Automated test system

Patent metadata

Field	Value
Publication number	US-11899042-B2
Application number	US-202017077824-A
Country	US
Kind code	B2
Filing date	Oct 22, 2020
Priority date	Oct 22, 2020
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

An example test system includes test sites comprising test sockets for testing devices under test (DUTs) and pickers for picking DUTs from the test sockets or placing the DUTs into the test sockets. Each picker may include a picker head for holding a DUT. The test system also includes a gantry on which the pickers are mounted. The gantry may be configured to move the pickers relative to the test sites to position the pickers for picking the DUTs from the test sockets or placing the DUTs into the test sockets. The test sockets are arranged in at least one array that is accessible to the pickers on the gantry.

First claim

What is claimed is:

1. A test system comprising:
test sites comprising test sockets for testing devices under test (DUTs);
Dickers for picking DUTs from the test sockets or placing the DUTs into the test sockets, each picker comprising a picker head for holding a DUT;
a gantry on which the pickers are mounted, the gantry being configured to move the pickers relative to the test sites to position the pickers for picking the DUTs from the test sockets or placing the DUTs into the test sockets; and
packs comprising the test sockets and at least some test electronics for performing tests on the DUTs in the test sockets, where different packs are configurable to have different configurations for DUTs having different characteristics;
wherein the test sockets are arranged in at least one array that is accessible to the pickers on the gantry; and
wherein the pickers are controllable, and a number of the pickers is scalable, based on characteristics of the packs and the test sockets in the packs.

2. The test system of claim 1 , wherein the gantry comprises a beam that spans across the at least one array of test sockets and that is configured to move over the at least one array of test sockets in a direction perpendicular to the beam; and
wherein the pickers are arranged linearly along the beam and are configured to move linearly along the beam.

3. The test system of claim 2 , wherein the pickers are controllable to move linearly along the beam to change a pitch of the pickers along the beam.

4. The test system of claim 3 , wherein the pickers are controllable to move linearly along the beam to change the pitch while the beam moves over the at least one array of test sockets in the direction perpendicular to the beam.

5. The test system of claim 2 , wherein the pickers are configured to service multiple test sockets simultaneously, where servicing comprises at least one of placing DUTs into the multiple test sockets or picking DUTs from the multiple test sockets.

6. The test system of claim 2 , wherein one or more of the pickers is configured, through servo-control, to move at least partly perpendicularly or obliquely relative to the beam in order to finely align with one or more respective test sockets.

7. The test system of claim 1 , further comprising:
one or more temperature sensors configured to sense a temperature of at least one of the gantry or the test sockets; and
a control system that is servo-based to change a position of one or more of the pickers to compensate for thermal expansion of at least one of the gantry or the test sockets.

8. The test system of claim 1 , further comprising:
an encoder scale attached to a frame of the test system; and
an encoder reader attached to the gantry; and
wherein the control system is configured to identify vibrations in the test system based on an output of the encoder reader and to control operation of the test system to counteract the vibrations.

9. The test system of claim 1 , wherein each picker head comprises a nozzle to hold a DUT using at least vacuum pressure, the nozzle comprising at least one of a soft polymer vacuum cup comprised of electrostatic-discharge (ESD) dissipative material, a hard plastic tip comprised of ESD dissipative material, a hard material comprising an integrated ejection collar to accommodate roll and pitch changes of a DUT, or a soft polymer vacuum cup comprising an integrated ejection collar configured to reduce stiction between the nozzle and the DUT.

10. The test system of claim 1 , further comprising:
a feeder configured to hold trays comprising cells for holding at least some DUTs to be tested or at least some DUTs that have been tested;
wherein the pickers are configured to pick the DUTs to be tested from some of the cells and to place the DUTs that have been tested into others of the cells.

11. The test system of claim 10 , wherein the trays are arranged in a plane that is parallel to, or a co-planar with, a plane in which at least some of the test sockets are arranged.

12. The test system of claim 1 , wherein the gantry comprises a first beam that spans across the at least one array of test sockets and that is configured to move relative to the test sockets and a second beam that spans across the at least one array of test sockets and that is configured to move relative to the test sockets; and
wherein one or more of the pickers are arranged linearly along the first beam and one or more of the pickers are arranged linearly along the second beam.

13. The test system of claim 1 , wherein the pickers are controllable to move in three or more degrees of freedom relative to the test sockets.

14. The test system of claim 13 , wherein the three or more degrees of freedom comprise left-right, forward-backward, up-down, and rotation.

15. The test system of claim 1 , further comprising:
a machine vision system configured to detect placement of a DUT in a test socket a picker holding a DUT, and a configuration and orientation of a test socket.

16. The test system of claim 1 , wherein the gantry has a settling time that is at most +/−10 microns in less than 20 milliseconds.

17. The test system of claim 1 , wherein the pickers comprise linear actuators;
wherein each linear actuator is configured to extend or to retract a respective picker head; and
wherein, when a picker head is retracted, the picker has sufficient clearance to pass over the test sockets including when the test sockets contain DUTs.

18. The test system of claim 1 , wherein each picker is configured for linear movement along part of the gantry to adjust for different center-to-center distances between DUTs in the test sockets or DUTs in trays included in the test system.

19. The test system of claim 1 , further comprising linear magnetic motors to position the gantry for DUT pick-up, placement, and measurement operations.

20. The test system of claim 1 , further comprising linear magnetic motors to position the pickers perpendicular to motion of the gantry for DUT pick-up, placement, and measurement operations.

21. A test system comprising:
test sites comprising test sockets for testing devices under test (DUTs);
pickers for picking DUTs from the test sockets or placing the DUTs into the test sockets, each picker comprising a picker head for holding a DUT;
a gantry on which the pickers are mounted, the gantry being configured to move the pickers relative to the test sites to position the pickers for picking the DUTs from the test sockets or placing the DUTs into the test sockets; and
packs comprising the test sockets and at least some test electronics for performing tests on the DUTs in the test sockets, where different packs are configurable to have different configurations, the different configurations comprising at least different numbers of test sockets arranged at different pitches;
wherein the test sockets are arranged in at least one array that is accessible to the pickers on the gantry;
wherein the gantry comprises a beam that spans across the at least one array of test sockets and that is configured to move over the at least one array of test sockets in a direction perpendicular to the beam; and
wherein the pickers are arranged linearly along the beam and are configured to move linearly along the beam;
wherein the pickers are controllable to move linearly along the beam to change a pitch of the pickers along the beam;
wherein the pickers are controllable to move linearly along the beam to change the pitch while the beam moves

Assignees

• Teradyne Inc

Inventors

• Campbell Philip Luke
• Khalid Adnan
• Jones Christopher Croft
• Bruno Christopher James

Classifications

• G01R1/0466 Primary

  concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding · CPC title

• G01R31/2887

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R31/2889

  Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence) · CPC title

• G01R31/2891

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R1/0458

  related to environmental aspects, e.g. temperature · CPC title