors of claim 1 , wherein each biosensor can be the same or different.

17. A biosensing platform comprising:
a Love wave biosensor of claim 1 ; and
a fluidics layer configured to be in fluidic communication with the functionalized active area of the biosensor.

18. The biosensing platform of claim 17 , wherein the fluidics layer further comprises a sample chamber configured to overlie the functionalized active area.

19. The biosensing platform of claim 17 , further comprising a matching network in series with the biosensor.

20. The biosensing platform of claim 17 , further comprising:
an attenuation network configured to attenuate a first input signal and to transmit an attenuated input signal;
an amplifier configured to amplify the attenuated input signal and to provide an amplified signal, wherein the amplified signal is transmitted to the biosensor as a second input signal; and
a filter configured to receive an output signal from the biosensor, thereby providing a filtered signal.

21. A method for detecting one or more targets, the method comprising:
storing mechanical energy within an acoustic cavity disposed within a biosensor, wherein the biosensor is configured to launch a shear horizontal surface acoustic wave that provides the mechanical energy;
exposing a functionalized active area of the biosensor to a liquid sample or a gas, wherein the functionalized active area is disposed above the acoustic cavity and comprises one or more capture agents configured to bind one or more targets;
measuring an output of a frequency shift or an amplitude change from the biosensor; and
determining a mass of the one or more targets based on the measured frequency shift.

22. The method of claim 21 , further comprising, prior to the storing step,
providing an oscillating input signal to the biosensor.

23. The method of claim 21 , wherein the liquid sample comprises whole blood, plasma, serum, sputum, cerebrospinal fluid, tear fluid, interstitial fluid, a biological sample, an environmental sample, or an agricultural sample.

24. The method of claim 21 , wherein the liquid sample comprises one or more viruses, pathogens, whole cells, bacteria, proteins, nucleic acids, toxins, peptides, biomarkers, and/or cytokines.

25. The method of claim 21 , wherein the exposing step further comprises delivering the liquid sample to a sample chamber in fluidic communication with the functionalized active area of the biosensor.

Assignees

• Nat Tech & Eng Solutions Sandia Llc

Inventors

• Branch Darren W
• Edwards Thayne L

Classifications

• G01N2291/0423

  Surface waves, e.g. Rayleigh waves, Love waves · CPC title

• H03H9/14552

  comprising split fingers · CPC title

• G01N29/022

  Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title

• B01L2400/0436

  acoustic forces, e.g. surface acoustic waves [SAW] · CPC title

• G01N33/5438 Primary

  Electrodes · CPC title