Method for producing ultrapure water, ultrapure water production system, and ion exchanger-filled module

Patent metadata

Field	Value
Publication number	US-11897790-B2
Application number	US-201917053259-A
Country	US
Kind code	B2
Filing date	May 15, 2019
Priority date	May 17, 2018
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

Provided is a method for producing ultrapure water to supply, to a use point, ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus, wherein the raw material water for ultrapure water production contains at least one or more elements selected from B, As, Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb, and wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and water to be treated is passed through the ion exchanger-filled module for treatment.

First claim

The invention claimed is:

1. A method for producing ultrapure water to supply, to a use point, the ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus,
wherein the raw material water for ultrapure water production contains metal impurities of both of:
at least one element selected from the group consisting of B and As, and
at least one element selected from the group consisting of Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb,

wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and the raw material water to be treated is passed through the ion exchanger-filled module for treatment, and
wherein the raw material water to be treated is passed through the monolithic organic porous anion exchanger-filled module at a water passing speed SV of greater than or equal to 1274 h −1 and less than or equal to 20000 h −1 to remove the metal impurities from the raw material water and produce the ultrapure water.

2. The method for producing ultrapure water according to claim 1 , wherein all of the raw material water for ultrapure water production or a part of another raw material water to be mixed with the raw material water for ultrapure water production is collected washing water that has been used for washing semiconductors in a semiconductor production process.

3. The method for producing ultrapure water according to claim 1 , wherein the monolithic organic porous anion exchanger is formed of a continuous framework phase and a continuous pore phase; the continuous framework phase has a thickness of a continuous framework of 1 to 100 μm, the continuous pore phase has an average diameter of continuous pores of 1 to 1000 μm, and a total pore volume of 0.5 to 50 mL/g; the monolithic organic porous anion exchanger has an anion exchange capacity of 0.1 to 1.0 mg equivalent/mL in a wet state; and the monolithic organic porous anion exchanger has anion exchange groups that are uniformly distributed in the monolithic organic porous anion exchanger.

4. The method for producing ultrapure water according to claim 3 , wherein the monolithic organic porous anion exchanger is a co-continuous structural material formed of a three dimensionally continuous framework by intertwining the continuous framework phase and the continuous pore phase, the monolithic organic porous anion exchanger comprising an aromatic vinyl polymer containing 0.1 to 5.0 mol % of crosslinked structural units among all the entire constituent units provided in the monolithic organic porous anion exchanger, with an average thickness of 1 to 60 μm in a dry state, and three dimensionally continuous pores in the three dimensionally continuous framework with an average diameter of 10 to 200 μm in a dry state; the monolithic organic porous anion exchanger has a total pore volume of 0.5 to 10 mL/g in a dry state; and the monolithic organic porous anion exchanger has an anion exchange capacity per volume in a water wet state of 0.2 to 1.0 mg equivalent/mL.

5. The method for producing ultrapure water according to claim 1 , wherein the ion exchanger-filled module is filled with a cation exchanger in a stage preceding or subsequent to the monolithic organic porous anion exchanger.

Assignees

• Organo Corp

Inventors

• Tsutano Kyohei
• Takada Hitoshi

Classifications

• C02F1/42 Primary

  by ion-exchange (ion-exchange in general B01J) · CPC title

• B01J41/04 Primary

  Processes using organic exchangers · CPC title

• B01J41/14

  obtained by reactions only involving unsaturated carbon-to-carbon bonds · CPC title

• B01J47/022

  characterised by the construction of the column or container · CPC title

• B01J47/028

  with alternately arranged cationic and anionic exchangers · CPC title