Sealing article comprising metal coating, method of making and method of using the same

Patent metadata

Field	Value
Publication number	US-11920238-B2
Application number	US-202217871810-A
Country	US
Kind code	B2
Filing date	Jul 22, 2022
Priority date	Sep 28, 2017
Publication date	Mar 5, 2024
Grant date	Mar 5, 2024

Abstract

A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.

First claim

What is claimed is:

1. A method of making a sealing article, comprising:
providing a body comprising a polymeric elastomer; and
forming a coating layer on a top surface of the body, the coating layer comprising at least one metal, and
wherein the body defines pores on the top surface only, and the coating layer has a portion interpenetrated into the pores.

2. The method of claim 1 , wherein the polymeric elastomer in the body is selected from the group consisting of perfluoroelastomer, fluoroelastomer and combinations thereof.

3. The method of claim 1 , wherein the body is provided by molding and curing a polymeric elastomer.

4. The method of claim 1 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

5. The method of claim 1 , wherein the coating layer is formed using a process selected from the group consisting of sputtering, electroplating, plastic plating and electroless plating.

6. The method of claim 1 , wherein the step of forming the coating layer comprises a step of etching the at least one surface of the body using an acid.

7. The method of claim 1 , wherein the body has a cross-section in a semi-circular or semi-elliptical shape, and the top surface of the body is a flat surface of the semi-circular or semi-elliptical shape.

8. The method of claim 1 , wherein the body has a cross-section in a circular or elliptical shape, and the coating layer is formed on and partially or fully covers an external surface of the body.

9. A method of making a sealing article, comprising:
providing a body made of a polymeric elastomer selected from the group consisting of perfluoroelastomer, fluoroelastomer and combinations thereof, and
forming a coating layer on a top surface of the body, the coating layer comprising at least one metal,
wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, the body is a monolithic solid, and the coating layer is a layer disposed on the flat surface of the body, and
wherein the body defines pores on the flat surface only, and the coating layer has a portion interpenetrated into the pores.

10. The method of claim 9 , wherein the polymeric elastomer in the body comprises a perfluoroelastomer.

11. The method of claim 9 , wherein the coating layer on the top surface of the body is configured to face toward radiation in a semiconductor processing chamber and reflect or absorb the radiation.

12. The method of claim 9 , wherein the polymeric elastomer is fluoroelastomer.

13. The method of claim 9 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

14. The method of claim 9 , wherein the coating layer is made of aluminum.

15. The method of claim 9 , wherein the coating layer has a thickness in a range of from 10 micrometers to about 10,000 micrometers.

16. The method of claim 9 , wherein the sealing article is selected from the group consisting of a seal, a gasket, an O-ring, and a T-ring, and is in a loop configuration or is sized and shaped to provide a loop configuration extending along an elongated shape of the body.

17. A method of making a sealing article, comprising:
providing a monolithic body comprising a polymeric elastomer and a flat top surface; and
forming a coating layer on the flat top surface of the body, the coating layer comprising at least one metal,
wherein the body defines pores on the top flat surface surface only, and the coating layer has a portion interpenetrated into the pores.

18. The method of claim 17 , wherein the polymeric elastomer in the body is selected from the group consisting of perfluoroelastomer, fluoroelastomer and combinations thereof.

19. The method of claim 1 , wherein the body is provided by molding and curing a polymeric elastomer.

20. The method of claim 17 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hong Peng-Cheng
• Pu jun-liang
• Hsu W L
• Kao Chung-Hao
• Hung Chia-Chun
• Wu Cheng-Yi
• Lee Chin-Szu

Classifications

• C23C16/4409 Primary

  characterised by sealing means · CPC title

• B29D99/0053

  Producing sealings (B29D99/0085 takes precedence) · CPC title

• C23C14/021

  Cleaning or etching treatments · CPC title

• C23C14/205

  by cathodic sputtering · CPC title

• C23C14/34

  Sputtering · CPC title