Substrate heating unit, substrate processing apparatus, and substrate processing method

Patent metadata

Field	Value
Publication number	US-11923213-B2
Application number	US-202017128159-A
Country	US
Kind code	B2
Filing date	Dec 20, 2020
Priority date	Dec 26, 2019
Publication date	Mar 5, 2024
Grant date	Mar 5, 2024

Abstract

Proposed is a substrate heating unit including: a laser generator providing a laser beam for heating a substrate; and a beam shaper processing the laser beam from the laser generator and selectively providing one of a first beam having a uniform energy distribution and a second beam having an edge-enhanced energy distribution to the substrate.

First claim

What is claimed is:

1. A substrate heating unit comprising:
a laser generator configured to generate a first laser beam which is directed toward a substrate; and
a beam shaper configured to shape an energy distribution of the first laser beam received from the laser generator to selectively provide the substrate with a second laser beam having one of a uniform energy distribution over the substrate and an edge-enhanced energy distribution in which a first portion of the second laser beam is directed toward an edge portion of the substrate, and a second portion of the second laser beam is directed toward a central portion of the substrate, wherein the first portion of the second laser beam has an energy intensity higher than an energy intensity of the second portion of the second laser beam.

2. The substrate heating unit of claim 1 ,
wherein the beam shaper comprises:
a lens assembly configured to divide the first laser beam into a plurality of laser beams; and
a condensing lens configured to converge the plurality of laser beams on the substrate,
wherein the lens assembly is disposed between the laser generator and the condensing lens,
wherein the lens assembly includes a first lens array and at least one second lens array,
wherein the first lens array and the at least one second lens array are positioned such that an optical axis of the first lens array and an optical axis of the at least one second lens array are aligned with each other,
wherein the first lens array is positioned at a fixed position and is closer to the laser generator than the at least on second lens array, and
wherein the at least one second lens array is configured to be movable along the optical axis of the first lens array to generate the second laser beam having a circular shape with a diameter which is substantially the same as a diameter of the substrate.

3. The substrate heating unit of claim 2 ,
wherein the beam shaper further comprises:
a lens drive mechanism configured to move the at least one second lens array.

4. The substrate heating unit of claim 3 , further comprising:
a temperature detector configured to measure a distribution of temperature of the substrate; and
a controller configured to control operation of the lens drive mechanism on the basis of the distribution of the temperature of the substrate.

5. The substrate heating unit of claim 2 ,
wherein the at least one second lens array is provided between the first lens array and the condensing lens.

6. The substrate heating unit of claim 5 ,
wherein the first lens array, the at least one second lens array, and the condensing lens are positioned such that an optical axis of the first lens array, the optical axis of the at least one second lens array, and an optical axis of the condensing lens are aligned with each other to a common optical axis.

7. The substrate heating unit of claim 5 ,
wherein the at least one second lens array includes a first movable lens array,
wherein the first movable lens array is controlled such that the first movable lens array is positioned at one of a first position that satisfies the following equation, and a second position that does not satisfy the following equation:
d 12 =f 2 ,  [Equation]

 where d 12 is a distance between the first lens array and the first movable lens array along the optical axis of the first lens array, and f 2 is a focal length of the first movable lens array.

8. The substrate heating unit of claim 2 ,
wherein the at least one second lens array comprises:
a first movable lens array that is provided between the first lens array and the condensing lens; and
a second movable lens array that is provided between the second lens array and the condensing lens.

9. The substrate heating unit of claim 8 ,
wherein the first lens array, the first movable lens array, the second movable lens array, and the condensing lens are positioned such that the optical axis of the first lens array, an optical axis of the first movable lens array, an optical axis of the second movable lens array, and an optical axis of the condensing lens are aligned with each other to a common optical axis.

10. The substrate heating unit of claim 8 ,
wherein the first movable lens array and the second movable lens array are controlled such that the first movable lens array is positioned at one of a first position that satisfies an equation 1, and a second position that does not satisfy the equation 1,
wherein the equation 1 is expressed as

d

1
⁢
2

=

f
2

(

f
3

-

d

2
⁢
3

)

f
2

+

f
3

-

d

2
⁢
3

,

 where d 12 is a distance between the first lens array and the first movable lens array, f 2 is a focal length of the first movable lens array, and f 3 is a focal length of the second movable lens array, and
wherein the second movable lens array is positioned at one of a third position that satisfies an equation 2, and a fourth position that does not satisfy the equation 2, and
wherein the equation 2 is expressed as

d

2
⁢
3

=

f
2

⁢

f
3

-

d

1
⁢
2

(

f
2

+

f
3

)

f
2

-

Assignees

• Semes Co Ltd

Inventors

• Kim Tae Shin
• Chung Young Dae
• Jeong Ji Hoon
• Lee Jee Young
• Kim Won Geun

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title