Inkjet printer with temperature controlled substrate support
US-11660891-B2 · May 30, 2023 · US
US11932030B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11932030-B2 |
| Application number | US-202318302693-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 18, 2023 |
| Priority date | Dec 20, 2018 |
| Publication date | Mar 19, 2024 |
| Grant date | Mar 19, 2024 |
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An inkjet printer is described. The inkjet printer has a gas cushion substrate support having a metal support surface; a print assembly with a dispenser having ejection nozzles facing the support surface; a gas source fluidly coupled to the gas cushion substrate support by a gas conduit; and a thermal control system coupled to the gas conduit.
Opening claim text (preview).
What is claimed is: 1. A method, comprising: using a gas cushion substrate support to support a substrate, the gas cushion substrate support comprising a metal support surface and a plurality of holes formed through the metal support surface; flowing a gas through a gas conduit and through the plurality of holes to form a gas cushion between the substrate and the metal support surface to support the substrate; depositing a print material on the substrate while the substrate is supported by the gas cushion; and thermally controlling the substrate by adjusting a flowrate of the gas, adjusting a temperature of the gas using a thermal control system coupled to the gas conduit, or both. 2. The method of claim 1 , wherein thermally controlling the substrate further comprises: measuring a temperature of the gas flowing through the gas conduit; and adjusting a flowrate of the gas flowing through the gas conduit based on the measured gas temperature. 3. The method of claim 1 , wherein thermally controlling the substrate further comprises: measuring a temperature of the gas flowing through the gas conduit; and adjusting a temperature of the gas flowing through the gas conduit based on the measured gas temperature. 4. The method of claim 1 , wherein thermally controlling the substrate further comprises: measuring a temperature of the substrate while the substrate is supported by the gas cushion; and adjusting a flowrate of the gas flowing through the gas conduit based on the measured substrate temperature. 5. The method of claim 1 , wherein thermally controlling the substrate further comprises: measuring a temperature of the substrate while the substrate is supported by the gas cushion; and adjusting a temperature of the gas flowing through the gas conduit based on the measured substrate temperature. 6. The method of claim 1 , wherein the plurality of holes is a first plurality, the gas is a first gas, the gas conduit is a first gas conduit, and the gas cushion is a first gas cushion, and further comprising flowing a second gas through a second gas conduit and through a second plurality of holes formed through the metal support surface to form a second gas cushion between the substrate and the metal support surface to support the substrate, wherein the first plurality of holes is at a central region of the substrate support and the second plurality of holes is at an edge region of the substrate support. 7. The method of claim 6 , further comprising adjusting a flowrate of the first gas independent of a flowrate of the second gas. 8. The method of claim 7 , further comprising independently adjusting a temperature of the first gas and the second gas. 9. The method of claim 1 , further comprising controlling a temperature of the gas using a heat exchanger coupled to the gas conduit. 10. The method of claim 1 , wherein the substrate support comprises a plurality of sections, each having a metal support surface and a plurality of holed formed through the metal support surface, flowing a gas through a gas conduit and through the plurality of holes comprises flowing the gas through the plurality of holes of each of the sections to form a gas cushion, and thermally controlling the substrate comprises adjusting a temperature of flowrate of gas to each of the sections using the thermal control system. 11. The method of claim 1 , wherein thermally controlling the substrate further comprises thermally coupling the substrate with the metal support surface. 12. A method, comprising: using a gas cushion substrate support to support a substrate, the gas cushion substrate support comprising a metal support surface and a plurality of holes formed through the metal support surface; flowing a gas through a gas conduit and through the plurality of holes to form a gas cushion between the substrate and the metal support surface to support the substrate; exhausting gas from the gas cushion through a plurality of gas escape passages formed through the gas cushion substrate support; depositing a print material on the substrate while the substrate is supported by the gas cushion; and thermally controlling the substrate by adjusting a flowrate of the gas, adjusting a temperature of the gas using a thermal control system coupled to the gas conduit, or both. 13. The method of claim 12 , wherein the flowing a gas through a gas conduit and through the plurality of holes to form a gas cushion comprises flowing the gas through a gas flow passage formed in a support plate of the gas cushion substrate support to a gap between the support plate and a top member of the gas cushion substrate support that provides the support surface. 14. The method of claim 13 , wherein the gas escape passages are formed through the top member and the support plate. 15. The method of claim 12 , wherein thermally controlling the substrate further comprises: measuring a temperature of the gas flowing through the gas conduit, a temperature of the substrate, or both; and adjusting the flowrate or temperature of the gas flowing through the gas conduit based on the measured gas temperature, substrate temperature, or both. 16. The method of claim 12 , wherein thermally controlling the substrate further comprises thermally coupling the substrate and the metal support surface. 17. The method of claim 12 , wherein thermally controlling the substrate comprises adjusting a temperature of the gas using a thermal control system that comprises a thermal unit that circulates and controls a thermal medium and a heat exchanger that thermally couples the thermal medium with the gas. 18. The method of claim 17 , wherein the thermal control system controls thermal flux of the heat exchanger by controlling flowrate of the thermal medium. 19. A method, comprising: using a gas cushion substrate support to support a substrate, the gas cushion substrate support comprising a metal top member, a support plate, and a plurality of holes formed through the metal support member and the support plate; flowing a gas through a gas conduit and through the plurality of holes to form a gas cushion between the substrate and the metal support surface to support the substrate; exhausting gas from the gas cushion through a plurality of gas escape passages formed through the top member and the support plate; depositing a print material on the substrate while the substrate is supported by the gas cushion; controlling the gas cushion by controlling a flowrate of the gas; and thermally controlling the substrate by adjusting a temperature of the gas using a thermal control system coupled to the gas conduit, the thermal control system comprising a thermal unit that circulates and controls a thermal medium and a heat exchanger that thermally couples the thermal medium with the gas. 20. The method of claim 19 , wherein the top member is a porous body.
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