Methods for calibrating an optical emission spectrometer

Patent metadata

Field	Value
Publication number	US-11927482-B2
Application number	US-202017604814-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Apr 26, 2019
Publication date	Mar 12, 2024
Grant date	Mar 12, 2024

Abstract

One or more embodiments described herein generally relate to systems and methods for calibrating an optical emission spectrometer (OES) used for processing semiconductor substrates. In embodiments herein, a light fixture is mounted to a plate within a process chamber. A light source is positioned within the light fixture such that it provides an optical path that projects directly at a window through which the OES looks into the process chamber for its reading. When the light source is on, the OES measures the optical intensity of radiation from the light source. To calibrate the OES, the optical intensity of the light source is compared at two separate times when the light source is on. If the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time, the OES is modified.

First claim

We claim:

1. A method for calibrating an optical emission spectrometer (OES), comprising:
measuring an optical intensity of radiation from a light source mounted within a process chamber with an OES located outside the process chamber at a first time;
measuring an optical intensity of radiation from the light source mounted within the process chamber with the OES located outside the process chamber at a second time;
determining a correction factor by comparing the optical intensity of radiation at the first time with the optical intensity of radiation at the second time; and
modifying the OES by the correction factor if the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time.

2. The method of claim 1 , wherein the light source is a xenon flash lamp.

3. The method of claim 2 , wherein the light source has a wavelength spectrum in a range from about 200 nm to about 800 nm.

4. The method of claim 1 , wherein an optical path travels from the light source into a diffuser located inside the process chamber.

5. The method of claim 4 , wherein the optical path travels from the diffuser through an optical window attached to a side wall of the process chamber.

6. The method of claim 5 , wherein the optical path travels through the optical window into a fiber optic line.

7. The method of claim 6 , wherein the fiber optic line has a 400 μm core.

8. A method for calibrating an optical emission spectrometer (OES), comprising:
mounting a light fixture within a process chamber, wherein the light fixture includes a light source;
measuring an optical intensity of radiation from the light source with an OES located outside the process chamber at a first time;
removing the light fixture from the process chamber after measuring the optical intensity of radiation at the first time;
performing a deposition of a semiconductor substrate after measuring the optical intensity of radiation at the first time;
re-mounting the light fixture within the process chamber;
measuring an optical intensity of radiation from the light source with the OES located outside the process chamber at a second time;
comparing the optical intensity of radiation at the first time with the optical intensity of radiation at the second time; and
modifying the OES if the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time.

9. The method of claim 8 , wherein the light source has a wavelength spectrum in a range from about 200 nm to about 800 nm.

10. A process system, comprising:
a process chamber;
a plate mounted within the process chamber;
an optical emission spectrometer (OES) located outside the process chamber;
a light fixture mounted to the plate, wherein the light fixture includes a light source; wherein:
an optical path is provided between the light source and the OES, and wherein the OES measures an optical intensity of radiation from the light source; and
a computer-readable storage medium configured to receive information from the OES, and when executed by a processor performs an operation, comprising:
comparing the optical intensity of radiation at a first time with the optical intensity of radiation at a second time; and
modifying the OES if the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time.

11. The system of claim 10 , wherein the light source is a xenon flash lamp.

12. The system of claim 11 , wherein the light source has a wavelength spectrum in a range from about 200 nm to about 800 nm.

13. The system of claim 10 , wherein the optical path travels from the light source into a diffuser located inside the process chamber.

14. The system of claim 13 , wherein the optical path travels from the diffuser through an optical window attached to a side wall of the process chamber.

15. The system of claim 14 , wherein the optical path travels through the optical window into a fiber optic line.

16. The method of claim 8 , wherein the light source is a xenon flash lamp.

17. The method of claim 8 , wherein an optical path travels from the light source into a diffuser located inside the process chamber.

18. The method of claim 17 , wherein the optical path travels from the diffuser through an optical window attached to a side wall of the process chamber.

19. The method of claim 18 , wherein the optical path travels through the optical window into a fiber optic line.

20. The method of claim 19 , wherein the fiber optic line has a 400 μm core.

Assignees

• Applied Materials Inc

Inventors

• Lo Kin Pong
• Hawrylchak Lara
• Bevan Malcolm J
• Guarini Theresa Kramer
• Liu Wei
• Hwang Bernard L

Classifications

• G01J3/10 Primary

  Arrangements of light sources specially adapted for spectrometry or colorimetry · CPC title

• G01J3/0218

  using optical fibers · CPC title

• G01J3/443 Primary

  Emission spectrometry · CPC title

• G01J2003/2879

  Calibrating scan, e.g. Fabry Perot interferometer · CPC title

• G01J3/28 Primary

  Investigating the spectrum (using colour filters G01J3/51) · CPC title